Vertical grating filters for photonics
View Patent ↗A photonic vertical grating filter is disclosed. The filter comprises a first waveguide, a second waveguide, and a plurality of Bragg gratings. The Bragg gratings are formed in a dielectric layer between the first waveguide and the second waveguide, and are located in a vertical overlap region between the first waveguide and the second waveguide. Each Bragg grating has a different grating period. The vertical filter uses less surface area and provides improved filtering capabilities.
1. A method for making a photonic vertical grating filter, comprising:
forming a first optical routing layer on a substrate;
forming a first waveguide in the first optical routing layer;
forming a dielectric layer above the first waveguide from a first dielectric material;
etching a plurality of sets of grooves in the dielectric layer, each set of grooves having a different grating period;
depositing a grating material into the plurality of sets of grooves to form ridges, wherein the grating material has a refractive index higher than the dielectric layer, to obtain a plurality of Bragg gratings; and
forming a second waveguide in a second optical routing layer on the substrate;
wherein the first waveguide, the plurality of Bragg gratings, and the second waveguide overlap in a vertical overlap region.
2. The method of claim 1 , wherein the ridges have a higher refractive index than the dielectric layer.
3. The method of claim 2 , wherein the ridges of each Bragg grating have a length of about 20% to about 80% of a period of that Bragg grating.
4. The method of claim 2 , wherein the ridges comprise hafnium oxide, zirconium oxide, aluminum oxide, hafnium silicate, zirconium silicate, hafnium oxynitride, zirconium oxynitride, silicon oxynitride, boron nitride, silicon carbide, silicon nitride, or silicon.
5. The method of claim 2 , further comprising applying an overlay into the plurality of sets of grooves prior to forming the second waveguide.
6. The method of claim 5 , wherein the overlay has a thickness of about 10% to about 50% of the ridge.
7. The method of claim 1 , wherein each Bragg grating in the plurality of Bragg gratings is apodized.
8. The method of claim 1 , wherein each Bragg grating in the plurality of Bragg gratings has a grating period of about 200 nanometers to about 350 nanometers.
9. The method of claim 1 , wherein each Bragg grating in the plurality of Bragg gratings has a spacing of about 5% to about 95% of a grating period of that Bragg grating.
10. The method of claim 1 , wherein each Bragg grating in the plurality of Bragg gratings has a thickness of about 150 nanometers to about 900 nanometers.
11. The method of claim 1 , wherein each Bragg grating in the plurality of Bragg gratings has a width of about 50% to about 100% of a width of the first waveguide.
12. The method of claim 1 , wherein each Bragg grating in the plurality of Bragg gratings is independently spaced apart from the first waveguide and the second waveguide by a gap of about 10 nanometers to about 500 nanometers.
13. The method of claim 1 , wherein the first waveguide and the second waveguide each have a thickness of about 150 nanometers to about 1000 nanometers.
14. The method of claim 1 , wherein the first waveguide and the second waveguide each have a width of about 100 nanometers to about 3000 nanometers.
15. The method of claim 1 , wherein the grating material also has a dielectric constant of at least 10.
16. A vertical photonic grating filter, comprising:
a first waveguide;
a second waveguide; and
a plurality of Bragg gratings formed in a dielectric layer between the first waveguide and the second waveguide, the plurality of Bragg gratings being located in a vertical overlap region between the first waveguide and the second waveguide, each Bragg grating having a different grating period;
wherein a first gap is present between the first waveguide and each Bragg grating in the plurality of Bragg gratings, and a second gap is present between the second waveguide and each Bragg grating in the plurality of Bragg gratings.
17. The filter of claim 16 , wherein the first waveguide and the second waveguide comprise silicon nitride.
18. The filter of claim 16 , wherein each Bragg grating in the plurality of Bragg gratings comprises a plurality of ridges, wherein the ridges have a higher refractive index than the dielectric layer.
19. A method for filtering multiple wavelengths in an optical input, comprising:
sending the optical input into a first waveguide, the optical input comprising a plurality of different wavelengths;
passing the optical input past a filter formed from a plurality of Bragg gratings located in a dielectric layer above the first waveguide, each Bragg grating having a different grating period; and
receiving filtered wavelengths in a second waveguide located above the filter; and
sending the filtered wavelengths in the second waveguide to an optical output.
20. The method of claim 19 , wherein unfiltered wavelengths remain in the first waveguide.