Thin film transistor substrate and display device comprising the same
A thin film transistor substrate and a display device comprising the same are provided. The thin film transistor substrate comprises a first thin film transistor and a second thin film transistor on a base substrate, wherein the first thin film transistor includes a first active layer on the base substrate, and a first gate electrode spaced apart from the first active layer, the second thin film transistor includes a second active layer on the base substrate, and a second gate electrode spaced apart from the second active layer, and a mobility of the first active layer is greater than a mobility of the second active layer.
1 . A thin film transistor substrate comprising:
a first thin film transistor on a base substrate, the first thin film transistor including a first active layer on the base substrate and a first gate electrode that is spaced apart from the first active layer;
a second thin film transistor on the base substrate, the second thin film transistor including a second active layer on the base substrate and a second gate electrode that is spaced apart from the second active layer, wherein a mobility of the first active layer is greater than a mobility of the second active layer;
a first gate insulating layer that is between the first active layer and the first gate electrode, and the first gate insulating layer between the second active layer and the second gate electrode; and
a second gate insulating layer that is between the second active layer and the second gate electrode and is between the first active layer and the base substrate.
2 . The thin film transistor substrate of claim 1 , wherein the mobility of the first active layer is 5 to 45 cm 2 /V·s greater than the mobility of the second active layer.
3 . The thin film transistor substrate of claim 1 , wherein the first active layer includes a first oxide semiconductor layer and a second oxide semiconductor layer, and a mobility of the first oxide semiconductor layer is greater than a mobility of the second oxide semiconductor layer.
4 . The thin film transistor substrate of claim 3 , wherein the first oxide semiconductor layer is closer to the first gate electrode than the second oxide semiconductor layer.
5 . The thin film transistor substrate of claim 3 , wherein the second oxide semiconductor layer is closer to the first gate electrode than the first oxide semiconductor layer.
6 . The thin film transistor substrate of claim 5 , wherein the second oxide semiconductor layer covers an upper surface and a lateral surface of the first oxide semiconductor layer that extends from the upper surface.
7 . The thin film transistor substrate of claim 3 , wherein the first active layer further includes a third oxide semiconductor layer.
8 . The thin film transistor substrate of claim 7 , wherein the third oxide semiconductor layer is in contact with the first oxide semiconductor layer.
9 . The thin film transistor substrate of claim 7 , wherein the third oxide semiconductor layer covers an upper surface and a lateral surface of the first oxide semiconductor layer and an upper surface and a lateral surface of the second oxide semiconductor layer.
10 . The thin film transistor substrate of claim 1 , wherein the second active layer is on a same layer as the first active layer,
the first active layer includes a first oxide semiconductor layer and a second oxide semiconductor layer, and a mobility of the first oxide semiconductor layer is greater than a mobility of the second oxide semiconductor layer, and
the second active layer has a same composition as the second oxide semiconductor layer of the first active layer.
11 . The thin film transistor substrate of claim 10 , wherein the second active layer is on a same layer as the second oxide semiconductor layer.
12 . The thin film transistor substrate of claim 10 , wherein the second oxide semiconductor layer of the first active layer covers an upper surface and a lateral surface of the first oxide semiconductor layer.
13 . The thin film transistor substrate of claim 10 , wherein the mobility of the first active layer is 5 to 45 cm 2 /V·s greater than the mobility of the second active layer.
14 . A display device comprising the thin film transistor substrate of claim 1 .
15 . The display device of claim 14 , further comprising:
a pixel and a gate driver on the base substrate,
wherein the gate driver includes at least one of the first thin film transistor or the second thin film transistor.
16 . The display device of claim 15 , wherein the pixel includes a pixel driving circuit, and the pixel driving circuit including the first thin film transistor and the second thin film transistor.
17 . The display device of claim 16 , wherein the first thin film transistor of the pixel driving circuit is a switching transistor.
18 . The display device of claim 16 , wherein the second thin film transistor of the pixel driving circuit is a driving transistor.
19 . The display device of claim 16 , wherein the second thin film transistor of the pixel driving circuit is an emission control transistor.
20 . A thin film transistor substrate comprising:
a first thin film transistor on a base substrate, the first thin film transistor including a first active layer on the base substrate and a first gate electrode that is spaced apart from the first active layer, the first active layer including a first oxide semiconductor layer and a second oxide semiconductor layer on the first oxide semiconductor layer such that the second oxide semiconductor layer is farther from the base substrate than the first oxide semiconductor layer; and
a second thin film transistor on the base substrate, the second thin film transistor including a second active layer on the base substrate and a second gate electrode that is spaced apart from the second active layer, the second active layer including a first oxide semiconductor layer and a second oxide semiconductor layer on the first oxide semiconductor layer of the second thin film transistor such that the second oxide semiconductor layer of the second thin film transistor is farther from the base substrate than the first oxide semiconductor layer of the second thin film transistor;
wherein a mobility of the first oxide semiconductor layer of the first active layer and a mobility of the first oxide semiconductor layer of the second active layer are greater than a mobility of the second oxide semiconductor layer of the first active layer and a mobility of the second oxide semiconductor layer of the second active layer,
wherein the first gate electrode in the first thin film transistor is closer to the first oxide semiconductor layer of the first active layer such that the first oxide semiconductor layer of the first thin film transistor is between the first gate electrode and the second oxide semiconductor layer of the first thin film transistor than the second oxide semiconductor layer of the first active layer, and the second gate electrode in the second thin film transistor is closer to the second oxide semiconductor layer of the second active layer than the first oxide semiconductor layer of the second active layer such that the second oxide semiconductor layer of the second thin film transistor is between the second gate electrode and the first oxide semiconductor layer of the second thin film transistor.
21 . The thin film transistor substrate of claim 20 , wherein the first oxide semiconductor layer of the first active layer and the first oxide semiconductor layer of the second active layer are on a same layer, and the second oxide semiconductor layer of the first active layer and the second oxide semiconductor layer of the second active layer are on a same layer.
22 . The thin film transistor substrate of claim 20 , wherein the first gate electrode is disposed on a side of the first active layer and the second gate electrode is disposed on a side of the second active layer that is opposite the side of the first active layer.
23 . The thin film transistor substrate of claim 22 , wherein the first gate electrode is disposed between the base substrate and the first active layer.
24 . The thin film transistor substrate of claim 22 , wherein the second gate electrode is disposed between the base substrate and the second active layer.
25 . A thin film transistor substrate comprising:
a first thin film transistor on a base substrate, the first thin film transistor including a first active layer on the base substrate and a first gate electrode that is spaced apart from the first active layer, the first active layer including a first oxide semiconductor layer and a second oxide semiconductor layer, and the first oxide semiconductor layer is farther from the base substrate than the second oxide semiconductor layer; and
a second thin film transistor on the base substrate, the second thin film transistor including a second active layer on the base substrate and a second gate electrode that is spaced apart from the second active layer, the second active layer including a first oxide semiconductor layer and a second oxide semiconductor layer, the first oxide semiconductor layer of the second thin film transistor is farther from the base substrate than the second oxide semiconductor layer of the second thin film transistor;
wherein a mobility of the first oxide semiconductor layer of the first active layer and a mobility of the first oxide semiconductor layer of the second active layer are greater than a mobility of the second oxide semiconductor layer of the first active layer and a mobility of the second oxide semiconductor layer of the second active layer,
wherein the first gate electrode in the first thin film transistor is closer to the first oxide semiconductor layer of the first active layer than the second oxide semiconductor layer of the first active layer such that the first oxide semiconductor layer of the first thin film transistor is between the first gate electrode and the second oxide semiconductor layer of the first thin film transistor, and the second gate electrode in the second thin film transistor is closer to the second oxide semiconductor layer of the second active layer than the first oxide semiconductor layer of the second active layer such that the second oxide semiconductor layer of the second thin film transistor is between the second gate electrode and the first oxide semiconductor layer of the second thin film transistor.