Manufacturing method of ring-shaped element for etcher
A manufacturing method of a ring-shaped element for an etcher, comprises a granulation operation comprising i) a slurry manufacturing process of preparing a slurry by mixing a raw material including boron carbide, a sinterability enhancer with a solvent; and ii) a granulation process of drying the slurry to prepare granulated raw material; a molding operation of manufacturing a green body by molding the granulated raw material; a sintering operation of carbonizing and sintering the green body to manufacture a sintered body; a shape operation of shaping the sintered body to a ring-shaped element for an etcher. The sinterability enhancer comprises one selected from the group consisting of carbon, boron oxide and combinations thereof.
1 . A method of manufacturing a ring-shaped element for an etcher, the method comprising:
preparing a slurry by mixing a raw material comprising boron carbide and a sinterability enhancer with a solvent;
drying the slurry to form a granulated raw material;
molding the granulated raw material to form a green body:
carbonizing and sintering the green body to produce a sintered body; and
shaping the sintered body into the ring-shaped element for the etcher,
wherein the sinterability enhancer comprises carbon, and
wherein the sinterability enhancer is present in the raw material in an amount ranging from 13% to 23% by weight.
2 . The method of claim 1 ,
wherein the carbon comprises at least one selected from the group consisting of a polymer resin, a carbonized form of the polymer resin, and combinations thereof.
3 . The method of claim 1 ,
wherein the sinterablilty enhancer comprises boron oxide and carbon, and
wherein a weight ratio of boron oxide to carbon in the sinterability enhancer ranges from 1:0.8 to 1:4.
4 . The method of claim 3 ,
wherein the raw material comprises from 1% to 9% by weight of boron oxide and from 5% to 15% by weight of carbon.
5 . The method of claim 1 ,
wherein the solvent comprises at least one selected from the group consisting of an alcohol-based substance, water, and combinations thereof, and
wherein the slurry comprises from 60% to 80% by volume of the solvent.
6 . The method of claim 1 ,
wherein the granulation process comprises spraying the slurry to evaporate the solvent and form the granulated raw material.
7 . The method of claim 1 ,
wherein a particle diameter (D 50 ) of the raw material ranges from 0.3 μm to 1.5 μm.
8 . The method of claim 1 ,
wherein the molding operation comprises filling the granulated raw material into a mold and pressing the filled raw material, and
wherein the pressing is performed at a pressure ranging from 100 MPa to 200 MPa.
9 . The method of claim 1 ,
wherein the carbonizing is performed at a temperature ranging from 600° C. to 900° C.
10 . The method of claim 1 ,
wherein the sintering is performed by maintaining a temperature ranging from 1800° C. to 2500° C. for a duration of 10 hours to 20 hours.
11 . The method of claim 1 ,
wherein the sintering operation comprises:
maintaining a temperature from 100° C. to 250° C. for 20 to 40 minutes;
maintaining a temperature from 250° C. to 350° C. for 4 to 8 hours; and
maintaining a temperature from 360° C. to 500° C. for 4 to 8 hours.
12 . The method of claim 1 ,
wherein the sintering is performed under pressureless conditions.
13 . The method of claim 1 ,
wherein the shaping is performed by electrical discharge wire machining.