IP Library › Granted Patent US 12,431,464
Granted Patent B2
US 12,431,464 · App. 17/804,251 · Granted Sep 30, 2025

Microelectronic devices, related electronic systems, and methods of forming microelectronic devices

Inventor: Fatma Arzum Simsek-Ege (Boise, ID)
Assignee: Micron Technology, Inc.
H01L25/0652G11C11/4087H10B12/315H10B41/23H10B43/27
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Quick Facts
Patent No.
US 12,431,464
App. No.
17/804,251
Granted
Sep 30, 2025
Kind
B2
Abstract

A microelectronic device includes a first microelectronic device structure including a memory array region comprising memory cells and a second microelectronic device structure vertically overlying the first microelectronic device structure. The second microelectronic device structure includes control logic devices configured to effectuate at least a portion of control operations for the memory cells and first multi-capacitor structures within spaces between the control logic devices and horizontally neighboring at least one of the control logic devices. The first multi-capacitor structures span a same or fewer number of routing tiers as the control logic devices and are configured to regulate and supply voltage to one or more of the control logic devices.

Claims (24)

1. A microelectronic device, comprising:

a first microelectronic device structure comprising a memory array region comprising memory cells; and

a second microelectronic device structure vertically overlying the first microelectronic device structure, the second microelectronic device structure comprising:

control logic devices configured to effectuate at least a portion of control operations for the memory cells; and

first multi-capacitor structures within spaces between the control logic devices and horizontally neighboring at least one of the control logic devices, the first multi-capacitor structures spanning a same or fewer number of routing tiers as the control logic devices and configured to regulate and supply voltage to one or more of the control logic devices; and

a third microelectronic device structure vertically overlying the second microelectronic device structure, the third microelectronic device structure comprising second multi-capacitor structures.

2. The microelectronic device of claim 1 , wherein the control logic devices comprise one or more of voltage pumps, delay-locked loop (DLL) circuitry, drain supply voltage (V dd ) regulators, chip/deck control circuitry, block switches, select devices, decoders, repair circuitry, memory test devices, array multiplexers (MUX), error checking and correction (ECC) devices, self-refresh/wear leveling devices, page buffers, data paths, or I/O devices.

3. The microelectronic device of claim 1 , wherein the control logic devices comprise:

two or more routing tiers, each tier having respective routing structures; and

contact structures extending between and contacting at least some of the respective routing structures of the two or more routing tiers.

4. The microelectronic device of claim 3 , wherein the memory array region comprises vertical stacks of dynamic random-access memory (DRAM) cells.

5. The microelectronic device of claim 1 , wherein each of the first multi-capacitor structures comprises a metal-insulator-metal (MIM) capacitor.

6. The microelectronic device of claim 1 , wherein memory array region comprises:

a stack structure comprising:

levels of conductive structures vertically alternating with levels of insulative structures; and

staircase structures at lateral ends of the stack structure; and

vertical stacks of memory cells, at least one of the vertical stacks of memory cells comprising:

stacked capacitor structures, each stacked capacitor structure comprising capacitor structures vertically spaced from each other by at least a level of the levels of insulative structures;

transistor structures, each transistor structure operably coupled to a capacitor structure and to a conductive structure of the levels of conductive structures; and

a conductive pillar structure vertically extending through the transistor structures; and

conductive contact structures in electrical communication with the levels of conductive structures at steps of the staircase structures.

7. The microelectronic device of claim 1 , wherein memory array region comprises one of dynamic random-access memory (DRAM) cells, holographic random-access memory (HRAM) cells, and cross-point memory (MTX) cells.

8. The microelectronic device of claim 1 , further comprising a back end of the line (BEOL) structure over a side of the second microelectronic device structure opposite the first microelectronic device structure.

9. The microelectronic device of claim 1 , wherein the first multi-capacitor structures and the second multi-capacitor structures comprise metal-insulator-metal (MIM) capacitors.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 26, 2022
From: SIMSEK-EGE, FATMA ARZUM
To: MICRON TECHNOLOGY, INC.
Reel/Frame 060031/0605 →
Continuity (1)
Related Publication 20230387072A1 · Nov 30, 2023
References Cited (4)
US 20150161072A1 · Gillingham · 2015 [cited by examiner]
US 20180323199A1 · Roberts · 2018 [cited by examiner]
US 20220115292A1 · Choi · 2022 [cited by examiner]
US 20220375851A1 · Choi · 2022 [cited by examiner]