IP Library Patent Application 17847601
Patent Application
App. No. 17/847,601

GAS NOZZLE

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Quick Facts
Patent No.
US None
App. No.
17/847,601
Abstract

A gas nozzle having a fired surface excellent in particle reduction effect is provided. The gas nozzle 1 is a columnar gas nozzle made of sintered ceramics, provided with at least one through-hole 2 through which gas flows. The entire inner surface 2 a of the through-hole 2 and the end face 1 A on which outlet 2 b of the through-hole 2 is provided are both fired surfaces. The inner surface 2 a of the through-hole 2 has a first region A in the vicinity of the outlet 2 b and a second region B which is located at a further position than the first region A. The average crystal grain size in the first region A is formed to be smaller than the average crystal grain size in the second region B.

Claims (4)

1 . A columnar gas nozzle made of sintered ceramics having at least one through-hole through which gas flows,

wherein

the entire surface of an inner surface of the through-hole and an end face on which an outlet of the through-hole is provided are both fired surfaces, the inner surface of the through-hole includes a first region A as an outlet neighboring region and a second region B being located at the depth side from the first region A, and an average crystal grain size at the first region A is smaller than an average crystal grain size at the second region B.

2 . The gas nozzle according to claim 1 , wherein the distance of the first region A from the end face of the outlet to the depth side is within 0.5 mm, and the second region B is on the further depth side than the first region A, having the distance from the end face of the outlet being within 3 mm, and the average grain size in the second region B is not more than 1.2 times the average grain size in the first region A.

Assignments (2)
CHANGE OF NAME Recorded Apr 24, 2024
From: COORSTEK KK
To: COORSTEK GK
Reel/Frame 067208/0322 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 23, 2022
From: KAWAKAMI, KANA; SUGIYAMA, MANAMI
To: COORSTEK KK
Reel/Frame 060291/0600 →