Display device including inorganic layers with different porosity and method of manufacturing display device
A display device includes a light emitting element disposed on a substrate. A color conversion layer is disposed on the light emitting element, the color conversion layer including color conversion particles that convert light of a first color emitted from the light emitting element into light of a second color. An insulating layer is disposed on the color conversion layer. The insulating layer includes a first inorganic layer overlapping the color conversion layer, a second inorganic layer disposed on the first inorganic layer, and a third inorganic layer disposed on the second inorganic layer. A second porosity of the second inorganic layer is greater than a first porosity of the first inorganic layer. A second porosity of the second inorganic layer is greater than a third porosity of the third inorganic layer.
1. A display device comprising:
a light emitting element disposed on a substrate;
a color conversion layer disposed on the light emitting element, the color conversion layer including color conversion particles that convert light of a first color emitted from the light emitting element into light of a second color; and
an insulating layer disposed on the color conversion layer, the insulating layer including:
a first inorganic layer overlapping the color conversion layer;
a second inorganic layer disposed on the first inorganic layer; and
a third inorganic layer disposed on the second inorganic layer, wherein
a second porosity of the second inorganic layer is greater than a first porosity of the first inorganic layer, and
the second porosity of the second inorganic layer is greater than a third porosity of the third inorganic layer.
2. The display device according to claim 1 , wherein the second porosity of the second inorganic layer is within a range of about 20% to about 80%.
3. The display device according to claim 1 , wherein the first porosity of the first inorganic layer is less than a third porosity of the third inorganic layer.
4. The display device according to claim 1 , wherein
the first porosity of the first inorganic layer is less than or equal to about 5%, and
the third porosity of the third inorganic layer is less than or equal to about 20%.
5. The display device according to claim 1 , wherein a second refractive index of the second inorganic layer is less than a first refractive index of the first inorganic layer.
6. The display device according to claim 5 , wherein the second refractive index of the second inorganic layer is within a range of about 1.1 to about 1.3.
7. The display device according to claim 6 , wherein the second refractive index of the second inorganic layer is about 1.2.
8. The display device according to claim 1 , wherein a thickness of the second inorganic layer is within a range of about 0.3 μm to about 0.6 μm.
9. The display device according to claim 8 , wherein
a thickness of the first inorganic layer is greater than or equal to about 0.1 μm, and
a thickness of the third inorganic layer is greater than or equal to about 0.1 μm.
10. The display device according to claim 1 , wherein the first inorganic layer, the second inorganic layer, and the third inorganic layer include a same material.
11. The display device according to claim 1 , wherein at least part of the first inorganic layer, the second inorganic layer, and the third inorganic layer include different materials.
12. The display device according to claim 1 , wherein the second inorganic layer includes hydrogenated amorphous silicon (a-Si:H).
13. The display device according to claim 11 , wherein the second inorganic layer further includes at least one of silicon oxide (SiO x ), silicon nitride (SiN x ), and silicon oxynitride (SiON).
14. The display device according to claim 13 , wherein the insulating layer does not include hollow silica and an organic material.
15. The display device according to claim 1 , wherein
the first inorganic layer, the second inorganic layer, and the third inorganic layer are formed through chemical vapor deposition, and
a deposition condition of the second inorganic layer is different from a deposition condition of the first inorganic layer.
16. The display device according to claim 1 , further comprising:
a color filter disposed on the insulating layer; and
an overcoat layer disposed on the color filter.
17. The display device according to claim 1 , wherein the light emitting element includes an inorganic light emitting diode.
18. A method of manufacturing a display device, the method comprising:
forming a color conversion layer on a display element layer that includes a light emitting element; and
forming an insulating layer on the color conversion layer through chemical vapor deposition,
wherein the forming of the insulating layer includes:
forming a first inorganic layer on the color conversion layer under a first deposition condition;
forming a second inorganic layer on the first inorganic layer under a second deposition condition; and
forming a third inorganic layer on the second inorganic layer, wherein the first deposition condition is different from the second deposition condition, and
a second porosity of the second inorganic layer is greater than a first porosity of the first inorganic layer.
19. The method according to claim 18 , wherein the first porosity of the first inorganic layer is less than a third porosity of the third inorganic layer.
20. The method according to claim 18 , wherein a second refractive index of the second inorganic layer is less than a first refractive index of the first inorganic layer.