Phase change memory
A method for making a phase change memory includes a step of forming an array of phase change memory cells, with each cell being separated from neighboring cells in the same line of the array and from neighboring cells in the same column of the array, by the same first distance. The method further includes a step of etching one memory cell out of N, with N being at least equal to 2, in each line or each column.
1. A method for manufacturing a phase change memory, comprising:
forming an array of phase change memory cells, each cell being separated from neighboring cells in a same line of the array and from neighboring cells in a same column of the array, by a first distance; and
etching one memory cell out of N, where N is at least 2, in each line or each column.
2. The method according to claim 1 , wherein N is equal to 5.
3. The method according to claim 1 , comprising:
forming an array of conductive vias, each via being separated from neighboring vias of the same line and from neighboring vias of the same column of the array, by a second distance.
4. The method according to claim 3 , wherein the forming the array of conductive vias is performed prior to the forming the array of phase change memory cells.
5. The method according to claim 3 , wherein the forming the array of phase change memory cells includes forming a stack on the array of conductive vias, the stack including a layer of a resistive material, a layer of a phase change material, and a conductive layer.
6. The method according to claim 5 , wherein forming the array of phase change memory cells includes delineating cells of the array by etching the stack, each cell including a portion of the layer of resistive material, a portion of the layer of phase change material, and a portion of the conductive layer.
7. The method according to claim 1 , wherein the etching one memory cell out of N includes forming a cavity exposing a via on which each etched cell was formed.
8. The method according to claim 1 , wherein the etching one memory cell out of N includes etching lines of cells, the etched lines being separated from each other by N−1 lines of unetched cells.
9. The method according to claim 1 , wherein the etching one memory cell out of N includes etching one cell out on N cells in each line and in each column.
10. The method according to claim 1 , wherein the cells of the array of phase change memory cells are identical.
11. A phase change memory, comprising:
a plurality of phase change memory cells arranged in lines and columns, wherein each line or column includes memory cell groups, the cells in a same memory cell group being separated in pairs by a same first distance, the groups being separated in pairs by a second distance, the phase change memory obtained by the method according to claim 1 .
12. The phase change memory according to claim 11 , wherein N is equal to 5.
13. The phase change memory according to claim 11 , the phase change memory further obtained by:
forming an array of conductive vias, each via being separated from neighboring vias of the same line and from neighboring vias of the same column of the array, by a third distance.
14. The phase change memory according to claim 13 , wherein the forming the array of conductive vias is performed prior to the forming the array of phase change memory cells.
15. The phase change memory according to claim 13 , wherein the forming the array of phase change memory cells includes forming a stack on the array of conductive vias, the stack including a layer of a resistive material, a layer of a phase change material, and a conductive layer.
16. The phase change memory according to claim 15 , wherein the forming the array of phase change memory cells includes delineating cells of the array by etching the stack, each cell including a portion of the layer of resistive material, a portion of the layer of phase change material, and a portion of the conductive layer.
17. The phase change memory according to claim 11 , wherein the etching one memory cell out of N includes forming a cavity exposing a via on which each etched cell was formed.
18. The phase change memory according to claim 11 , wherein the etching one memory cell out of N includes etching lines of cells, the etched lines being separated from each other by N−1 lines of unetched cells.
19. A phase change memory, comprising:
a plurality of phase change memory cells arranged in lines and columns, wherein each line or column includes memory cell groups, the cells in a same memory cell group being separated in pairs by a same first distance, the groups being separated in pairs by a second distance, the second distance being equal to a sum of twice the first distance and a memory cell dimension in a direction of the line or column.