Semiconductor device
A semiconductor device includes a semiconductor chip that has a main surface, an insulating layer that is formed on the main surface, a functional device that is formed in at least one among the semiconductor chip and the insulating layer, a low potential terminal that is formed on the insulating layer and is electrically connected to the functional device, a high potential terminal that is formed on the insulating layer at an interval from the low potential terminal and is electrically connected to the functional device, and a seal conductor that is embedded as a wall in the insulating layer such as to demarcate a region including the functional device, the low potential terminal and the high potential terminal from another region in plan view, and is electrically separated from the semiconductor chip, the functional device, the low potential terminal and the high potential terminal.
1. A semiconductor device comprising:
a semiconductor chip that has a main surface;
an insulating layer that is formed on the main surface;
a functional device that is formed in at least one among the semiconductor chip and the insulating layer;
a low potential terminal that is formed on the insulating layer and is electrically connected to the functional device;
a high potential terminal that is formed on the insulating layer at an interval from the low potential terminal and is electrically connected to the functional device; and
a seal conductor that is embedded as a wall in the insulating layer such as to demarcate a region including the functional device, the low potential terminal and the high potential terminal from another region in plan view, and is electrically separated from the semiconductor chip, the functional device, the low potential terminal and the high potential terminal.
2. The semiconductor device according to claim 1 , wherein the seal conductor is fixed in an electrically floating state.
3. The semiconductor device according to claim 1 , wherein the seal conductor is embedded in the insulating layer at an interval from the semiconductor chip in a normal direction to the main surface.
4. The semiconductor device according to claim 1 , further comprising:
a separating structure that is interposed between the semiconductor chip and the seal conductor and electrically separates the seal conductor from the semiconductor chip.
5. The semiconductor device according to claim 4 , wherein the separating structure includes an insulating film that is formed on the main surface of the semiconductor chip.
6. The semiconductor device according to claim 4 , wherein the separating structure includes a trench that is formed in the main surface and an embedded body that is embedded in the trench such as to be electrically separated from the semiconductor chip.
7. The semiconductor device according to claim 4 , wherein the separating structure is constituted of a portion of the insulating layer.
8. The semiconductor device according to claim 4 , wherein the separating structure is exposed from a side wall of the semiconductor chip.
9. The semiconductor device according to claim 1 , wherein the insulating layer has an insulating side wall that is continuous to the side wall of the semiconductor chip.
10. The semiconductor device according to claim 1 , wherein the seal conductor is formed to an annular shape that surrounds the functional device, the low potential terminal and the high potential terminal in plan view.
11. The semiconductor device according to claim 1 , further comprising:
an inorganic insulating layer that covers the seal conductor on the insulating layer and has a plurality of pad openings that respectively expose the low potential terminal and the high potential terminal.
12. The semiconductor device according to claim 11 , further comprising:
an organic insulating layer that is formed on the inorganic insulating layer such as to cover the seal conductor across the inorganic insulating layer.
13. The semiconductor device according to claim 1 , wherein the functional device includes a low potential pattern that is formed inside the insulating layer and a high potential pattern that is formed inside the insulating layer such as to oppose the low potential pattern in a normal direction to the main surface,
the low potential terminal is connected to the low potential pattern, and
the high potential terminal is electrically connected to the high potential pattern.
14. The semiconductor device according to claim 13 , wherein the high potential pattern opposes the semiconductor chip across the low potential pattern.
15. The semiconductor device according to claim 13 , wherein the functional device is a transformer that includes a low potential coil as the low potential pattern and a high potential coil as the high potential pattern.
16. The semiconductor device according to claim 13 , wherein the functional device is a capacitor that includes a low potential electrode as the low potential pattern and a high potential electrode as the high potential pattern.
17. The semiconductor device according to claim 1 , wherein the functional device includes at least one among a passive device, a semiconductor rectifying device and a semiconductor switching device, and is formed in the main surface of the semiconductor chip.
18. The semiconductor device according to claim 1 , wherein the functional device includes a first functional device that is formed in the insulating layer and a second functional device that is formed in the semiconductor chip.
19. A semiconductor device comprising:
a semiconductor chip that has a main surface;
an insulating layer that is formed on the main surface;
a low potential pattern that is formed inside the insulating layer;
a high potential pattern that is formed inside the insulating layer such as to oppose the low potential pattern in a normal direction to the main surface;
a dummy pattern that is formed in a periphery of the high potential pattern inside the insulating layer, includes a conductor, and shields an electric field between the low potential pattern and the high potential pattern;
a low potential terminal that is formed on the insulating layer and is electrically connected to the low potential pattern;
a high potential terminal that is formed on the insulating layer at an interval from the low potential terminal and is electrically connected to the high potential pattern; and
a seal conductor that is embedded as a wall in the insulating layer such as to demarcate a region including the low potential pattern, the high potential pattern, the dummy pattern, the low potential terminal and the high potential terminal from another region in plan view, and is electrically separated from the semiconductor chip, the low potential pattern, the high potential pattern, the dummy pattern, the low potential terminal and the high potential terminal.