Bonding sheet and bonded structure
A bonding sheet includes a copper foil and sinterable bonding films formed on both faces of the copper foil. The bonding films each contain copper particles and a solid reducing agent. The bonding sheet is used to bond to a target object to be bonded having at least one metal selected from gold, silver, copper, and nickel on a surface thereof. A bonded structure includes: a bonded object having at least one metal selected from gold, silver, copper, and nickel on a surface thereof; a copper foil; and a bonding layer including a sintered structure of copper particles; and the bonded object and the copper foil are electrically connected to each other via the bonding layer.
1. A bonding sheet comprising:
a copper foil containing copper in an amount of 97 mass % or more; and
sinterable bonding films formed on both faces of the copper foil,
wherein each of the bonding films contains copper particles and a solid reducing agent, and
the bonding sheet is used such that at least one of the bonding films is bonded to a target object, the target object having at least one metal selected from gold, silver, copper, and nickel on a surface thereof.
2. The bonding sheet according to claim 1 ,
wherein the bonding sheet is used so as to bond the target objects to the both faces of the bonding films, respectively.
3. The bonding sheet according to claim 1 ,
wherein the solid reducing agent is an amino alcohol compound.
4. The bonding sheet according to claim 1 ,
wherein the copper foil has a thickness of 0.5 μm or more and 1000 μm or less.
5. A bonded structure comprising:
a first bonded object having at least one metal selected from gold, silver, copper, and nickel on a surface thereof;
a second bonded object having at least one metal selected from gold, silver, copper, and nickel on a surface thereof, and
a composite bonding layer including,
a copper foil, and
bonding layers formed on both faces of the copper foil, each of the bonding layers including a sintered structure of copper particles, the first bonded object and the second bonded object being electrically connected via the composite bonding layer;
wherein a structure (3) below is formed in each of the bonding layers, [Chem. 1]
where R 3 to R 5 each independently represent a hydrogen atom, a hydroxyl group, a hydrocarbon group having 1 to 10 carbon atoms, or a hydrocarbon group having 1 to 10 carbon atoms and a hydroxyl group, and * represents a linkage site to copper.
6. The bonded structure according to claim 5 , further comprising a third bonded object interposed between the first bonded object and the second bonded object,
wherein electrical connection between the first bonded object and the third bonded object and electrical connection between the second bonded object and the third bonded object are respectively obtained via the bonding layer or via the composite bonding layer, and
the third bonded object is a semiconductor element, or a substrate having at least one metal selected from gold, silver, copper, and nickel on a surface thereof.
7. The bonded structure according to claim 5 ,
wherein the copper foil contains copper in an amount of 97 mass % or more.