Display panel and method of manufacturing same
View Patent ↗A display panel and a method of manufacturing the same are provided. The display panel includes a shielding layer, a thin film transistor device layer, and a first via hole and a second via hole disposed correspondingly, and a third via hole disposed in a bonding area. Specifically, each of the first via hole and the third via hole is a stair-step shaped hole. The first via hole, the second via hole, and the third via hole are etched through a same etching process. Only one-time mask process is required, which saves number of masks and lowers the production cost.
1. A display panel, comprising a display area and a bonding area disposed on a side of the display area, and the display panel comprising:
a substrate;
a shielding layer disposed on the substrate; and
a thin film transistor device layer disposed over the shielding layer and comprising a first thin film transistor disposed in the display area and a second thin film transistor electrically connected to the first thin film transistor, wherein first source and drain electrodes included in the first thin film transistor are electrically connected to a first active layer through first via holes, second source and drain electrodes included in the second thin film transistor are electrically connected to a second active layer through second via holes, and the first thin film transistor is a dual gate electrode thin film transistor, and
wherein the display panel further comprises a third via hole defined in the bonding area and extending through film layers between the second source and drain electrodes and the substrate, wherein each of the first via holes, and the third via hole is a stair-step shaped hole, distances from tops of the first via holes and the third via hole to corresponding first step platforms included in the stair-step shaped holes are the same, and the first step platforms and the second active layer are arranged in a same layer,
wherein the display panel further comprising a metal layer and a fourth via hole wherein the metal layer is disposed between the second thin film transistor and the third via hole and is electrically connected to the shielding layer through the fourth via hole.
2. The display panel of claim 1 , wherein the third via hole comprises the first step platform and a second step platform, the first step platform is located above the second step platform, and an aperture of the third via hole gradually decreases from the first step platform to the second step platform.
3. The display panel of claim 2 , wherein a distance between the top of the third via hole and the first step platform is less than a distance between the first step platform and the second step platform.
4. The display panel of claim 1 , wherein the fourth via hole is a stair-step shaped hole, and the first via holes, the second via holes, the third via hole, and the fourth via hole are prepared and formed by a same etching process.
5. The display panel of claim 4 , wherein number of steps of the stair-step shaped hole corresponding to the fourth via hole is the same as number of steps of the third via hole, and step platforms included in the fourth via hole and step platforms included in the third via hole are located at same heights, respectively.
6. A display panel, comprising a display area and a bonding area disposed on a side of the display area, and the display panel comprising:
a substrate;
a shielding layer disposed on the substrate; and
a thin film transistor device layer disposed over the shielding layer and comprising a first thin film transistor disposed in the display area and a second thin film transistor electrically connected to the first thin film transistor, wherein first source and drain electrodes included in the first thin film transistor are electrically connected to a first active layer through first via holes, second source and drain electrodes included in the second thin film transistor are electrically connected to a second active layer through second via holes;
wherein the display panel further comprises a third via hole defined in the bonding area and extending through film layers between the second source and drain electrodes and the substrate, wherein each of the first via holes and the third via hole is a stair-step shaped hole, and distances from tops of the first via holes and the third via hole to corresponding first step platforms included in the stair-step shaped holes are the same,
wherein the display panel further comprising a metal layer and a fourth via hole, wherein the metal layer is disposed between the second thin film transistor and the third via hole and is electrically connected to the shielding layer through the fourth via hole.
7. The display panel of claim 6 , wherein the third via hole comprises the first step platform and a second step platform, the first step platform is located above the second step platform, and an aperture of the third via hole gradually decreases from the first step platform to the second step platform.
8. The display panel of claim 7 , wherein a distance between the top of the third via hole and the first step platform is less than a distance between the first step platform and the second step platform.
9. The display panel of claim 7 , wherein the first step platform is disposed in the same layer as the second active layer of the second thin film transistor.
10. The display panel of claim 6 , wherein the fourth via hole is a stair-step shaped hole, and the first via holes, the second via holes, the third via hole, and the fourth via hole are prepared and formed by a same etching process.
11. The display panel of claim 10 , wherein number of steps of the stair-step shaped hole corresponding to the fourth via hole is the same as number of steps of the third via hole, and step platforms included in the fourth via hole and step platforms included in the third via hole are located at same heights, respectively.
12. The display panel of claim 6 , wherein the metal layer, the first source and drain electrodes, and the second source and drain electrodes are disposed in a same film layer.
13. The display panel of claim 6 , wherein at least one of step platforms in each of the stair-step shaped holes corresponding to the first via hole and the third via hole is located on a same film layer.
14. The display panel of claim 6 , wherein an aperture of the third via hole is greater than that of the first via hole and the second via hole.
15. The display panel of claim 6 , wherein a distance between an opening surface of each of the first via hole, the third via hole, and the fourth via hole and the first step platform of the corresponding stair-step shaped hole is same.
16. The display panel of claim 15 , wherein the distance between the opening surface of each of the first via hole, the third via hole, and the fourth via hole and the first step platform of the corresponding stair-step shaped hole ranges from 5500 angstroms (Å) to 6500 Å.
17. The display panel of claim 6 , wherein the second active layer is an indium gallium zinc oxide semiconductor.