Ring carrier and substrate treating system
Disclosed is a ring carrier used for transferring a ring member. The ring carrier includes a body having a plate shape, and a guide part protruding from an upper surface of the body to face an inner periphery of the ring member, and an alignment hole used when the ring carrier is aligned is formed in the body to pass through the body.
1. A ring carrier for transferring a ring member, the ring carrier comprising:
a body having a plate shape and an alignment hole, wherein the alignment hole passes through the body; and
a guide part protruding from an upper surface of the body to face an inner periphery of the ring member,
wherein the alignment hole passing through the body is configured to align the ring carrier in a predetermined direction.
2. The ring carrier of claim 1 ,
wherein the guide part faces a flat zone of the ring member.
3. The ring carrier of claim 1 ,
wherein the body has a disk shape.
4. The ring carrier of claim 1 ,
wherein the guide part includes:
a first guide part; and
a second guide part spaced apart from the first guide part, and
wherein the alignment hole is disposed between the first guide part and the second guide part.
5. The ring carrier of claim 1 , further comprising:
a plurality of notches disposed at a peripheral area of the body and passing through the body.
6. The ring carrier of claim 5 ,
wherein the body includes an outer periphery.
7. The ring carrier of claim 1 , further comprising:
one or more slide preventing pads provided on a lower surface of the body.
8. The ring carrier of claim 1 , further comprising:
a side preventing pin protruding downwards from a lower surface of the body.
9. A substrate treating system comprising:
a first chamber provided with a transfer robot having a transfer hand;
a second chamber connected to the first chamber;
a ring carrier supporting a ring member during a time when the ring member is transferred between the first chamber and the second chamber; and
an alignment unit attached to the first chamber and configured to rotate the ring carrier to a predetermined direction,
wherein the ring carrier includes:
a body having a disk shape;
a guide boss configured to prevent the ring member positioned on the body of the ring carrier from sliding during a time when the ring member is transferred between the first chamber and the second chamber; and
an alignment hole passing through the body, and
wherein the alignment unit is configured to rotate the ring carrier such that the alignment hole of the ring carrier is aligned to the predetermined direction.
10. The substrate treating system of claim 9 ,
wherein a substrate with a notch is provided on the ring carrier, and
wherein the alignment hole overlaps the notch of the substrate.
11. The substrate treating system of claim 9 ,
wherein the guide boss is adjacent to a flat zone of the ring member.
12. The substrate treating system of claim 11 ,
wherein the guide boss includes:
a flat portion adjacent to the flat zone, wherein the flat portion extends along the flat zone; and
a round portion connected to the flat portion and extending along a round zone of the ring member.
13. The substrate treating system of claim 12 ,
wherein an outer periphery of the round portion of the ring carrier and an inner periphery of the round zone of the ring member have the same radius of curvature.
14. The substrate treating system of claim 12 ,
wherein the guide boss includes:
a first guide boss; and
a second guide boss spaced apart from the first guide boss, and
wherein a shape of the second guide boss is symmetrical to a shape of the first guide boss.
15. The substrate treating system of claim 9 ,
wherein the ring carrier includes a plurality of notches at a peripheral area of the body, the plurality of notches passing through the body, and
wherein the plurality of notches are positioned such that at a position where the ring carrier is in the second chamber, each of the plurality of notches overlaps a corresponding support shelf provided in the second chamber when viewed from a top of the substrate treating system.
16. The substrate treating system of claim 15 ,
wherein the body includes an outer periphery.
17. The substrate treating system of claim 9 ,
wherein the alignment unit includes:
a chuck configured to support and rotate the ring carrier;
an irradiation part configured to irradiate light toward the alignment hole of the ring carrier supported by the chuck; and
a light receiving part configured to receive the light that passes through the alignment hole.
18. A substrate treating system comprising:
an index chamber provided with a transfer robot, wherein an interior of the index chamber is maintained at an atmospheric pressure;
a process chamber configured to treat a substrate by using plasma;
a load lock chamber disposed between the index chamber and the process chamber, wherein an interior of the load lock chamber is at one of the atmospheric pressure and a vacuum pressure lower than the atmospheric pressure;
a ring carrier configured to transfer a ring member among the process chamber, the load lock chamber, and the index chamber; and
a controller,
wherein the controller controls the transfer robot such that a hand of the transfer robot transfers the ring carrier positioned on the ring member between the load lock chamber and the index chamber,
wherein the ring carrier includes:
a body having a disk shape;
a guide part protruding from an upper surface of the body to face a flat zone of the ring member; and
an alignment hole passing through the body, and
wherein the ring carrier is aligned to a predetermined direction using the alignment hole.
19. The substrate treating system of claim 18 , further comprising:
an alignment unit configured to align a direction of a notch of the substrate in the predetermined direction or the alignment hole of the ring carrier in the predetermined direction, and
wherein the alignment hole overlaps the notch when viewed in a plan view.
20. The substrate treating system of claim 18 ,
wherein the load lock chamber includes:
a plurality of support shelves supporting the substrate or the ring member, and
wherein the ring carrier further includes a plurality of notches at a peripheral area of the body, the plurality of notches passing through the body, and
wherein each of the plurality of notches overlaps a corresponding support shelf of the plurality of support shelves when viewed from in a plan view.