IP Library Granted Patent US 11,587,696
Granted Patent B2
US 11,587,696 · App. 17/715,411 · Granted Feb 21, 2023

Patterned nanoparticle structures

Inventors: James Watkins (South Hadley, MA); Michael R. Beaulieu (Chicopee, MA); Nicholas R. Hendricks (South Deerfield, MA)
Assignee: University of Massachusetts
H01B1/08G02B1/118H01B3/10H01B13/003H01L51/0015H01M4/04H01M6/40H01M8/124B82Y30/00H01L51/442H01L51/5209H01L2251/5369H01M4/0433H01M8/1286Y02P70/50Y10T428/24893
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Quick Facts
Patent No.
US 11,587,696
App. No.
17/715,411
Granted
Feb 21, 2023
Kind
B2
Abstract

Aspects relate to patterned nanostructures having a feature size not including film thickness of below 5 microns. The patterned nanostructures are made up of nanoparticles having an average particle size of less than 100 nm. A nanoparticle composition, which, in some cases, includes a binder, is applied to a substrate. A patterned mold used in concert with electromagnetic radiation function to manipulate the nanoparticle composition in forming the patterned nanostructure. In some embodiments, the patterned mold nanoimprints a pattern onto the nanoparticle composition and the composition is cured through UV or thermal energy. Three-dimensional patterned nanostructures may be formed. A number of patterned nanostructure layers may be prepared and joined together. In some cases, a patterned nanostructure may be formed as a layer that is releasable from the substrate upon which it is initially formed. Such releasable layers may be arranged to form a three-dimensional patterned nanostructure for suitable applications.

Claims (13)

1. An optical device comprising:

a patterned layer, wherein a feature size of the patterned layer is less than or equal to 5 microns, wherein the patterned layer comprises a composition including:

a plurality of nanoparticles, wherein the plurality of nanoparticles have an average particle size of less than 100 nm; and

a binder; and

an atomic layer deposition-deposited coating disposed on the patterned layer, wherein the coating is disposed at least partially within pores of the patterned layer.

2. The optical device of claim 1 , wherein the device has been treated to remove organics.

3. The optical device of claim 1 , wherein a weight percentage of the plurality of nanoparticles in the composition is greater than 70 weight percent.

4. The optical device of claim 1 , wherein the patterned layer is adapted to manipulate electromagnetic radiation.

5. The optical device of claim 1 , wherein the patterned layer has an index of refraction between 1.5 and 3.0.

6. The optical device of claim 1 , wherein the patterned layer is substantially optically transparent at at least one wavelength.

7. The optical device of claim 1 , further comprising an optically transparent substrate, and wherein the patterned layer is disposed on the substrate.

8. The optical device of claim 1 , wherein the patterned layer includes features with an aspect ratio of height to width between or equal to 1.5:1 and 10:1.

9. The optical device of claim 1 , wherein the patterned layer is periodic.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 15, 2022
From: WATKINS, JAMES; BEAULIEU, MICHAEL R.; HENDRICKS, NICHOLAS R.
To: UNIVERSITY OF MASSACHUSETTS
Reel/Frame 060514/0705 →
Continuity (4)
Continuation 17485281 · Sep 24, 2021
Continuation 13900248 · May 22, 2013
Provisional Application 61650214 · May 22, 2012
Related Publication 20220230773A1 · Jul 21, 2022