Acoustic transducer unit, method for manufacturing the same, and acoustic transducer
The present disclosure provides an acoustic transducer unit and a manufacturing method thereof, and an acoustic transducer, the acoustic transducer unit includes: a base substrate; a first electrode on the base substrate; a support pattern on a side of the first electrode away from the base substrate, which is enclosed into an accommodation groove, at least one release groove and at least one connection groove, an orthographic projection of the release groove on the base substrate is spaced apart from that of the accommodation groove on the base substrate, the connection groove is between the accommodation groove and the release groove to communicate them; a diaphragm pattern on the side of the first electrode away from the base substrate and capable of vibrating in the accommodation groove; a filling pattern in the release groove; a second electrode on a side of the diaphragm pattern away from the base substrate.
1. An acoustic transducer unit, comprising:
a base substrate;
a first electrode on a side of the base substrate;
a support pattern on a side of the first electrode away from the base substrate, wherein the support pattern is enclosed into an accommodation groove, at least one release groove and at least one connection groove, an orthographic projection of the release groove on the base substrate is spaced apart from an orthographic projection of the accommodation groove on the base substrate, and the connection groove is located between the accommodation groove and the release groove to communicate the accommodation groove with the release groove;
a diaphragm pattern on the side of the first electrode away from the base substrate and capable of vibrating in the accommodation groove;
a filling pattern filled in the release groove; and
a second electrode on a side of the diaphragm pattern away from the base substrate.
2. The acoustic transducer unit according to claim 1 , wherein an orthographic projection of the diaphragm pattern on the base substrate completely covers the orthographic projection of the accommodation groove on the base substrate.
3. An acoustic transducer, comprising: a base and a plurality of acoustic transducer elements on the base, wherein each acoustic transducer element comprises at least one acoustic transducer unit according to claim 2 .
4. The acoustic transducer unit according to claim 1 , wherein one release groove corresponds to at least one connection groove.
5. An acoustic transducer, comprising: a base and a plurality of acoustic transducer elements on the base, wherein each acoustic transducer element comprises at least one acoustic transducer unit according to claim 4 .
6. The acoustic transducer unit according to claim 4 , wherein a plurality of release grooves are provided, and a plurality of connection grooves in one-to-one correspondence with the release grooves are provided.
7. The acoustic transducer unit according to claim 6 , wherein the plurality of release grooves are uniformly distributed outside the accommodation groove.
8. An acoustic transducer, comprising: a base and a plurality of acoustic transducer elements on the base, wherein each acoustic transducer element comprises at least one acoustic transducer unit according to claim 6 .
9. The acoustic transducer unit according to claim 1 , wherein a cross section of the accommodation groove parallel to the base substrate has a quadrilateral shape, a hexagonal shape, an octagonal shape, a dodecagonal shape or a circular shape.
10. The acoustic transducer unit according to claim 1 , wherein the diaphragm pattern extends to the connection groove, and an orthographic projection of the diaphragm pattern on the base substrate completely covers an orthographic projection of the connection groove on the base substrate.
11. The acoustic transducer unit according to claim 1 , wherein an orthographic projection of the filling pattern on the base substrate completely covers the orthographic projection of the release groove on the base substrate; and
an area of the orthographic projection of the filling pattern on the base substrate is greater than an area of the orthographic projection of the release groove on the base substrate.
12. The acoustic transducer unit according to claim 1 , wherein the support pattern and the diaphragm pattern are made of a same material.
13. The acoustic transducer unit according to claim 1 , further comprising:
an etching barrier layer between the base substrate and the support pattern.
14. The acoustic transducer unit according to claim 1 , further comprising:
a passivation layer on a side of the diaphragm pattern away from the base substrate, wherein an orthographic projection of the passivation layer on the base substrate does not overlap the orthographic projection of the accommodation groove on the base substrate.
15. An acoustic transducer, comprising: a base and a plurality of acoustic transducer elements on the base, wherein each acoustic transducer element comprises at least one acoustic transducer unit according to claim 1 .
16. The acoustic transducer according to claim 15 , wherein each acoustic transducer element comprises a plurality of acoustic transducer units; and
in a same acoustic transducer element, at least two acoustic transducer units adjacent to each other are in communication with a same release groove through different connection grooves.
17. The acoustic transducer according to claim 15 , wherein each acoustic transducer element comprises a plurality of acoustic transducer units; and
first electrodes of the plurality of acoustic transducer units in a same acoustic transducer element are electrically connected, and second electrodes of the plurality of acoustic transducer units in a same acoustic transducer element are electrically connected; and
second electrodes of acoustic transducer units in different acoustic transducer elements are mutually electrically insulated.
18. The acoustic transducer according to claim 15 , wherein first electrodes of the plurality of acoustic transducer units in a same acoustic transducer element form a plate electrode being a one-piece structure.
19. The acoustic transducer according to claim 15 , wherein second electrodes of the plurality of acoustic transducer units in a same acoustic transducer element are electrically connected through a signal trace; and
the signal trace and the second electrodes are made of a same material.
20. A method for manufacturing an acoustic transducer unit according to claim 1 , comprising:
forming the first electrode on the base substrate;
forming a sacrificial pattern on the side of the first electrode away from the base substrate, wherein the sacrificial pattern is located in regions of the accommodation groove, the release groove and the connection groove to be formed subsequently;
forming the support pattern and the diaphragm pattern on the side of the first electrode away from the base substrate, wherein a part of the support pattern on a side surface of the sacrificial pattern is enclosed into the accommodation groove, the release groove and the connection groove, the orthographic projection of the release groove on the base substrate is spaced apart from the orthographic projection of the accommodation groove on the base substrate, the diaphragm pattern is located on the side of the first electrode away from the base substrate, and a release hole is formed in the diaphragm pattern in a region where the release groove is located;
removing the sacrificial pattern through the release hole;
forming a filling pattern in the release groove and the release hole; and
forming a second electrode on the side of the diaphragm pattern away from the base substrate.