Ozone generator and ozone generating method
An ozone generator and an ozone generating method, where the ozone generator includes a dielectric substrate, a first electrode disposed on a first surface of the dielectric substrate, and a second electrode disposed on the dielectric substrate and corresponding to the first electrode. The first electrode comprises a plurality of first finger portions and a plurality of superficial structures integrally formed on the plurality of first finger portions.
1 . An ozone generator, comprising:
a dielectric substrate;
a first electrode disposed on a first surface of the dielectric substrate;
a second electrode disposed on the dielectric substrate and corresponding to the first electrode; and
wherein the first electrode comprises a plurality of first finger portions and a plurality of superficial structures integrally formed on the plurality of first finger portions; and
wherein the first electrode has a flat surface at a side of the first electrode located opposite to the dielectric substrate, and the plurality of superficial structures are disposed only on side surfaces of the first electrode.
2 . The ozone generator according to claim 1 , wherein the second electrode is disposed on the first surface of the dielectric substrate.
3 . The ozone generator according to claim 2 , wherein the second electrode includes a plurality of second finger portions, and the plurality of first finger portions and the plurality of second finger portions are alternately arranged.
4 . The ozone generator according to claim 1 , further comprising a conductive layer disposed on a second surface opposite to the first surface and served as a ground layer.
5 . The ozone generator according to claim 1 , wherein the dielectric substrate has a second surface opposite to the first surface, and the second electrode is disposed on the second surface.
6 . The ozone generator according to claim 5 , further comprising a chamber body fixed to the second electrode, wherein the chamber body and the second electrode together enclose the dielectric substrate and the first electrode therein.
7 . The ozone generator according to claim 6 , wherein the plurality of first finger portions are located between a gas inlet and a gas outlet of the chamber body.
8 . The ozone generator according to claim 5 , wherein the second electrode comprises a plurality of fin structures extending outwards from a surface of the second electrode opposite to the first electrode.
9 . The ozone generator according to claim 1 , wherein each of the plurality of superficial structures is a thread.
10 . The ozone generator according to claim 9 , wherein the plurality of superficial structures have a thread pitch ranging between 1.2 millimeters and 3.7 millimeters.
11 . The ozone generator according to claim 9 , wherein the plurality of superficial structures form a plurality of air channels thereamong.
12 . The ozone generator according to claim 1 , further comprising a catalyst layer disposed on the first surface and in contact with the plurality of superficial structures.
13 . The ozone generator according to claim 12 , wherein at least part of the catalyst layer is located between the plurality of superficial structures and the first surface of the dielectric substrate.
14 . The ozone generator according to claim 12 , wherein the catalyst layer comprises a black titanium dioxide.
15 . The ozone generator according to claim 14 , wherein the black titanium dioxide has an absorption peak in a wavelength range ranging between 200 nanometers and 1000 nanometers.
16 . The ozone generator according to claim 12 , wherein edges of the plurality of superficial structures in contact with the catalyst layer each have a zigzag contour.