Substrate holder and method for fixing and bonding a substrate
A substrate holder for mounting a substrate, comprising fixing elements for fixing the substrate, wherein the fixing elements can be grouped into zones, and a corresponding method.
1 . A substrate holder for mounting a substrate, comprising:
fixing elements configured to fix the substrate and adapt a propagation speed and a form of a bonding wave during bonding to minimize run-out error during the bonding, the fixing elements being grouped into a plurality of zones, the zones being arranged circular ring-shaped and exclusively in a periphery of the substrate holder, the zones being separated azimuthally from each other; and
a plurality of sensors configured to measure the propagation speed and the form of the bonding wave during the bonding to enable the fixing elements to adapt the propagation speed and the form of the bonding wave during the bonding, the sensors being positioned along a plurality of radii running through the zones.
2 . The substrate holder according to claim 1 , wherein the zones are arranged symmetrically relative to a centre of the substrate holder.
3 . The substrate holder according to claim 1 , wherein the zones are arranged in a plurality of rings around a centre of the substrate holder.
4 . The substrate holder according to claim 3 , wherein the rings are circular rings.
5 . The substrate holder according to claim 1 , wherein the zones are uniformly spaced apart from one another in either an azimuthal direction or a radial direction and the azimuthal direction.
6 . The substrate holder according to claim 1 , wherein the zones are formed with a changing width, with an increasing width, from a centre of the substrate holder to an edge of the substrate holder.
7 . The substrate holder according to claim 1 , wherein the zones are individually switchable such that all of the fixing elements grouped in a respective zone are switched to a fixing state or a non-fixing state.
8 . The substrate holder according to claim 1 , wherein a number of the zones are grouped and switched in common such that all of the fixing elements of the grouped zones are switched to a fixing state or a non-fixing state.
9 . The substrate holder according to claim 1 , wherein a number of the fixing elements in the zones are flexibly changeable.
10 . The substrate holder according to claim 1 , wherein the fixing elements are flexibly assignable to different zones.
11 . The substrate holder according to claim 1 , wherein the fixing elements can be triggered in a cross-zonal manner.
12 . The substrate holder according to claim 1 , wherein the radii run through centres of the zones.
13 . The substrate holder according to claim 12 , wherein the sensors are first sensors and the radii are first radii, and
wherein second sensors are positioned along a plurality of second radii running through the zones and lying between the first radii running through the centres of the zones, the second sensors being configured to measure the propagation speed in a direction other than that which is measured by the first sensors.
14 . A method for fixing and bonding the substrate or a plurality of the substrates with the substrate holder according to claim 1 .
15 . The method according to claim 14 , wherein the zones are individually switchable such that all of the fixing elements grouped in a respective zone are switched to a fixing state or a non-fixing state.
16 . The method according to claim 14 , wherein the zones are grouped and switched in common such that all of the fixing elements of the grouped zones are switched to a fixing state or a non-fixing state.
17 . The method according to claim 14 , wherein a number of the fixing elements in the zones are flexibly changeable.
18 . The method according to claim 14 , wherein the fixing elements are flexibly assignable to different zones.