Semiconductor device and manufacturing method thereof
A semiconductor device includes a package and a cooling cover. The package includes a first die having an active surface and a rear surface opposite to the active surface. The rear surface has a cooling region and a peripheral region enclosing the cooling region. The first die includes micro-trenches located in the cooling region of the rear surface. The cooling cover is stacked on the first die. The cooling cover includes a fluid inlet port and a fluid outlet port located over the cooling region and communicated with the micro-trenches.
1. A semiconductor device, comprising:
a device die, having a rear surface formed with micro-trenches; and
a cooling cover, attached to the rear surface of the device die, and comprising:
a first fluid inlet port and a first fluid outlet port, laterally extending into the cooling cover from opposite sidewalls of the cooling cover, and communicated with the micro-trenches; and
a seal trench, at a floor panel of the cooling cover facing toward the device die, and laterally surrounding the micro-trenches; and
a seal ring, filled in the seal trench, wherein the cooling cover is attached to the rear surface of the device die by the seal ring, and a space between the cooling cover and the micro-trenches is enclosed by the seal ring.
2. The semiconductor device according to claim 1 , wherein the cooling cover further comprises:
a fluid inlet channel and a fluid outlet channel, laterally extending in the cooling cover and spaced apart from each other, wherein the first fluid inlet port is communicated to the micro-trenches through the fluid inlet channel, and the first fluid outlet port is communicated to the micro-trenches through the fluid outlet channel.
3. The semiconductor device according to claim 2 , wherein the fluid inlet channel and the fluid outlet channel each laterally span to overlap a group of the micro-trenches.
4. The semiconductor device according to claim 2 , wherein the fluid inlet channel and the fluid outlet channel are laterally surrounded by the seal trench and the seal ring.
5. The semiconductor device according to claim 2 , wherein the fluid inlet channel and the fluid outlet channel extend to the floor panel of the cooling cover.
6. The semiconductor device according to claim 2 , wherein the cooling cover further comprises:
a first fluid inlet connection pipe and a first fluid outlet connection pipe, laterally extending in the cooling cover, wherein the first fluid inlet port is communicated to the fluid inlet channel through the first fluid inlet connection pipe, and the first fluid outlet port is communicated to the fluid outlet channel through the first fluid outlet connection pipe.
7. The semiconductor device according to claim 6 , wherein the first fluid inlet port, the first fluid outlet port, the first fluid inlet connection pipe and the first fluid outlet connection pipe extend along a first direction, and the fluid inlet channel and the fluid outlet channel extend along a second direction perpendicular to the first direction.
8. The semiconductor device according to claim 1 , wherein the cooling cover further comprises:
a second fluid inlet port and a second fluid outlet port, laterally extending into the cooling cover from the opposite sidewalls of the cooling cover, and communicated with the micro-trenches, wherein the first fluid inlet port is vertically spaced apart from the second fluid inlet port, and the first fluid outlet port is vertically spaced apart from the second fluid outlet port.
9. The semiconductor device according to claim 8 , wherein the cooling cover further comprises:
a fluid channel, laterally extending in the cooling cover, wherein the second fluid inlet port and the second fluid outlet port are communicated to the micro-trenches through the fluid channel, and the fluid channel is laterally surrounded by the seal trench and the seal ring.
10. The semiconductor device according to claim 9 , wherein the cooling cover further comprises:
a second fluid inlet connection pipe and a second fluid outlet connection pipe, laterally extending in the cooling cover, wherein the second fluid inlet port is communicated to the fluid channel through the second fluid inlet connection pipe, and the second fluid outlet port is communicated to the fluid channel through the second fluid outlet connection pipe.
11. A semiconductor device, comprising:
a device die, having a rear surface formed with micro-trenches;
a cooling cover, covering the rear surface of the device die, and comprising:
a first pipe and a second pipe, penetrating through the cooling cover along a vertical direction, and communicated with the micro-trenches; and
a seal trench, at a floor panel of the cooling cover facing toward the device die, and laterally surrounding the micro-trenches; and
a seal ring, filled in the seal trench, wherein the cooling cover is attached to the rear surface of the device die by the seal ring, and a space between the cooling cover and the micro-trenches is enclosed by the seal ring.
12. The semiconductor device according to claim 11 , wherein the second pipe is narrower than the first pipe.
13. The semiconductor device according to claim 11 , wherein the first pipe and the second pipe are laterally surrounded by the seal trench and the seal ring.
14. The semiconductor device according to claim 11 , wherein one of the first and second pipes is a fluid inlet port, and the other of the first and second pipes is a fluid outlet port.
15. The semiconductor device according to claim 11 , wherein the cooling cover further comprises additional second pipes, penetrating through the cooling cover along the vertical direction, and communicated with the micro-trenches.
16. The semiconductor device according to claim 15 , wherein the first pipe is laterally surrounded by the second pipe and the additional second pipes.
17. A semiconductor device, comprising:
a device die, having a rear surface formed with micro-trenches;
a cooling cover, covering the rear surface of the device die, and comprising:
a first fluid inlet port and a second fluid inlet port, laterally extending into the cooling cover from opposite sidewalls of the cooling cover, and communicated with the micro-trenches;
a fluid outlet port, penetrating through the cooling cover along a vertical direction, and communicated with the micro-trenches;
a seal trench, at a floor panel of the cooling cover facing toward the device die, and laterally surrounding the micro-trenches; and
a seal ring, filled in the seal trench, wherein the cooling cover is attached to the rear surface of the device die by the seal ring, and a space between the cooling cover and the micro-trenches is enclosed by the seal ring.
18. The semiconductor device according to claim 17 , wherein the fluid outlet port is located between the first fluid inlet port and the second fluid inlet port.
19. The semiconductor device according to claim 17 , wherein the cooling cover further comprises:
a first fluid inlet channel, extending in the cooling cover, wherein the first fluid inlet port is communicated to the micro-trenches through the first fluid inlet channel; and
a second fluid inlet channel, extending in the cooling cover, wherein the second fluid inlet port is communicated to the micro-trenches through the second fluid inlet channel.
20. The semiconductor device according to claim 19 , wherein the first fluid inlet channel, the second fluid inlet channel and the fluid output port are laterally surrounded by the seal trench and the seal ring.