Laser reflow apparatus and laser reflow method
The laser reflow apparatus of the present invention comprises a laser pressurization head module for pressing a bonding object, which includes a plurality of electronic components arranged on a substrate by a transmissive pressurization member while irradiating a laser beam through the pressurization member, to bond the electronic components to the substrate; and a bonding object transfer module for transferring the bonding object having transferred from one side of the laser pressurization head module to carry the bonding object to the other side thereof after passing through a reflow process of the laser pressurized head module.
1 . A laser reflow apparatus comprising:
an actuator configured to press a transmissive pressurization member, wherein the transmissive pressurization member comprises a substrate member having a square panel shape;
a laser source configured to irradiate a laser beam to bond a plurality of electronic components to a substrate through the transmissive pressurization member to a bonding object including the plurality of electronic components arranged on the substrate while simultaneously pressing the plurality of electronic components with the transmissive pressurization member;
a conveyor configured to transport the bonding object imported from one side of the conveyor to an other side of the conveyor after a reflow process by the laser source and the actuator;
a holder unit configured to replaceably mount the transmissive pressurization member, the holder unit having a circular shape or a polygonal shape and comprising a base plate having a perforation formed in a center so that the transmissive pressurization member is inserted and settled;
a probe unit, provided over the holder unit, configured to check flatness of the transmissive pressurization member mounted on the holder unit; and
at least one press unit axially coupled with each of three points around a rim of the holder unit, the three points forming vertices of an imaginary equilateral triangle,
wherein a center of gravity of the imaginary equilateral triangle and a center of gravity of the transmissive pressurization member coincide, and
wherein the at least one press unit is configured to independently press each of the three points to adjust the flatness of the transmissive pressurization member.
2 . The laser reflow apparatus of claim 1 , wherein the probe unit comprises:
a probe configured to measure flatness by stabbing at least one point on an upper surface of the transmissive pressurization member;
a moving means configured to move the probe horizontally or vertically; and
a probe bracket configured to fix the probe and the moving means.
3 . The laser reflow apparatus of claim 2 , wherein the probe is configured to probe four or more positions including each corner point of a rectangular-shaped upper surface of the transmissive pressurization member.