Chip package and method of forming the same
A chip package includes a semiconductor die laterally encapsulating by an insulating encapsulant, a first dielectric portion, conductive vias, conductive traces and a second dielectric portion. The first dielectric portion covers the semiconductor die and the encapsulant. The conductive vias penetrate through the first dielectric portion and electrically connected to the semiconductor die. The conductive traces are disposed on the first dielectric portion. The second dielectric portion is disposed on the first dielectric portion and covering the conductive traces, wherein a first minimum lateral width of a conductive trace among the conductive traces is smaller than a second minimum lateral width of a conductive via among the conductive vias. A method of forming the chip package is also provided.
1. A chip package, comprising:
a semiconductor die laterally encapsulating by an insulating encapsulant;
a first dielectric portion covering the semiconductor die and the encapsulant;
conductive vias penetrating through the first dielectric portion and electrically connected to the semiconductor die;
conductive traces disposed on the first dielectric portion; and
a second dielectric portion disposed on the first dielectric portion and covering the conductive traces, wherein a first minimum lateral width of a conductive trace among the conductive traces is smaller than a second minimum lateral width of a conductive via among the conductive vias.
2. The chip package of claim 1 , wherein the first dielectric portion is in contact with the semiconductor die.
3. The chip package of claim 1 , wherein the conductive vias are in contact with and electrically connected to connectors of the semiconductor die.
4. The chip package of claim 3 , wherein the conductive vias are in contact with and electrically connected to the connectors of the semiconductor die, and the conductive vias are disposed between the conductive traces and the connectors of the semiconductor die.
5. The chip package of claim 1 , wherein the first dielectric portion and the conductive vias are disposed between the second dielectric portion and the semiconductor die.
6. The chip package of claim 1 further comprising a patterned seed layer disposed on bottom surfaces and side surfaces of the conductive vias and bottom surfaces of the conductive traces.
7. The chip package of claim 1 , wherein the conductive vias are spaced apart from the insulating encapsulant by the first dielectric portion.
8. The chip package of claim 1 , wherein the second minimum lateral width ranges from about 1 micrometer to about 5 micrometers, and the second minimum lateral width ranges from about 0.2 micrometer to about 0.9 micrometer.
9. A method for forming a chip package, comprising:
laterally encapsulating a semiconductor die with an insulating encapsulant;
forming a first dielectric portion in contact with the insulating encapsulant and the semiconductor die, the first dielectric portion comprising via holes, wherein connectors of the semiconductor die are exposed by the via holes;
forming a second dielectric portion on the first dielectric portion, the second dielectric portion comprising trenches above the via holes; and
forming conductive vias in the via holes and conductive traces in the trenches, wherein a first minimum lateral width of a conductive trace among the conductive traces is smaller than a second minimum lateral width of a conductive via among the conductive vias.
10. The method of claim 9 , wherein forming the conductive vias and the conductive traces comprises:
forming a seed layer covering the first dielectric portion and the second dielectric portion;
forming a conductive material on the seed layer; and
removing portions of the conductive material and portions of the seed layer until the second dielectric portion is revealed.
11. The method of claim 10 , wherein the portions of the conductive material and the portions of the seed layer are removed through a chemical mechanical polishing process.
12. The method of claim 9 , wherein the conductive vias and the conductive traces are formed by a damascene process.
13. The method of claim 9 , wherein forming the conductive vias and the conductive traces comprises:
filling a conductive material in the via holes and the trenches; and
removing portions of the conductive material to form the conductive vias and the conductive traces.
14. The method of claim 9 , wherein the conductive vias are located at a first level height, the conductive traces are located at a second level height, connectors of the semiconductor die are located at a third level height, and the first level height is between the second level height and the third level height.
15. A method for forming a chip package, comprising:
laterally encapsulating a semiconductor die with an insulating encapsulant;
forming a first dielectric portion over the insulating encapsulant and the semiconductor die, the first dielectric portion being in contact with the insulating encapsulant and the semiconductor die, and the first dielectric portion comprising via holes;
forming a second dielectric portion, the second dielectric portion comprising first trenches located above the via holes and second trenches separated from the first trenches; and
forming conductive vias in the via holes, first conductive traces in the first trenches and second conductive traces in the second trenches, wherein a first minimum lateral width of a second conductive trace among the second conductive traces is smaller than a second minimum lateral width of a conductive via among the conductive vias.
16. The method of claim 15 , wherein a minimum lateral width of a via hole among the via holes is greater than a minimum lateral width of a second trench among the second trenches.
17. The method of claim 15 , wherein the conductive vias, the first conductive traces and the second conductive traces are formed by a damascene process.
18. The method of claim 15 , wherein forming the conductive vias in the via holes, the first conductive traces in the first trenches and the second conductive traces in the second trenches comprises:
forming a conductive material filling the via holes, the first trenches and the second trenches, and the conductive material covering a top surface of the second dielectric portion; and
removing the conductive material outside the via holes, the first trenches and the second trenches until the top surface of the second dielectric portion is exposed.
19. The method of claim 15 , further comprising:
forming a third dielectric portion on second dielectric portion to cover the first conductive traces and the second conductive traces.
20. The method of claim 15 , wherein forming the conductive via, the first conductive traces and the second conductive traces comprises:
forming a seed layer on the first dielectric portion and the second dielectric portion,
forming a conductive material on the seed layer, the conductive material filling the via holes, the first trenches and the second trenches; and
removing the conductive material outside the via holes, the first trenches and the second trenches until a top surface of the second dielectric portion is exposed.