Granted Patent B2

US 12,306,241 · App. 17/943,847 · Granted May 20, 2025

Inventors: Richard E Stallcup, II (Frisco, TX); Michael Berkmyre (Princeton, TX); Carlo Floresca (Frisco, TX); Ronen Benzion (Los Altos, CA)

Assignee: Innovatum Instruments Inc.

G01R31/2653

Abstract

Claims (87)

1. A method for landing a probe onto a device under test (DUT), the method comprising:

positioning, using a motion control device, a conductive probe above the DUT by a motion control device;

applying electrical signals between the conductive probe and the DUT;

measuring electrical responses from the applied electrical signal;

calculating, by a processor, impedance magnitude values and/or phase angle values based on the measured electrical response values;

causing, by the motion control device, the conductive probe to move towards the DUT while continuing to calculate impedance magnitude values and/or phase angle values from measured electrical response;

determining, by the processor, that the conductive probe has contacted the DUT based on a change in the calculated impedance magnitude values and/or phase angle values meeting or exceeding a threshold impedance magnitude value or threshold phase angle value;

signaling, by the processor, to the motion control device to stop moving the probe towards the DUT based on the change in the calculated impedance magnitude values and/or phase angle values; and

stopping, by the motion control device, the probe based on receiving a signal from the processor.

2. The method of claim 1 , wherein determining that the conductive probe has contacted the DUT based on a change in calculated impedance magnitude values and/or phase angle values comprises determining, by the processor, a change in a rate of change of the calculated impedance magnitude value and/or phase angle value.

3. The method of claim 1 , wherein the change in the calculated impedance magnitude values and/or phase angle values comprises a value, or average of values, changing a predetermined amount from a baseline or meeting/crossing an absolute value.

4. The method of claim 1 , wherein the change in the calculated impedance magnitude values and/or phase angle values comprises a rate of change changing a predetermined amount from a baseline or meeting/crossing an absolute rate of change.

5. The method of claim 1 , further comprising performing an electrical test on the DUT.

6. The method of claim 5 , further comprising:

determining that the electrical test of the DUT is completed;

signaling to the motion control device to separate the conductive probe from the DUT; and

determining, by a processor, that the conductive probe has separated from the DUT based on the aforementioned change in the calculated impedance magnitude values and/or phase angle values.

7. The method of claim 6 , further comprising:

determining, based on a test plan, a second DUT to be tested; and

signaling to the motion control device to position the conductive probe over the second DUT.

8. The method of claim 7 , wherein causing the conductive probe to be positioned over the second DUT comprises:

identifying coordinates of the second DUT; and

causing the conductive probe to position over the second DUT based on the coordinates of the second DUT.

9. The method of claim 7 , wherein causing the conductive probe to be positioned over the second DUT comprises:

identifying coordinates of the second DUT; and

causing the second DUT to be positioned under the conductive probe based on a translation of the coordinates of the second DUT.

10. The method of claim 1 , further comprising:

determining, from a received impedance magnitude values and/or phase angle values, a type of the DUT based, at least in part, on a comparison of calculated impedance magnitude and phase angle against historic values.

11. The method of claim 1 , further comprising:

prior to completion of the test of the DUT:

stopping the test of the DUT;

measuring impedance magnitude values and/or phase angle values;

determining that the conductive probe has drifted or moved off of the DUT;

repositioning the conductive probe onto the DUT; and

completing the test of the DUT.

12. The method of claim 1 , further comprising:

determining, by a processor, that the impedance magnitude values and/or phase angle values indicate a proximity between the conductive probe and the DUT; and

signaling to the motion control device to increase or decrease the rate of motion of the conductive probe towards the DUT based on the proximity between the conductive probe and the DUT determined from the impedance magnitude values and/or the phase angle values.

13. The method of claim 1 , further comprising:

determining, by a processor, that the impedance magnitude values and/or phase angle values indicate a physical geometry of the conductive probe;

determining whether the physical geometry of the conductive probe is suitable to make contact with the DUT based on the impedance magnitude values and/or phase angle values; and

signaling to the motion control device to stop and abort the process if the conductive probe does not have a physical geometry to make contact with the DUT, or signaling to the motion control device to continue moving the probe towards the DUT if the conductive probe does have a physical geometry to make contact with the DUT.

14. A system comprising:

a nanoprober comprising an actuator and to secure a conductive probe;

a signal measurement circuit electrically coupled to the conductive probe, the signal measurement circuit to apply a signal to the conductive probe and receive a signal from the sample or apply signal to the sample and receive signal from probe,

a motion control system to move the nanoprober actuator based on information received from the signal measurement circuitry; and

a hardware processor to:

determine that a rate of change of impedance magnitude values or measured impedance phase angle values determined by the signal measurement circuitry indicates proximity of the conductive probe to a surface based on,

determine that a background trend of impedance magnitude values or measured impedance phase angle values by the signal measurement circuitry indicates fitness or quality of the conductive probe, and

determine that impedance magnitude values and/or phase angle values meeting or exceeding a threshold impedance magnitude value or threshold phase angle value determined by the signal measurement circuitry indicate that the conductive probe has landed on a surface, and

signal to the motion control system to stop moving the nanoprober positioner based on the indication that the conductive probe has landed on the desired surface.

15. The system of claim 14 , wherein the motion control system is to lower the conductive probe towards the DUT while the signal measurement circuitry receives electrical information and the processor calculates impedance magnitude and phase angle between voltage and current based on the received electrical information.

16. The system of claim 15 , wherein the processor is to:

determine that the impedance magnitude or phase angle between voltage and current value received represents the conductive probe tip proximity to the DUT; and

signal to the motion control system to change the probes rate of movement, based on proximity, towards the DUT.

17. The system of claim 15 , wherein the processor is to:

determine that the impedance magnitude or phase angle between voltage and current value received indicates an unusable probe tip to land on the DUT; and

signal to the motion control system to stop moving the probe towards the DUT and abort the landing.

18. The system of claim 15 , wherein the processor is to:

determine that the impedance magnitude or phase angle between voltage and current value received meets or crosses a threshold value;

determine that the conductive probe has contacted the DUT based on the impedance magnitude or phase angle between voltage and current value meeting or crossing the threshold value or any other change in behavior from calculated baselines; and

signal to the motion control system to stop moving the probe towards the DUT.

19. The system of claim 14 , wherein the processor is to:

determine what the DUT is based on stored information; and

perform an electrical test on the DUT through the signal measurement circuitry based on what the DUT is.

20. The system of claim 19 , the processor to:

determine that the electrical test of the DUT is completed; and

signal to the motion control system to lift the conductive probe off of the DUT or to move the DUT away from the conductive probe.

21. The system of claim 20 , the processor to:

determine, based on a test plan, a second DUT to be tested;

identify a location of the second DUT; and

moving one or both of a sample stage carrying the second DUT and the probe tip so that the probe tip is over the second DUT.

22. The system of claim 21 , the processor to:

identify coordinates of the second DUT; and

signal the motion control system to position the conductive probe over the second DUT or signal the motion control system to position the DUT under an origin of the CPB device based on the coordinates of the second DUT.

23. The system of claim 22 , the processor to:

identify coordinates of the second DUT; and

signal the motion control system to position the conductive probe over the second DUT based on a translation of the coordinates of the second DUT.

24. The system of claim 19 , the processor to:

determine, from a received impedance magnitude values and/or phase angle values, a type of the DUT based on a comparison of calculated electrical information from the electrical test against historic values.

25. The system of claim 19 , the processor to:

prior to completion of the electrical test of the DUT:

stop the electrical test of the DUT;

determine, through current received through the signal measurement circuitry, impedance magnitude values and/or phase angle between voltage and current;

determine that the conductive probe has drifted or moved off of the DUT;

signal the motion control system to reposition the conductive probe onto the DUT; and

complete the electrical test of the DUT.

Assignments (1)

Continuity (2)

References Cited (91)