IP Library Granted Patent US 12,040,192
Granted Patent B2
US 12,040,192 · App. 17/813,348 · Granted Jul 16, 2024

Die sidewall coatings and related methods

Inventors: Francis J. Carney (Mesa, AZ); Yusheng Lin (Phoenix, AZ); Michael J. Seddon (Gilbert, AZ); Chee Hiong Chew (Seremban, MY); Soon Wei Wang (Seremban, MY); Eiji Kurose (Oizumi-machi, JP)
Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
H01L21/302H01L21/48H01L21/561H01L21/565H01L21/78H01L23/12H01L23/3185H01L24/04H01L24/26H01L2224/94
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Quick Facts
Patent No.
US 12,040,192
App. No.
17/813,348
Granted
Jul 16, 2024
Kind
B2
Abstract

Various implementations of a method of forming a semiconductor package may include forming a plurality of notches into the first side of a semiconductor substrate; applying a permanent coating material into the plurality of notches; forming a first organic material over the first side of the semiconductor substrate and the plurality of notches; thinning a second side of the semiconductor substrate opposite the first side one of to or into the plurality of notches; and singulating the semiconductor substrate through the permanent coating material into a plurality of semiconductor packages.

Claims (38)

1. A method of forming a semiconductor package, the method comprising:

forming a plurality of notches into a first side of a semiconductor substrate;

applying a permanent coating material into the plurality of notches;

after applying the permanent coating material, forming a first permanent organic material over the first side of the semiconductor substrate and the plurality of notches;

thinning a second side of the semiconductor substrate opposite the first side to the plurality of notches; and

singulating the semiconductor substrate through the permanent coating material into a plurality of semiconductor packages;

wherein the permanent coating material comprises a thickness equal to a depth of the plurality of notches extending from the first side of the semiconductor substrate to a bottom of the plurality of notches.

2. The method of claim 1 , further comprising applying one of a second organic material or a backmetal over the second side of the semiconductor substrate.

3. The method of claim 1 , wherein a perimeter of each of a plurality of semiconductor die comprised in the semiconductor substrate each comprises a closed shape.

4. The method of claim 1 , wherein only a plurality of sidewalls of the semiconductor substrate after singulation are directly coupled to the permanent coating material.

5. The method of claim 1 , further comprising singulating the semiconductor substrate through the first permanent organic material.

6. The method of claim 1 , wherein the firs permanent organic material comprises a permanent die support structure that comprises two or more layers.

7. A method of forming a semiconductor package, the method comprising:

forming a plurality of notches into a first side of a semiconductor substrate;

applying a permanent coating material into the plurality of notches;

after applying the permanent coating material, forming a first organic material over the first side of the semiconductor substrate and the plurality of notches;

thinning a second side of the semiconductor substrate opposite the first side toward the plurality of notches; and

singulating the semiconductor substrate through the permanent coating material and the first organic material into a plurality of semiconductor packages;

wherein a thickness of the permanent coating material of a semiconductor package of the plurality of semiconductor packages is equal to a thickness of a die of the semiconductor package.

8. The method of claim 7 further comprising applying one of a second organic material or a backmetal over the second side of the semiconductor substrate.

9. The method of claim 7 , a perimeter of each of a plurality of semiconductor die comprised in the semiconductor substrate each comprises a closed shape.

10. The method of claim 7 , wherein forming a first organic material over the first side of the semiconductor substrate further comprises forming a permanent die support structure comprising a perimeter comprising a closed shape.

11. The method of claim 10 , further comprising forming one of a second permanent die support structure or a temporary die support structure coupled to the second side of the semiconductor substrate.

12. The method of claim 10 , wherein the permanent die support structure comprises two or more layers.

13. The method of claim 7 , further comprising forming a second plurality of notches within the first plurality of notches, wherein a width of the second plurality of notches is less than a width of the first plurality of notches.

14. A method of forming a semiconductor package, the method comprising:

forming a plurality of notches into the first side of a semiconductor substrate;

applying a permanent coating material into the plurality of notches;

after applying the permanent coating material, forming a first permanent organic material over the first side of the semiconductor substrate and the plurality of notches; and

singulating the semiconductor substrate through the permanent coating material and the first permanent organic material into a plurality of semiconductor packages;

wherein the permanent coating material comprises a thickness equal to a depth of the plurality of notches extending from the first side of the semiconductor substrate to a bottom of the plurality of notches; and

wherein the plurality of semiconductor packages comprises a plurality of die, each die of the plurality of die comprising stepped sidewalls.

15. The method of claim 14 , further comprising applying one of a second organic material or a backmetal over the second side of the semiconductor substrate.

16. The method of claim 14 , wherein a perimeter of each of a plurality of semiconductor die comprised in the semiconductor substrate each comprises a closed shape.

17. The method of claim 14 , wherein forming a first permanent organic material over the first side of the semiconductor substrate further comprises forming a permanent die support structure comprising a perimeter comprising a closed shape.

18. The method of claim 17 , further comprising forming one of a second permanent die support structure or a temporary die support structure coupled to the second side of the semiconductor substrate.

19. The method of claim 17 , wherein the permanent die support structure comprises two or more layers.

20. The method of claim 14 , wherein the first permanent organic material is directly coupled to the first side of the semiconductor substrate.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT REEL 061879, FRAME 0655 Recorded Jun 23, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: FAIRCHILD SEMICONDUCTOR CORPORATION; SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 064123/0001 →
SECURITY INTEREST Recorded Nov 3, 2022
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 061879/0655 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 19, 2022
From: CARNEY, FRANCIS J.; LIN, YUSHENG; SEDDON, MICHAEL J.; CHEW, CHEE HIONG; WANG, SOON WEI; KUROSE, EIJI
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 060545/0093 →