IP Library › Granted Patent US 11,990,491
Granted Patent B2
US 11,990,491 · App. 17/859,993 · Granted May 21, 2024

Color filter array, imagers and systems having same, and methods of fabrication and use thereof

Inventors: Loriston Ford (Nampa, ID); Ulrich C. Boettiger (Boise, ID)
H01L27/14625H01L27/14621H01L27/14623H01L27/14627H01L27/14632H01L27/14685H01L27/14687
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Quick Facts
Patent No.
US 11,990,491
App. No.
17/859,993
Granted
May 21, 2024
Kind
B2
Abstract

A pixel cell with a photosensitive region formed in association with a substrate, a color filter formed over the photosensitive region, the color filter comprising a first material layer and a second material layer formed in association with the first shaping material layer.

Claims (29)

1. An imager comprising:

a pixel cell array having at least first, second and third photosensors; and

a color filter array corresponding to the pixel cell array of photosensors and including

respective shaped layers formed over first, second and third base materials, and

respective conformal layers disposed between the first, second and third base materials, wherein the respective conformal layers are each separated by one of the first, second, or third base materials, and wherein the respective conformal layers comprise a same material as the first, second, or third base materials.

2. The imager of claim 1 , wherein at least one of the respective shaped layers has a top portion with a shape that is different than a further shape of a top portion of another of the respective shaped layers, wherein the difference in the shape and the further shape is defined at least in part by a different base material and one or more of the respective conformal layers formed between adjacent ones of the first, second and third base materials.

3. The imager of claim 1 , wherein the respective conformal layers each have a refractive index that focuses incoming light of a targeted wavelength onto a focal plane of a corresponding one of the first, second and third photosensors.

4. The imager of claim 1 , further comprising:

a passivation layer disposed between the pixel cell array and the color filter array, wherein the first, second and third base materials and the respective conformal layers directly contact a top surface of the passivation layer.

5. The imager of claim 4 , wherein the first, second and third base materials and the respective conformal layers form a substantially gapless and coextensive cover layer over the first, second and third photosensors.

6. The imager of claim 1 , wherein a height each conformal layer is substantially the same as one or more of the first, second and third base materials.

7. The imager of claim 6 , wherein the respective shaped layers directly contact corresponding base materials and are separated from the respective conformal layers.

8. A data processing system, comprising:

a processor; and

an imager coupled to the processor, the imager comprising;

a pixel cell array formed in a substrate, the pixel cell array having an array of at least first, second, and third photosensors;

a color filter array comprising at least first, second, and third color filters corresponding to the first, second, and third photosensors, each of the first, second, and third color filters including at least a base structure and a conformal layer adjacent to one or more peripheral edge of the base structure, wherein each conformal layer is separated by each base structure and comprises a same material as the base structure; and

a microlens array formed over the color filter array.

9. The data processing system of claim 8 , wherein at least a first microlens has a top-portion shape that is different than a shape of a second microlens, wherein the difference in the top-portion shape and the shape of the second microlens is defined at least in part by a difference in adjacent base materials, or a difference in adjacent conforming layers, or both.

10. The data processing system of claim 8 , wherein conformal layers for adjacent ones of the first, second, and third color filters directly contact each other.

11. The data processing system of claim 10 , further comprising:

a passivation layer disposed between the pixel cell array and the color filter array, wherein base structures and conformal layers directly contact a top surface of the passivation layer and form a substantially gapless and coextensive cover layer over the first, second and third photosensors.

12. The data processing system of claim 8 , the conformal layer corresponds to a refractive index that focuses incoming light of a targeted wavelength onto a focal plane of a corresponding one of the first, second and third photosensors.

13. The data processing system of claim 8 , wherein a height of conformal layers is uniform across the color filter array.

14. The data processing system of claim 8 , wherein a height of the conformal layer matches that of the adjacent base structure.

15. The data processing system of claim 8 , wherein lenses in the microlens array are over corresponding ones of the base structure and are laterally separated from the corresponding conforming layer.

16. The data processing system of claim 8 , wherein at least one lens in the microlens array has a shape at least partially defined by the corresponding base material, or the corresponding conformal layer, or both.

17. The data processing system of claim 8 , wherein the data processing system is a digital camera system configured to capture still images, or videos, or both.

18. The data processing system of claim 8 , wherein the base structure for at least one of the first, second, and third color filters has a unique width.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 19, 2023
From: MICRON TECHNOLOGY, INC.
To: LODESTAR LICENSING GROUP LLC
Reel/Frame 064958/0947 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 25, 2022
From: FORD, LORISTON; BOETTIGER, ULRICH C.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 061533/0873 →
Continuity (7)
Continuation 16945534 · Jul 31, 2020
Continuation 16508188 · Jul 10, 2019
Continuation 16009137 · Jun 14, 2018
Continuation 15673540 · Aug 10, 2017
Division 14078806 · Nov 13, 2013
Division 11510703 · Aug 28, 2006
Related Publication 20220352229A1 · Nov 3, 2022