Detection device
According to an aspect, a detection device includes: photodiodes provided on a substrate; transistors corresponding to the photodiodes; a first organic insulating film that covers the transistors; first electrodes that are between the first organic insulating film and the photodiodes in a direction orthogonal to the substrate and are provided corresponding to the photodiodes; a second electrode provided so as to extend across the photodiodes; an insulating film between adjacent first electrodes, and a second organic insulating film that covers an inside of a contact hole provided in the first organic insulating film. The photodiodes includes a first carrier transport layer, an active layer, and a second carrier transport layer that are stacked on the substrate. The first carrier transport layer, the active layer, and the second carrier transport layer are provided so as to cover each of the first electrodes, the insulating film, and the second organic insulating film.
1. A detection device comprising:
a plurality of photodiodes provided on a substrate;
a plurality of transistors provided corresponding to the photodiodes;
a first organic insulating film that covers the transistors;
a plurality of first electrodes that are provided between the first organic insulating film and the photodiodes in a direction orthogonal to the substrate and are provided corresponding to the photodiodes;
a second electrode provided so as to extend across the photodiodes;
an inorganic insulating film provided between adjacent first electrodes of the first electrodes so as to cover outer edges of the first electrodes, and
a second organic insulating film that covers an inside of a contact hole provided in the first organic insulating film, wherein
in the photodiodes comprising a first carrier transport layer, an active layer, and a second carrier transport layer that are stacked on the substrate, the first carrier transport layer is disposed being in contact with each of the first electrodes, the inorganic insulating film, and the second organic insulating film,
the first carrier transport layer includes a first electrode overlapping portion disposed on the first electrode and an insulating film overlapping portion disposed on the inorganic insulating film,
the first electrode overlapping portion is separated from the insulating film overlapping portion, and
the inorganic insulating film is disposed between the first electrode overlapping portion and the insulating film overlapping portion that are separated from each other.
2. The detection device according to claim 1 , wherein
each of the first electrodes is provided so as to cover an upper side of the first organic insulating film and an inner side surface of the contact hole and is electrically coupled, at a bottom surface of the contact hole, to a corresponding transistor of the transistors, and
the first electrode, the second organic insulating film, the first carrier transport layer, the active layer, the second carrier transport layer, and the second electrode are stacked in the order as listed, in an area overlapping the contact hole.
3. The detection device according to claim 1 , wherein each first electrode, the second electrode, or both are made of a light-transmitting conductive material.
4. The detection device according to claim 1 , wherein
either each first electrode or the second electrode is a cathode electrode, and
another of the first electrode and the second electrode is an anode electrode.
5. The detection device according to claim 1 , wherein
one of the first carrier transport layer and the second carrier transport layer is a hole transport layer, and
another of the first carrier transport layer and the second carrier transport layer is an electron transport layer.
6. The detection device according to claim 1 , wherein
the first electrodes are partitioned by the inorganic insulating film.