Magnetoresistive sensor element having compensated temperature coefficient of sensitivity and method for manufacturing said element

1. A tunneling magnetoresistance (TMR) sensor element comprising:

a reference layer having a pinned reference magnetization;

a sense layer having a free sense magnetization comprising a stable vortex configuration having a core reversibly movable in accordance to an external magnetic field to be measured;

a tunnel barrier layer between the reference layer and the sense layer, the tunnel barrier layer comprising an insulating material;

wherein the sense layer comprises a first ferromagnetic sense portion in contact with the tunnel barrier layer and a second ferromagnetic sense portion in contact with the first ferromagnetic sense portion; and

wherein the second ferromagnetic sense portion comprises an alloy and a dilution element, the dilution element having a concentration of 7-10% volume, the dilution element being arranged to compensate a temperature dependence of tunnel magnetoresistance of the TMR sensor element, the dilution element being a transition metal.

2. The TMR sensor element, according to claim 1 , wherein the transition metal is selected from the group consisting of Ta (tantalum) and W (tungsten).

3. The TMR sensor element, according to claim 1 , wherein the first ferromagnetic sense portion comprises an alloy of cobalt, iron and boron (CoFeB).

4. The TMR sensor element, according to claim 1 , wherein the alloy comprises an alloy of nickel and iron (NiFe).

5. The TMR sensor element, according to claim 1 , wherein the second ferromagnetic sense portion comprises a plurality of ferromagnetic sub-layers comprising the alloy and a plurality of dilution sub-layers comprising the dilution element.

6. The TMR sensor element, according to claim 5 , wherein each of the ferromagnetic sub-layers is between 0.1 and 0.5 nanomenters (nm) in thickness and each ferromagnetic sub-layer is between 0.5 and 5 nm in thickness.

7. The TMR sensor element, according to claim 5 , wherein any of the ferromagnetic sub-layers comprises an alloy of nickel and iron (NiFe), an alloy of cobalt and iron (CoFe), or an alloy of cobalt, iron, and boron (CoFeB).

8. A tunneling magnetoresistance (TMR) sensor for sensing a 1D external magnetic field, comprising a plurality of TMR sensor elements, each TMR sensor element comprising:

a reference layer having a pinned reference magnetization;

a sense layer having a free sense magnetization comprising a stable vortex configuration having a core reversibly movable in accordance to an external magnetic field to be measured;

a tunnel barrier layer between the reference layer and the sense layer, the tunnel barrier layer comprising an insulating material;

wherein the sense layer comprises a first ferromagnetic sense portion in contact with the tunnel barrier layer and a second ferromagnetic sense portion in contact with the first ferromagnetic sense portion; and

wherein the second ferromagnetic sense portion comprises an alloy and a dilution element, the dilution element having a concentration of 7-10% volume, the dilution element being arranged to compensate a temperature dependence of tunnel magnetoresistance of the TMR sensor element, the dilution element being a transition metal.

9. The TMR sensor according to claim 8 , arranged in a Wheatstone full-bridge configuration.

10. Method for manufacturing a tunneling magnetoresistance (TMR) sensor element, the method comprising:

forming a reference layer having a pinned reference magnetization;

forming a sense layer having a free sense magnetization comprising a stable vortex configuration having a core reversibly movable in accordance to an external magnetic field to be measured, the sense layer comprising a first ferromagnetic sense portion and a second ferromagnetic sense portion in contact with the first ferromagnetic sense portion, the second ferromagnetic sense portion comprising a dilution element in a proportion such that a temperature dependence of a magnetic susceptibility of the sense layer substantially compensates a temperature dependence of tunnel magnetoresistance (TMR) of the TMR sensor element;

forming a tunnel barrier layer between the reference layer and the sense layer, the tunnel barrier layer comprising an insulating material, the tunnel barrier layer being in contact with the first ferromagnetic sense portion of the sense layer;

wherein forming the sense layer includes determining a concentration for the dilution element, the concentration being determined by: measuring an electrical conductance of the TMR sensor element as a function of the external magnetic field for a plurality of temperatures, such as to obtain a measured conductance curve for each temperature; calculating a value of TMR of the TMR sensor element from the plurality of conductance curves, such as to determine the temperature dependence of TMR; and measuring a magnetization of the sense layer, such as to determine the temperature dependence of the magnetic susceptibility of the sense layer; and determining the concentration of the dilution element for which the temperature dependence of TMR substantially compensates the temperature dependence of the magnetic susceptibility.

11. The method according to claim 10 , wherein the dilution element includes a transition metal.

12. The method according to claim 11 , wherein the transition metal is selected from the group consisting of Ta (tantalum), W (tungsten) or Ru (Ruthenium) elements.

13. The method according to claim 10 , wherein the first ferromagnetic sense portion comprises an alloy of cobalt, iron and boron (CoFeB).

14. The method according to claim 10 , wherein the second ferromagnetic sense portion comprises an alloy of nickel and iron (NiFe) comprising the dilution element.