Nitride semiconductor substrate, laminated structure, and method for manufacturing nitride semiconductor substrate

1. A nitride semiconductor substrate that has a diameter of 2 inches or more and includes a main surface for which the closest low index crystal plane is a (0001) plane,

wherein the ratio of FWHM2 {10-12} to FWHM1 {10-12} is 80% or more,

FWHM1 {10-12} and FWHM2 {10-12} each representing a full width at half maximum of {10-12} plane diffraction measured using X-ray rocking curve measurement,

FWHM1 {10-12} being measured under the following incident conditions: the center of the main surface is irradiated with Cu Kα1 X-rays emitted from a Cu X-ray source via an X-ray mirror that makes X-rays into parallel beam, a 2-bounce Ge (220) monochromator, and an incident side aperture in this order, the incident side aperture having a width of 1.4 mm in a ω direction that is the direction of a rotation angle about a rotation axis of a goniometer, and a length of 12 mm in a direction parallel to the rotation axis,

FWHM1 {10-12} being measured under the following beam receiving conditions: X-rays are received by a detector not via an analyzer crystal in a state where a beam receiving side slit is open, the detector including an aperture that has a width of 14.025 mm in the ω direction,

FWHM2 {10-12} being measured under the same incident conditions as those in the measurement of FWHM1 {10-12} , and

FWHM2 {10-12} being measured under the following beam receiving conditions: X-rays are received by the detector via a 3-bounce Ge (220) analyzer crystal that includes an inlet aperture having a width of 6.54 mm in the ω direction.

2. The nitride semiconductor substrate according to claim 1 ,

wherein the ratio of FWHM2 {10-12} to FWHM1 {10-12} is 100% or less.

3. The nitride semiconductor substrate according to claim 1 ,

wherein, when diffractions are measured with respect to equivalent crystal planes that are represented as {10−12} planes from three directions rotated by 60° from each other in a circumferential direction about the normal at the center of the main surface, a difference between the largest value of FWHM1 {10-12} and the smallest value of FWHM1 {10-12} is 9 arcsecs or less.

4. A nitride semiconductor substrate that has a diameter of 2 inches or more and includes a main surface for which the closest low index crystal plane is a (0001) plane,

wherein, when diffractions are measured with respect to equivalent crystal planes that are represented as {10−12} planes from three directions rotated by 60° from each other in a circumferential direction about the normal at the center of the main surface, a difference between the largest value of FWHM1 {10-12} and the smallest value of FWHM1 {10-12} is 9 arcsecs or less,

FWHM1 {10-12} representing a full width at half maximum of {10−12} plane diffraction measured using X-ray rocking curve measurement,

FWHM1 {10-12} being measured under the following incident conditions: the center of the main surface is irradiated with Cu Kα1 X-rays emitted from a Cu X-ray source via an X-ray mirror that makes X-rays into parallel beam, a 2-bounce Ge (220) monochromator, and an incident side aperture in this order, the incident side aperture having a width of 1.4 mm in a ω direction that is the direction of a rotation angle about a rotation axis of a goniometer, and a length of 12 mm in a direction parallel to the rotation axis, and

FWHM1 {10-12} being measured under the following beam receiving conditions: X-rays are received by a detector not via an analyzer crystal in a state where a beam receiving side slit is open, the detector including an aperture that has a width of 14.025 mm in the ω direction.

5. The nitride semiconductor substrate according to claim 1 ,

wherein FWHM1 {10-12} is 50 arcsecs or less.

6. A nitride semiconductor substrate that has a diameter of 2 inches or more and includes a main surface for which the closest low index crystal plane is a (0001) plane,

wherein FWHM1 {10-12} is 50 arcsecs or less,

FWHM1 {10-12} representing a full width at half maximum of {10−12} plane diffraction measured using X-ray rocking curve measurement,

FWHM1 {10-12} being measured under the following incident conditions: the center of the main surface is irradiated with Cu Kα1 X-rays emitted from a Cu X-ray source via an X-ray mirror that makes X-rays into parallel beam, a 2-bounce Ge (220) monochromator, and an incident side aperture in this order, the incident side aperture having a width of 1.4 mm in a ω direction that is the direction of a rotation angle about a rotation axis of a goniometer, and a length of 12 mm in a direction parallel to the rotation axis, and

FWHM1 {10-12} being measured under the following beam receiving conditions: X-rays are received by a detector not via an analyzer crystal in a state where a beam receiving side slit is open, the detector including an aperture that has a width of 14.025 mm in the ω direction.

7. A laminated structure comprising:

a base substrate that is constituted by a single crystal of a group III nitride semiconductor, has a mirror-finished main surface, and in which a low index crystal plane closest to the main surface is a (0001) plane;

a laminated unit that includes a low oxygen concentration region and a high oxygen concentration region, the low oxygen concentration region being provided above the main surface of the base substrate and constituted by a single crystal of a group III nitride semiconductor, the high oxygen concentration region being provided on the low oxygen concentration region and constituted by a single crystal of a group III nitride semiconductor; and

a top low oxygen concentration region that is provided above the laminated unit and is constituted by a single crystal of a group III nitride semiconductor,

wherein the oxygen concentration in the high oxygen concentration region is higher than oxygen concentrations in the low oxygen concentration region and the top low oxygen concentration region, and

a plurality of the laminated units are provided repeatedly in a thickness direction between the base substrate and the top low oxygen concentration region.

8. The laminated structure according to claim 7 ,

wherein an upper surface of the low oxygen concentration region in each of the plurality of laminated units includes a plurality of valleys and a plurality of mountains, and

in the second and higher laminated units of the plurality of laminated units, when an arbitrary cross section perpendicular to the main surface is observed, an average distance between a pair of mountains is longer than that in the first laminated unit of the plurality of laminated units, the pair of mountains being spaced apart from each other in a direction extending along the main surface and closest to each other among the plurality of peaks with one of the plurality of valleys sandwiched between the pair of mountains.

9. A method for manufacturing a nitride semiconductor substrate using a vapor phase growth method, the method comprising:

a step (a) of preparing a base substrate that is constituted by a single crystal of a group III nitride semiconductor, has a mirror-finished main surface, and in which a low index crystal plane closest to the main surface is a (0001) plane;

a step (b) of homoepitaxially growing a single crystal of a group III nitride semiconductor above the main surface such that the crystal becomes flat;

a step (c) of growing a three-dimensional growth layer by generating a plurality of recessed portions formed by inclined interfaces other than a (0001) plane in a surface of the homoepitaxially grown flat crystal, and gradually expanding the inclined interfaces as the crystal growth progresses to make the (0001) plane disappear at least once from crystal growth interfaces; and

a step (d) of growing a flattening layer that includes a mirror-finished surface constituted by a (0001) plane by further epitaxially growing a single crystal of a group III nitride semiconductor on the three-dimensional growth layer to make inclined interfaces disappear,

wherein a cycle that includes the step (c) and the step (d) is performed a plurality of times.