Semiconductor package
A semiconductor package including a substrate and at least one semiconductor chip on the substrate may be provided. The substrate may include a body layer having a top surface and a bottom surface, a first thermal conductive plate on the top surface of the body layer, the first thermal conductive plate connected to a ground terminal of the semiconductor chip, and a thermal conductive via penetrating the body layer and being in contact with the first thermal conductive plate.
1 . A semiconductor package, comprising:
a substrate; and
at least one semiconductor chip on the substrate,
wherein the substrate includes,
a body layer having a top surface and a bottom surface,
a first thermal conductive plate on the top surface of the body layer, the first thermal conductive plate connected to a ground terminal of the semiconductor chip, and
a thermal conductive via penetrating the body layer and being in contact with the first thermal conductive plate.
2 . The semiconductor package of claim 1 , further comprising:
an adhesion layer between the semiconductor chip and the substrate,
wherein the adhesion layer is in contact with a top surface of the first thermal conductive plate.
3 . The semiconductor package of claim 1 , further comprising:
a plurality of upper conductive pads on the top surface of the body layer and spaced apart from the first thermal conductive plate; and
a plurality of signal vias penetrating the body layer and connected to the upper conductive pads,
wherein the thermal conductive via has a first width,
wherein each of the signal vias has a second width, and
wherein the first width is greater than the second width.
4 . The semiconductor package of claim 1 , wherein
the body layer includes a plurality of dielectric layers that are sequentially stacked, and
the thermal conductive via penetrates the dielectric layers.
5 . The semiconductor package of claim 1 , further comprising:
a second thermal conductive plate on the bottom surface of the body layer and connected to the thermal conductive via,
wherein the second thermal conductive plate is along an edge of the substrate.
6 . The semiconductor package of claim 1 , further comprising:
a shield layer covering the substrate and being in contact with a lateral surface of the substrate; and
an internal connection line in the body layer and exposed on the lateral surface of the substrate that is in contact with the shield layer,
wherein the thermal conductive via penetrates a layer occupied by the internal connection line.
7 . The semiconductor package of claim 1 , further comprising:
an under-fill layer between the semiconductor chip and the substrate,
wherein the under-fill layer is in contact with a top surface of the first thermal conductive plate.
8 . The semiconductor package of claim 1 , wherein the first thermal conductive plate has one of ‘C’, ‘L’, or ‘T’ shape when viewed in a plan view.
9 . The semiconductor package of claim 1 , further comprising:
a shield layer covering the substrate and being adjacent to a top surface of the substrate; and
an electrically conductive adhesion layer between the shield layer and the first thermal conductive plate.
10 . The semiconductor package of claim 1 , wherein
the body layer includes a plurality of dielectric layers that are sequentially stacked,
the thermal conductive via includes a plurality of sub-vias that are sequentially stacked, and
the sub-vias penetrate corresponding ones of the dielectric layers, respectively.
11 . A semiconductor package, comprising:
a substrate;
at least one semiconductor chip on the substrate;
a mold layer covering the semiconductor chip; and
a shield layer covering the mold layer,
wherein the substrate includes,
a body layer having a top surface and a bottom surface,
a first thermal conductive plate on the top surface of the body layer,
a plurality of signal vias penetrating at least a portion of the body layer, and
a thermal conductive via penetrating the body layer and being in contact with the first thermal conductive plate,
wherein the thermal conductive via has a first width,
wherein each of the signal vias has a second width,
wherein the first width is greater than the second width, and
wherein the first width is in a range of 100 μm to 500 μm.
12 . The semiconductor package of claim 11 , wherein
a plurality of thermal conductive vias including the thermal conductive via are provided, and
the plurality of thermal conductive vias are arranged along an edge of the substrate.
13 . The semiconductor package of claim 11 , wherein
the semiconductor chip includes a plurality of signal terminals and a ground terminal,
the thermal conductive via is connected to the ground terminal, and
the signal vias are connected to the signal terminals.
14 . The semiconductor package of claim 11 , wherein
the substrate further includes a plurality of upper conductive pads on the body layer, and
the first thermal conductive plate has an opening that exposes the upper conductive pads.
15 . The semiconductor package of claim 11 , wherein
the body layer includes a plurality of dielectric layers that are sequentially stacked, and
the thermal conductive via penetrates the dielectric layers.
16 . A semiconductor package comprising:
a substrate; and
at least one semiconductor chip on the substrate,
wherein the substrate includes,
a body layer having a top surface and a bottom surface,
a first thermal conductive plate on the top surface of the body layer,
a plurality of signal vias penetrating at least a portion of the body layer, and
a thermal conductive via penetrating the body layer and being in contact with the first thermal conductive plate,
wherein the thermal conductive via has a first vertical length,
wherein each of the signal vias has a second vertical length,
wherein the first vertical length is greater than the second vertical length, and
wherein the first vertical length is in a range of 120 μm to 500 μm.
17 . The semiconductor package of claim 16 , wherein
the thermal conductive via has a first width,
each of the signal vias has a second width, and
the first width is greater than the second width.
18 . The semiconductor package of claim 16 , wherein
the semiconductor chip includes a plurality of signal terminals and a ground terminal,
the thermal conductive via is connected to the ground terminal, and
the signal vias are connected to the signal terminals.
19 . The semiconductor package of claim 16 , wherein
the body layer includes a plurality of dielectric layers that are sequentially stacked, and
the thermal conductive via penetrates the dielectric layers.
20 . The semiconductor package of claim 16 , further comprising:
a second thermal conductive plate on the bottom surface of the body layer and connected to the thermal conductive via,
wherein the second thermal conductive plate is along an edge of the substrate.