IP Library Granted Patent US 11,817,288
Granted Patent B2
US 11,817,288 · App. 17/887,713 · Granted Nov 14, 2023

Graphite X-ray window

Inventor: Ghazaleh Allaedini (Orem, UT)
Assignee: Moxtek, Inc.
H01J35/18H01J5/18H01J2235/183
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Quick Facts
Patent No.
US 11,817,288
App. No.
17/887,713
Granted
Nov 14, 2023
Kind
B2
Abstract

The x-ray windows herein can have low gas permeability, low outgassing, high strength, low visible and infrared light transmission, high x-ray flux, low atomic number materials, corrosion resistance, high reliability, and low-cost. The x-ray window can include a film 11 with a polymer layer 22 and a graphite layer 21 . The film 11 can consist essentially of graphite and polymer. Most of the film 11 can be the graphite layer 21 . The polymer layer 22 can be a small portion of the film 11.

Claims (37)

1. An x-ray window comprising:

a film spanning an aperture of a frame;

the film across the aperture has ≥70 mass percent carbon;

3 μm≤T11≤100 μm, where T11 is a maximum thickness of the film across the aperture;

the film includes a polymer layer on a graphite layer; and

T21/T22>1, where T21 is a thickness of the graphite layer and T22 is a thickness of the polymer layer.

2. The x-ray window of claim 1 , wherein the polymer layer faces a vacuum and the graphite layer faces ambient pressure.

3. The x-ray window of claim 1 , wherein the polymer layer adjoins the graphite layer.

4. An x-ray device comprising:

an x-ray window mounted to a frame;

the x-ray window including a film spanning an aperture of a frame;

the film across the aperture has ≥70 mass percent carbon; and

3 μm≤T11≤100 μm, where T11 is a maximum thickness of the film across the aperture.

5. The x-ray device of claim 4 , wherein the aperture is void of solid material except for the film.

6. The x-ray device of claim 4 , wherein:

the film includes a polymer layer on a graphite layer; and

T21/T22>1, where T21 is a thickness of the graphite layer and T22 is a thickness of the polymer layer.

7. The x-ray device of claim 6 , wherein:

2 μm≤T21≤25 μm; and

20 nm≤T22≤500 nm.

8. An x-ray window comprising:

a film including a polymer layer on a graphite layer; and

T21/T22>1, where T21 is a thickness of the graphite layer and T22 is a thickness of the polymer layer.

9. The x-ray window of claim 8 , wherein the film has ≥70 mass percent carbon.

10. The x-ray window of claim 8 , wherein 3 μm≤T11≤100 μm, where T11 is a maximum thickness of the film.

11. The x-ray window of claim 8 , wherein the polymer layer includes polyimide.

12. The x-ray window of claim 8 , wherein the polymer layer faces a vacuum and the graphite layer faces ambient pressure.

13. The x-ray window of claim 8 , wherein the polymer layer adjoins the graphite layer.

14. The x-ray window of claim 8 , wherein the film has ≥80 mass percent carbon.

15. The x-ray window of claim 8 , wherein T21/T22≥10.

16. The x-ray window of claim 8 , wherein T21/T22≥50.

17. The x-ray window of claim 8 , wherein T21/T22≤500.

18. The x-ray window of claim 8 , wherein:

2 μm≤T21≤25 μm; and

20 nm≤T22≤500 nm.

19. The x-ray window of claim 8 , wherein the film consists essentially of graphite and polyimide.

20. The x-ray window of claim 8 , wherein the film is planar across its width.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 15, 2022
From: ALLAEDINI, GHAZALEH
To: MOXTEK, INC.
Reel/Frame 060806/0021 →
Continuity (2)
Provisional Application 63243846 · Sep 14, 2021
Related Publication 20230082103A1 · Mar 16, 2023
Cited By (2)
US 12,288,662 US 12,488,956