Deposition apparatus having mask assembly and method of repairing the mask assembly
A deposition apparatus includes a chamber, a mask assembly disposed in the chamber and including an open sheet including a first area in which a first deposition hole is defined and a second area in which a second deposition hole spaced apart from the first deposition hole is defined, a first mask including multiple deposition openings that overlap the first area, and a second mask including multiple deposition openings that overlap the second area, a deposition substrate disposed on the mask assembly, and a deposition source spraying a deposition material to the mask assembly.
1. A mask assembly comprising:
a mask including deposition openings and a protrusion hole; and
an open sheet including:
a deposition hole overlapping the deposition openings; and
an alignment protrusion adjacent to the deposition hole and overlapping the protrusion hole; and
a fixing protrusion spaced apart from the alignment protrusion, the fixing protrusion being a weld between the open sheet and the mask provided by welding the mask with the open sheet after the alignment protrusion is combined with protrusion hole, the fixing protrusion non-overlapping the protrusion hole.
2. The mask assembly of claim 1 , wherein
the alignment protrusion and the fixing protrusion are defined as a protrusion group,
the protrusion group is provided in plural, the plurality of protrusion groups surrounding the deposition hole, and
the protrusion hole is provided in plural, the plurality of protrusion holes corresponding to the alignment protrusions of the plurality of protrusion groups.
3. The mask assembly of claim 2 , wherein a separation distance between the alignment protrusions included in adjacent ones of the plurality of protrusion groups is equal to or greater than about 2 mm and equal to or smaller than about 5 mm.
4. The mask assembly of claim 1 , wherein the alignment protrusion has a diameter equal to or greater than about 200 micrometers and equal to or smaller than about 500 micrometers.
5. The mask assembly of claim 3 , wherein a diameter of the protrusion hole is greater than the diameter of the alignment protrusion by about 10 micrometers or more to about 50 micrometers or less.
6. The mask assembly of claim 1 , wherein the open sheet has a first thickness ranging from about 50 um to about 150 um.