Textured CMP pad comprising polymer particles
A chemical mechanical polishing pad comprising a polishing portion, the polishing portion comprising: a polymeric body; a plurality of polymer particles embedded within the body of the polymeric body, wherein at least a portion of the plurality of polymer particles is at least partially exposed at a surface of the polymeric body; and a plurality of pores at the surface of the polymeric body.
1 . A chemical mechanical polishing pad comprising a polishing portion, the polishing portion comprising:
a polymeric body having a polishing surface;
a plurality of solid, rigid polymer particles embedded within the body of the polymeric body, wherein at least a portion of the plurality of polymer particles is at least partially exposed at the polishing surface of the polymeric body, the exposed portion of the polymer particles protruding from the polishing surface of the polymeric body; and
a plurality of pores at the polishing surface of the polymeric body,
wherein an average surface roughness (Sa) of the polishing surface of the ranges from 5.32 μm to 8.02 μm.
2 . The chemical mechanical polishing pad of claim 1 , wherein a concentration of the plurality of polymer particles embedded within the polymeric body is in a range of 0.5% to 40% by weight.
3 . The chemical mechanical polishing pad of claim 1 , wherein the polymer particles have an average size of about 10 nanometers to about 50 micrometers.
4 . The chemical mechanical polishing pad of claim 1 , wherein the polymeric body comprises polyurethane.
5 . The chemical mechanical polishing pad of claim 1 , wherein the polymer particles comprise styrene acrylonitrile.
6 . The chemical mechanical polishing pad of claim 1 , wherein the porosity of the polishing portion is in a range from about 10% to 80%.
7 . The chemical mechanical polishing pad of claim 1 , wherein the elastic storage modulus of polishing portion is in a range from about 50 MPa to about 1000 MPa measured at 25° C.
8 . The chemical mechanical polishing pad of claim 1 , wherein a hardness of the polishing portion is in a range from about 50 to 80 on the Shore D scale.
9 . The chemical mechanical polishing pad of claim 1 , further comprising a subpad portion attached to the polishing portion.
10 . A method of producing a polishing pad comprising:
preparing a first mixture comprising a prepolymer;
preparing or obtaining a first curative comprising polymer particles; preparing a second mixture by combining the first curative comprising the
polymer particles with a second curative;
combining the first mixture and the second mixture;
transferring the combined first and second mixtures into a mold; and initiating a polymerization reaction in the mold to form a polymeric body of a polishing portion of the chemical mechanical polishing pad, the polymeric body comprising a plurality of solid, rigid polymer particles embedded within the body of the polymeric body, wherein at least a portion of the plurality of polymer particles is at least partially exposed at a polishing surface of the polymeric body together with a plurality of pores at the polishing surface of the polymeric body, the exposed portions of the polymer particles protruding from the polishing surface of the polymeric body and wherein an average surface roughness (Sa) of the polishing surface of the ranges from 5.32 μm to 8.02 μm.
11 . The method of claim 10 , wherein the polymer particles have an average size of about 10 nanometers to about 50 micrometers.
12 . The method of claim 10 , wherein the polymer particles comprise styrene acrylonitrile.
13 . The method claim 10 , wherein the polymeric body comprises polyurethane.