Solid-state imaging element and electronic device
A solid-state imaging element includes a first photoelectric conversion unit and a second photoelectric conversion unit. The first and second photoelectric conversion units are joined at joint surfaces facing each other, and include an upper electrode, a lower electrode, a photoelectric conversion film, and a storage electrode. The lower electrode of the first photoelectric conversion unit is connected to a charge storage unit via a first through electrode penetrating a semiconductor substrate. The lower electrode of the second photoelectric conversion unit is connected to the charge storage unit via: a second electrode provided on a joint surface of the second photoelectric conversion unit; a first electrode provided on a joint surface of the first photoelectric conversion unit; a second through electrode penetrating the first photoelectric conversion unit; and the first through electrode.
1. A solid-state imaging element, comprising:
a semiconductor substrate;
a first photoelectric conversion unit above the semiconductor substrate and configured to convert light into a charge; and
a second photoelectric conversion unit above the first photoelectric conversion unit and configured to convert light into a charge, wherein
the first photoelectric conversion unit and the second photoelectric conversion unit are joined at joint surfaces that face each other,
each of the first photoelectric conversion unit and the second photoelectric conversion unit has
a laminated structure including:
an upper electrode;
a lower electrode;
a photoelectric conversion film sandwiched between the upper electrode and the lower electrode; and
a storage electrode opposed to the upper electrode via the photoelectric conversion film and a first insulating film,
the lower electrode of the first photoelectric conversion unit is
electrically connected to a charge storage unit in the semiconductor substrate, via a first through electrode that penetrates the semiconductor substrate,
the lower electrode of the second photoelectric conversion unit is
electrically connected to the charge storage unit via:
a second electrode on a joint surface of the second photoelectric conversion unit;
a first electrode on a joint surface of the first photoelectric conversion unit so as to be opposed to the second electrode and joined to the second electrode;
a second through electrode that penetrates the first photoelectric conversion unit; and
the first through electrode.
2. The solid-state imaging element according to claim 1 , wherein
the first electrode and the second electrode includes a transparent conductive material.
3. The solid-state imaging element according to claim 2 , wherein
the first electrode and the second electrode are substantially circular in a cross section of the solid-state imaging element cut in a laminating direction of the laminated structure.
4. The solid-state imaging element according to claim 2 , wherein
the first photoelectric conversion unit and the second photoelectric conversion unit have at least one dummy electrode on each of the joint surfaces.
5. The solid-state imaging element according to claim 2 , wherein
at least one opening is in each of the first electrode and the second electrode.
6. The solid-state imaging element according to claim 2 , wherein
the first electrode and the second electrode have sizes different from each other.
7. The solid-state imaging element according to claim 2 , wherein
at least one of the joint surfaces of the first photoelectric conversion unit and the second photoelectric conversion unit includes a stopper layer, and
the stopper layer includes a hard insulating material and surrounds the first electrode or the second electrode.
8. The solid-state imaging element according to claim 7 , wherein
a first wiring layer is between the first electrode and the upper electrode of the first photoelectric conversion unit, and
the stopper layer including the hard insulating material is between the first electrode and the first wiring layer.
9. The solid-state imaging element according to claim 8 , wherein
the first electrode, the stopper layer, and the first wiring layer have a larger refractive index in this order.
10. The solid-state imaging element according to claim 7 , wherein
a second wiring layer is between the second electrode and the upper electrode of the second photoelectric conversion unit, and
the stopper layer including the hard insulating material is between the second electrode and the second wiring layer.
11. The solid-state imaging element according to claim 10 , wherein
the second electrode, the stopper layer, and the second wiring layer have a larger refractive index in this order.
12. The solid-state imaging element according to claim 2 , further comprising:
a stopper layer including a hard insulating material and on the joint surfaces of the first photoelectric conversion unit and the second photoelectric conversion unit so as to surround the first electrode or the second electrode; and
a second insulating film including a material different from a material of the stopper layer, wherein
the second insulating film covers the stopper layer, the first electrode, and the second electrode, and
the first electrode and the second electrode are electrically connected via the second insulating film.
13. The solid-state imaging element according to claim 12 , wherein
the second insulating film has a thickness that allows electrical connection between the first electrode and the second electrode.
14. The solid-state imaging element according to claim 1 , wherein
the first through electrode is a common through electrode in common for the first photoelectric conversion unit and the second photoelectric conversion unit, and
the charge storage unit is a common charge storage unit in common for the first photoelectric conversion unit and the second photoelectric conversion unit.
15. The solid-state imaging element according to claim 14 , wherein each of the lower electrode of the first photoelectric conversion unit and the lower electrode of the second photoelectric conversion unit is electrically connected, via the common through electrode, to a common pixel transistor in common for the first photoelectric conversion unit and the second photoelectric conversion unit in the semiconductor substrate.
16. The solid-state imaging element according to claim 1 , wherein the photoelectric conversion film includes an organic material.
17. The solid-state imaging element according to claim 1 , further comprising a third photoelectric conversion unit in the semiconductor substrate and configured to convert the light into a charge.
18. An electronic device, comprising:
a solid-state imaging element;
an optical system configured to form an image of incident light on a light receiving surface of the solid-state imaging element; and
a processor configured to control the solid-state imaging element, wherein
the solid-state imaging element includes:
a semiconductor substrate;
a first photoelectric conversion unit above the semiconductor substrate and configured to convert light into a charge; and
a second photoelectric conversion unit above the first photoelectric conversion unit and configured to convert light into a charge,
the first photoelectric conversion unit and the second photoelectric conversion unit are joined at joint surfaces that face each other,
each of the first photoelectric conversion unit and the second photoelectric conversion unit has
a laminated structure including:
an upper electrode;
a lower electrode;
a photoelectric conversion film sandwiched between the upper electrode and the lower electrode; and
a storage electrode opposed to the upper electrode via the photoelectric conversion film and an insulating film,
the lower electrode of the first photoelectric conversion unit is
electrically connected to a charge storage unit in the semiconductor substrate, via a first through electrode that penetrates the semiconductor substrate,
the lower electrode of the second photoelectric conversion unit is
electrically connected to the charge storage unit via:
a second electrode on a joint surface of the second photoelectric conversion unit;
a first electrode on a joint surface of the first photoelectric conversion unit so as to be opposed to the second electrode and joined to the second electrode;
a second through electrode that penetrates the first photoelectric conversion unit; and
the first through electrode.