IP Library › Granted Patent US 12,342,566
Granted Patent B2
US 12,342,566 · App. 17/775,868 · Granted Jun 24, 2025

Two-dimensional electron gas at interface between BASNO

Inventors: Kook Rin Char (Seoul, KR); Young Mo Kim (Seoul, KR); You Jung Kim (Seoul, KR)
Assignee: SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION
H10D30/475H01L21/02192H01L21/02194
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Quick Facts
Patent No.
US 12,342,566
App. No.
17/775,868
Granted
Jun 24, 2025
Kind
B2
Abstract

Provided is an electronic device using an interface between BaSnO 3 and LaInO 3 , the electronic device including: a substrate formed of a metal oxide of non-SrTiO 3 material a first buffer layer disposed on the substrate and formed of a BaSnO 3 material; a BLSO layer disposed on at least a portion of the first buffer layer and formed of a (Ba 1-x , La x )SnO 3 material, wherein x has a value equal to or greater than 0 and less than or equal to 1; an LIO layer at least partially disposed on at least a portion of the BLSO layer so as to form an interface between the LIO layer and the BLSO layer, and formed of an LaInO 3 material; and a first electrode layer at least partially in contact with the interface between the BLSO layer and the LIO layer, and formed of at least two or more separated portions.

Claims (12)

1. An electronic device including an interface between BaSnO3 and LaInO3, the electronic device comprising:

a substrate formed of a metal oxide of non-SrTiO3 material;

a first buffer layer disposed on the substrate and formed of a BaSnO3 material;

a BLSO layer disposed on at least a portion of the first buffer layer and formed of a (Ba1-x,Lax) SnO3 material, wherein x has a value equal to or greater than 0 and less than or equal to 1;

an LIO layer at least partially disposed on at least a portion of the BLSO layer so as to form an interface between the LIO layer and the BLSO layer, and formed of an LaInO3 material; and

a first electrode layer at least partially in contact with the interface between the BLSO layer and the LIO layer, and formed of at least two or more separated portions;

wherein the LIO layer has a thickness between 15 to 17 angstroms.

2. The electronic device of claim 1 , wherein the substrate is formed of an MgO material.

3. The electronic device of claim 1 , further comprising a second electrode layer disposed on the LIO layer and not in contact with the first electrode layer, wherein the substrate is formed of an MgO material.

4. The electronic device of claim 2 or 3 , further comprising a second buffer layer arranged between the substrate and the first buffer layer, and formed of a BaHfO 3 material.

5. The electronic device of claim 2 , wherein the first electrode layer is formed of a (Ba 1-x ,La x )SnO 3 material, wherein x is equal to or greater than 0.04.

6. The electronic device of claim 3 , wherein at least one of the first electrode layer and the second electrode layer is formed of a (Ba 1-x ,La x )SnO 3 material, wherein x is equal to or greater than 0.04.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 10, 2022
From: CHAR, KOOK RIN; KIM, YOUNG MO; KIM, YOU JUNG
To: SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION
Reel/Frame 059887/0022 →
Continuity (1)
Related Publication 20230045518A1 · Feb 9, 2023
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