Modules with integrated circuits and devices
An example of a pixel module comprises a module substrate having light emitters disposed on a light-emitter surface and a controller disposed on a controller surface opposed to the light-emitter surface. At least one module electrode is electrically connected to the controller and at least one module electrode is electrically connected to each light emitter. An example of a pixel-module wafer comprises a module source wafer comprising sacrificial portions and module anchors, each sacrificial portion laterally separated from an adjacent sacrificial portion by a module anchor and a pixel module disposed entirely over each sacrificial portion. At least one module tether physically connects each of the pixel modules to at least one of the module anchors. An example of a pixel-module display comprises a display substrate, pixel modules disposed on the display substrate and display electrodes disposed on the display substrate, each display electrode electrically connected to a module electrode.
1. A pixel-module display, comprising:
a display substrate; and
one or more pixel modules disposed on the display substrate and electrically connected to one or more electrical conductors disposed on the display substrate, wherein each of the one or more pixel modules comprises
a semiconductor substrate having a native side and an opposing device side;
a light-emitting diode (LED) disposed on the device side of the semiconductor substrate;
a controller formed on or in the native side of the semiconductor substrate; and
an electrode via comprising an electrode extending through the semiconductor substrate, the electrode electrically connected to the controller and to the LED,
wherein the controller is native to the semiconductor substrate and the LED is non-native to the semiconductor substrate.
2. The pixel-module display of claim 1 , comprising an adhesive layer disposed on the display substrate that adheres the one or more pixel modules to the display substrate.
3. The pixel-module display of claim 1 , comprising, for each of the one or more pixel modules, a connection post extending away from the semiconductor substrate and electrically connected to the electrode and to the electrical conductor.
4. The pixel-module display of claim 1 , wherein, for each of the one or more pixel modules, the LED is a bare, unpackaged LED and comprises a broken or separated tether.
5. The pixel-module display of claim 1 , wherein each pixel module of the one or more pixel modules is a bare, unpackaged pixel module and comprises a broken or separated tether.
6. The pixel-module display of claim 1 , wherein, for each of the one or more pixel modules, the controller is disposed between the LED and the display substrate.
7. The pixel-module display of claim 1 , wherein, for each of the one or more pixel modules, the LED is disposed between the controller and the display substrate, wherein the display substrate is at least 20% transparent to light emitted by the LED, and the LED is disposed to emit light through the display substrate.
8. The pixel-module display of claim 1 , wherein each pixel module of the one or more pixel modules is unpackaged.
9. A method of making a pixel module, comprising:
providing a semiconductor substrate having a native side and an opposing device side;
forming a controller in or on the native side of the semiconductor substrate;
forming an electrode via comprising an electrode extending into the semiconductor substrate and an etch via forming a wall around at least a portion of the controller;
electrically connecting the electrode to the controller with a controller contact pad;
disposing a patterned sacrificial layer comprising sacrificial portions over the controller, the electrode, and the etch via;
providing a carrier wafer and bonding the carrier wafer to the patterned sacrificial layer with a bonding layer; and
disposing an LED on the device side of the semiconductor substrate and electrically connecting the LED to the electrode, thereby forming the pixel module that comprises the LED, the semiconductor substrate, the controller, and the electrode via comprising the electrode.
10. The method of claim 9 , comprising disposing a patterned encapsulation layer over the LED, the patterned encapsulation layer exposing at least a portion of the etch via and extending over and beyond a portion of the etch via.
11. The method of claim 10 , comprising etching the etch via and the patterned sacrificial portion forming a gap in the semiconductor substrate and forming a gap between the controller and the bonding layer, thereby forming a tether that suspends the controller over the bonding layer.
12. The method of claim 11 , comprising micro-transfer printing the pixel module from the carrier wafer to a display substrate.
13. The method of claim 9 , wherein disposing the LED comprises micro-transfer printing the LED from an LED source wafer to the device side.
14. The pixel-module display of claim 1 , wherein each of the one or more pixel modules comprises a plurality of electrode vias, each electrode via of the plurality of electrode vias comprising an electrode extending through the semiconductor substrate, the electrode electrically connected to the controller and to the LED.
15. The pixel-module display of claim 1 , wherein each of the one or more pixel modules comprises a plurality of LEDs, each LED of the plurality of LEDs disposed on the device side and non-native to the semiconductor substrate.
16. The pixel-module display of claim 15 , wherein the plurality of LEDs comprises a red LED operable to emit red light, a green LED operable to emit green light, and a blue LED operable to emit blue light.
17. The pixel-module display of claim 1 , wherein, for each of the one or more pixel modules, the controller is operable to control the LED.
18. The pixel-module display of claim 1 , wherein, for each of the one or more pixel modules, the LED is disposed to emit light in a direction away from the semiconductor substrate.
19. The pixel-module display of claim 1 , wherein, for each of the one or more pixel modules, the electrode via comprises a sidewall dielectric disposed around a perimeter of the electrode via that electrically insulates the electrode from the semiconductor substrate.
20. The pixel-module display of claim 1 , wherein each of the one or more pixel modules comprises a light shield disposed between the LED and the semiconductor substrate.
21. The method of claim 9 , comprising removing a portion of the semiconductor substrate to expose the electrode via and the etch via.
22. The method of claim 9 , comprising forming a device contact pad on the device side of the semiconductor substrate in electrical contact with the electrode.