Ultrasonic horn
An ultrasonic horn includes: a vertical vibration generating portion in which a first ultrasonic vibrator is mounted inside; a horn portion extending forward from the vertical vibration generating portion, amplifying an ultrasonic vibration generated by the vertical vibration generating portion, and to which a capillary is mounted at a front end portion; and a torsional vibration generating portion extending rearward from the vertical vibration generating portion. The torsional vibration generating portion includes: a rod-shaped body; vibration members arranged axisymmetrically around a central axis; second ultrasonic vibrators sandwiched between the rod-shaped body and the vibration members such that a vibration direction is a circumferential direction; and bolts pressurizing the second ultrasonic vibrators.
1 . An ultrasonic horn, which is an ultrasonic horn used in a wire bonding apparatus, comprising:
a vertical vibration generating portion in which a first ultrasonic vibrator is mounted inside such that a vibration direction is a front-rear direction;
a horn portion extending forward from the vertical vibration generating portion, amplifying an ultrasonic vibration generated by the vertical vibration generating portion, and to which a bonding tool is mounted at a front end portion; and
a torsional vibration generating portion extending rearward from the vertical vibration generating portion,
wherein the torsional vibration generating portion comprises:
a rod-shaped body extending rearward from the vertical vibration generating portion;
a pair of vibration members arranged axisymmetrically around a longitudinal central axis of the rod-shaped body and having a mass smaller than the rod-shaped body;
a pair of second ultrasonic vibrators axisymmetric around the longitudinal central axis of the rod-shaped body and sandwiched between the rod-shaped body and each of the vibration members such that a vibration direction is a circumferential direction; and
a pair of pressurizing mechanisms respectively compressing each of the second ultrasonic vibrators sandwiched between the rod-shaped body and each of the vibration members and pressurizing each of the second ultrasonic vibrators.
2 . The ultrasonic horn according to claim 1 ,
wherein the rod-shaped body has a pair of notch portions formed axisymmetrically around the longitudinal central axis,
each of the vibration members is a separate member from the rod-shaped body and is fitted into each of the notch portions, and
the pressurizing mechanism is a bolt screwed into the rod-shaped body or the vibration member and compressing the second ultrasonic vibrator sandwiched between the rod-shaped body and the vibration member.
3 . The ultrasonic horn according to claim 2 ,
wherein the second ultrasonic vibrator is configured by stacking a plurality of piezoelectric elements that vibrate in a thickness direction when a high-frequency power is applied.
4 . The ultrasonic horn according to claim 1 ,
wherein each of the vibration members is a portion partitioned by slits provided axisymmetrically around the longitudinal central axis of the rod-shaped body and extending radially, and a part thereof is respectively connected to the rod-shaped body;
the pair of second ultrasonic vibrators are respectively arranged in each recess portion between the rod-shaped body and each of the vibration members; and
the pressurizing mechanism is a wedge inserted between the second ultrasonic vibrator in the recess portion and the rod-shaped body or between the second ultrasonic vibrator and the vibration member.
5 . The ultrasonic horn according to claim 4 ,
wherein the second ultrasonic vibrator is configured by stacking a plurality of piezoelectric elements that vibrate in a thickness direction when a high-frequency power is applied.
6 . The ultrasonic horn according to claim 4 ,
wherein the rod-shaped body comprises:
a pair of horizontal slits formed from a rear end surface to a longitudinal center and extending radially outward horizontally from a central portion;
a pair of vertical slits formed from the rear end surface to the longitudinal center and extending radially outward, upward and downward from the central portion; and
a pair of fan-shaped slits extending diagonally upward and diagonally downward from the central portion at the longitudinal center,
wherein the pair of horizontal slits, the pair of vertical slits, and the pair of fan-shaped slits are provided axially axisymmetrically around the longitudinal central axis of the rod-shaped body,
one vibration member is a portion partitioned by one horizontal slit, one vertical slit, and one fan-shaped slit and the other vibration member is a portion partitioned by the other horizontal slit, the other vertical slit, and the other fan-shaped slit; and
the one vibration member and the other vibration member are each connected to the rod-shaped body at the central portion.
7 . The ultrasonic horn according to claim 1 ,
wherein the second ultrasonic vibrator is configured by stacking a plurality of piezoelectric elements that vibrate in a thickness direction when a high-frequency power is applied.