Semiconductor device
A semiconductor device includes; a bottom electrode on a substrate, a supporting pattern between the bottom electrode and an adjacent bottom electrode, a top electrode covering the bottom electrode and the supporting pattern, and a dielectric layer between the bottom electrode and the top electrode and between the supporting pattern and the top electrode. The bottom electrode may include a first portion including a seam and a second portion on the first portion, a top end of the second portion may be disposed at a height lower than an upper surface of the supporting pattern, and a portion of a bottom end of the second portion may be exposed to the seam.
1. A semiconductor device, comprising:
a bottom electrode on a substrate;
a supporting pattern between the bottom electrode and an adjacent bottom electrode;
a top electrode covering the bottom electrode and the supporting pattern; and
a dielectric layer between the bottom electrode and the top electrode and between the supporting pattern and the top electrode,
wherein the bottom electrode includes a first portion including a seam and a second portion on the first portion,
a top end of the second portion is disposed at a height lower than an upper surface of the supporting pattern, and
a portion of a bottom end of the second portion is exposed to the seam.
2. The semiconductor device of claim 1 , wherein the top end of the second portion is disposed at a height higher than a lower surface of the supporting pattern.
3. The semiconductor device of claim 1 , wherein the bottom end of the second portion is disposed at a height higher or lower than a lower surface of the supporting pattern.
4. The semiconductor device of claim 1 , wherein the seam included in the first portion includes a plurality of seams respectively disposed at different heights, and
the portion of the bottom end of the second portion is exposed to an uppermost seam among the plurality of seams.
5. The semiconductor device of claim 1 , wherein the dielectric layer contacts the top end of the second portion.
6. The semiconductor device of claim 1 , wherein the second portion has a seam-free structure.
7. The semiconductor device of claim 1 , wherein the bottom electrode further includes a third portion on the second portion and including another seam, and
a portion of the dielectric layer is exposed to the another seam.
8. The semiconductor device of claim 7 , wherein a top end of the third portion is disposed at a height lower than the upper surface of the supporting pattern and higher than a lower surface of the supporting pattern.
9. The semiconductor device of claim 7 , wherein the dielectric layer contacts a top end of the third portion.
10. The semiconductor device of claim 7 , wherein a portion of the top end of the second portion is exposed to the another seam.
11. The semiconductor device of claim 1 , wherein a first width of the upper surface of the supporting pattern is different from a second width of a lower surface of the supporting pattern.
12. The semiconductor device of claim 11 , wherein the first width is greater than the second width.
13. The semiconductor device of claim 1 , wherein the supporting pattern includes a plurality of supporting patterns respectively disposed at different heights, and
the top end of the second portion is disposed at a height lower than an upper surface of an uppermost supporting pattern among the plurality of supporting patterns.
14. The semiconductor device of claim 13 , wherein the bottom end of the second portion is disposed at a height higher or lower than a lower surface of the uppermost supporting pattern.
15. The semiconductor device of claim 1 , wherein the dielectric layer contacts an upper portion of a side surface of the supporting pattern.
16. A semiconductor device, comprising:
a bottom electrode on a substrate;
a supporting pattern between the bottom electrode and an adjacent bottom electrode;
a top electrode covering the bottom electrode and the supporting pattern; and
a dielectric layer provided between the bottom electrode and the top electrode and between the supporting pattern and the top electrode,
wherein the bottom electrode includes a seam, and
a top end of the bottom electrode is disposed at a height lower than an upper surface of the supporting pattern and higher than a lower surface of the supporting pattern.
17. The semiconductor device of claim 16 , wherein the seam included in the bottom electrode includes a plurality of seams respectively disposed at different heights.
18. The semiconductor device of claim 16 , wherein a top end of the seam is disposed at a height higher or lower than the lower surface of the supporting pattern.
19. A semiconductor device, comprising:
a substrate including an active pattern;
an impurity region provided in the active pattern;
a word line disposed in the substrate and crossing the active pattern;
a bit line disposed on the substrate and extending in a direction crossing the word line;
a storage node contact disposed on the substrate and electrically connected to the impurity region;
a landing pad electrically connected to the storage node contact;
a bottom electrode electrically connected to the landing pad;
an upper supporting pattern and a lower supporting pattern provided between the bottom electrode and an adjacent bottom electrode;
a top electrode covering the bottom electrode and the upper supporting pattern; and
a dielectric layer provided between the bottom electrode and the top electrode and between the upper supporting pattern and the top electrode,
wherein the bottom electrode includes a first portion including a seam and a second portion on the first portion,
a top end of the second portion is disposed at a height lower than an upper surface of the upper supporting pattern, and
a portion of a bottom end of the second portion is exposed to the seam.
20. The semiconductor device of claim 19 , wherein the bottom electrode further includes a third portion on the second portion and including another seam, and
a portion of the dielectric layer is exposed to the another seam.