Granted Patent B2

US 12,278,085 · App. 17/714,908 · Granted Apr 15, 2025

Inventors: Guy Shwartz (Ramat-Gan, IL); Ori Golani (Ramat Gan, IL); Itamar Shani (Rehovot, IL); Ido Almog (Rehovot, IL)

Assignee: APPLIED MATERIALS ISRAEL LTD.

H01J37/28G01N23/2251H01J37/222H01J37/244H01J2237/226H01J2237/24475H01J2237/2448

Abstract

Claims (55)

1. A computerized system for non-destructive hybrid acousto-optic and scanning electron microscopy based metrology, the system comprising a measurement setup and a computational module;

wherein the measurement setup comprises an acousto-optic setup and a scanning electron microscope (SEM);

wherein the acousto-optic setup comprises light generating equipment and a light detector and is configured to obtain acousto-optic measurement data of an inspected structure on a sample:

wherein the SEM is configured to obtain scanning electron microscopy measurement data of the inspected structure; and

wherein the computational module is configured to:

process the obtained measurement data to extract values of key measurement parameters corresponding to the acousto-optic measurement data and the scanning electron microscopy measurement data, respectively; and

obtain estimated values of one or more structural parameters of the inspected structure by executing an algorithm, which is configured to jointly process the extracted values to output estimated values of the one or more structural parameters.

2. The system of claim 1 , wherein the algorithm is a machine-learning (ML) derived algorithm.

3. The system of claim 1 , wherein the algorithm is a search algorithm comprising an interpolator, which is configured to output interpolated values of the key measurement parameters when guesstimates of structural parameters are input thereinto, the search algorithm being configured to, starting from initial guesstimates of the structural parameters, repeatedly modify the guesstimates, until interpolated values of the key measurement parameters, obtained from the guesstimates, match the extracted values of the key measurement parameters to a required precision; and

wherein the interpolator is a ML-derived algorithm or model-based.

4. The system of claim 1 , wherein the inspected structure is exposed;

wherein the light generating equipment is configured to:

project an optical pump beam on the inspected structure, which is configured to be absorbed by the sample, so as induce an acoustic disturbance within the inspected structure; and

while the acoustic disturbance is ongoing, project an optical probe beam on the inspected structure; and

wherein the light detector is configured to sense an optical beam returned from the inspected structure, thereby obtaining at least part of the acousto-optic measurement data.

5. The system of claim 4 , wherein the acoustic disturbance is constituted by an acoustic pulse, which propagates within the inspected structure, and which is induced by heating of the sample caused by the absorbance of the pump beam, and wherein the probe beam is configured to be Brillouin scattered off the acoustic pulse.

6. The system of claim 5 , wherein the inspected structure comprises a base positioned on, or forming part of, the sample;

wherein the inspected structure comprises vias, which nominally vertically extend from a top surface of the inspected structure to the base or in a direction thereof;

wherein the acousto-optic setup is configured to project the pump beam and the probe beam on the top surface of the inspected structure; and

wherein the pump beam is configured to be absorbed by the base, so that the acoustic pulse travels from the base in a direction of the top surface of the inspected structure.

7. The system of claim 6 , wherein the pump beam is pulsed, the probe beam is pulsed, and the pump pulses in the pump beam and the probe pulses in the probe beam are alternating; and

wherein the light generating equipment is configured to controllably vary a time delay time of the probe pulses relative to the pump pulses, respectively, thereby allowing to Brillouin scatter each probe pulse off a respective acoustic pulse, generated by a respectively last projected of the pump pulses, at a controllable depth within the inspected structure.

8. The system of claim 7 , wherein the acousto-optic setup is configured to project K≥2 pairs of the pump beam and the probe beam on the inspected structure, such that, for each 1≤k≤K, each probe pulse in the k-th probe beam is delayed by a time delay Δt k relative to a respectively last projected of the pump pulses in the k-th pump beam, thereby allowing to probe the inspected structure at each of K depths and obtain K corresponding acousto-optic measurement signals, respectively, which constitute at least part of the acousto-optic measurement data.

9. The system of claim 8 , wherein the light generating equipment comprises a laser source, a beam splitter, and a variable delay line arranged such that a laser pulse, generated by the laser source, is split by the beam splitter into a first pulse portion, which constitutes, or is used in preparing, one of the pump pulses, and a second pulse portion, which is transmitted into the variable delay line, thereby generating one of the probe pulses; and

wherein the variable delay line configured to controllably delay each probe pulse relative to a respectively last projected of the pump pulses.

10. The system of claim 9 , wherein the system further comprises a lock-in amplifier and the light generating equipment further comprises an optical modulator;

wherein the optical modulator is configured to modulate a waveform of each of the first pulse portions, thereby preparing the respective pump pulses; and

wherein each of the first pulse portions is modulated so as to be characterized by a carrier wave and an envelope, which is configured to facilitate extraction, through demodulation by the lock-in amplifier, of contributions of returned portions of the K pulsed probe beams to the K acousto-optic measurement signals, respectively.

11. The system of claim 6 , wherein a wavelength of the probe beam is at least about two times greater than a diameter of the vias and/or a distance therebetween.

12. The system of claim 6 , wherein the key measurement parameters, extracted from the scanning electron microscopy measurement data, comprise, for each of at least some of the vias, one or more of: (i) at least one first lateral geometrical feature characterizing an opening of the via, (ii) at least one second lateral geometrical feature characterizing a bottom surface of the via, and (iii) at least one third lateral geometrical feature quantifying a lateral distance between the opening and the bottom surface.

13. The system of claim 12 , wherein the SEM comprises an electron sensor, and wherein the scanning electron microscopy measurement data comprise one or more SEM signals of the inspected structure, obtained by sensing with the electron sensor secondary and/or backscattered electrons generated as a result of scanning the inspected structure with an electron beam.

14. A method for non-destructive hybrid acousto-optic and scanning electron microscopy-based metrology, the method comprising:

obtaining acousto-optic and scanning electron microscopy measurement data of an inspected structure on a sample;

processing the measurement data to extract values of key measurement parameters corresponding to the acousto-optic measurement data and the scanning electron microscopy measurement data, respectively; and

obtaining estimated values of one or more structural parameters of the inspected structure by inputting the extracted values into an algorithm, which is configured to jointly process the extracted values to output estimated values of the one or more structural parameters.

15. The method of claim 14 , wherein the algorithm is a machine-learning (ML) derived algorithm.

16. The method of claim 14 , wherein the algorithm is a search algorithm comprising an interpolator, which is configured to output interpolated values of the key measurement parameters when guesstimates of structural parameters are input thereinto, the search algorithm being configured to, starting from initial guesstimates of the structural parameters, repeatedly modify the guesstimates, until interpolated values of the key measurement parameters, obtained from the guesstimates, match the extracted values of the key measurement parameters to a required precision; and

wherein the algorithm is a ML-derived algorithm or is model-based.

17. The method of claim 14 , wherein the inspected structure is exposed;

wherein the acousto-optic measurement data is obtained by sub operations of:

projecting an optical pump beam on the inspected structure, which is configured to be absorbed by the sample, so as induce an acoustic disturbance within the inspected structure;

while the acoustic disturbance is ongoing, projecting an optical probe beam on the inspected structure; and

measuring an optical beam returned from the inspected structure;

wherein the acoustic disturbance is constituted by an acoustic pulse, which propagates within the inspected structure, and which is induced by heating of the sample caused by the absorbance of the pump beam; and

wherein the probe beam is Brillouin scattered off the acoustic pulse.

18. The method of claim 17 , wherein the inspected structure comprises a base positioned on, or forming part of, the sample;

wherein the inspected structure comprises vias, which nominally vertically extend from a top surface of the inspected structure to the base or in a direction thereof;

wherein each of the pump beam and the probe beam are projected on the top surface of the inspected structure;

wherein the pump beam is configured to be absorbed by the base; and

wherein the acoustic pulse travels from the base in a direction of the top surface of the inspected structure.

19. The method of claim 18 , wherein the pump beam is pulsed laser beam, the probe beam is a pulsed laser, and the pump pulses in the pump beam and the probe pulses in the probe beam are alternating;

wherein the projection of the pump beam, the projection of the probe beam, and the measurement of the returned beam, are implemented K≥2 times;

wherein, for each 1≤k≤K, each probe pulse in the k-th probe beam is delayed by a time delay Δt k relative to a respectively last projected of the pump pulses in the k-th pump beam, such that each of the probe pulses is scattered off a respective acoustic pulse, induced by the respectively last projected pump pulse, at a probed depth Δz k , corresponding to the time delay Δt k , within the inspected structure; and

wherein acousto-optic key measurement parameters specify a dependence of a frequency of Brillouin oscillations on the probed depth and/or a dependence of an amplitude of the Brillouin oscillations on the probed depth.

20. The method of claim 17 , wherein the scanning electron microscopy measurement data comprise one or more SEM signals, obtained by sensing secondary and/or backscattered electrons generated as a result of scanning the inspected structure with an electron beam, and wherein the key measurement parameters, extracted from the scanning electron microscopy measurement data, comprise, for each of at least some of the vias, one or more of: (i) at least one first lateral geometrical feature characterizing an opening of the via, (ii) at least one second lateral geometrical feature characterizing a bottom surface of the via, and (iii) at least one third lateral geometrical feature quantifying a lateral distance between the opening and the bottom surface.

Assignments (1)

Continuity (1)

References Cited (23)