Granted Patent B2

US 12,348,216 · App. 17/944,764 · Granted Jul 1, 2025

Inventors: Sean McHugh (Santa Barbara, CA); Kurt Raihn (Grass Valley, CA)

Assignee: Murata Manufacturing Co., Ltd.

H03H9/568H03H3/02H03H9/132H03H2003/021

Abstract

Claims (48)

1. A filter device comprising:

first and second series resonators, each of the first and second series resonators comprising a first sub-resonator electrically connected in series to a second sub-resonator; and

at least one shunt resonator electrically coupled to the first series resonator or the second series resonator,

wherein the respective first sub-resonators of the first and second series resonators are acoustically coupled along a first shared acoustic track, and

wherein the respective second sub-resonators of the first and second series resonators are acoustically coupled along a second shared acoustic track.

2. The filter device of claim 1 , further comprising:

a substrate;

a piezoelectric layer having front and back surfaces, the back surface attached to the substrate and including a plurality of diaphragms that are over a plurality of cavities; and

a conductor pattern on the front surface, the conductor pattern comprising a plurality of interdigital transducers (IDTs) of a respective plurality of resonators including the first and second series resonators and the at least one shunt resonator,

wherein interleaved fingers of the IDTs of the first sub-resonators of the first and second series resonators are on a first diaphragm of the plurality of diaphragms, and

wherein interleaved fingers of the IDTs of the second sub-resonators of the first and second series resonators are on a second diaphragm of the plurality of diaphragms.

3. The filter device of claim 2 , wherein interleaved fingers of the IDTs of the at least one shunt resonator are on one or more diaphragms other than the first and second diaphragms.

4. The filter device of claim 2 , wherein the plurality of resonators comprises three or more shunt resonators that include the at least one shunt resonator, wherein interleaved fingers of IDTs of first and second resonators of the three or more shunt resonators are on a third diaphragm of the plurality of diaphragms, and interleaved fingers of an IDT of a third resonator of the three or more shunt resonators is on a fourth diaphragm of the plurality of diaphragms.

5. The filter device of claim 2 , wherein the plurality of resonators comprises four shunt resonators that include the at least one shunt resonator, interleaved fingers of IDTs of two resonators of the four shunt resonators are on a third diaphragm of the plurality of diaphragms and interleaved fingers of IDTs of another two resonators of the four shunt resonators are on a fourth diaphragm of the plurality of diaphragms.

6. The filter device of claim 2 , wherein a primary shear acoustic mode is excited in the piezoelectric layer by respective IDTs of the plurality of IDTs.

7. The filter device of claim 6 , wherein the primary shear acoustic mode is excited in response to a radio frequency signal applied to the respective IDTs.

8. The filter device of claim 2 , wherein the piezoelectric layer is lithium niobate.

9. The filter device of claim 1 , wherein the at least one shunt resonator is disposed along a third acoustic track.

10. The filter device of claim 1 , further comprising:

one or more additional series resonators comprising respective first and second sub-resonators electrically connected in series,

wherein the first sub-resonators of the one or more additional series resonators are acoustically coupled along the first shared acoustic track, and

wherein the second sub-resonators of the one or more additional series resonators are acoustically coupled along the second shared acoustic track.

11. The filter device of claim 1 , further comprising:

a filter input and a filter output,

wherein the first sub-resonator and the second sub-resonator of both the first and second series resonators are all connected in series to one another between the filter input and the filter output.

12. A filter device comprising:

a substrate;

a piezoelectric plate having front and back surfaces, the back surface attached to the substrate, portions of the piezoelectric plate forming a plurality of diaphragms that are over a plurality of cavities; and

a conductor pattern on the front surface, the conductor pattern comprising a plurality of interdigital transducers (IDTs) of a respective plurality of resonators including at least two series resonators and at least one shunt resonator,

wherein each of the at least two series resonators comprises respective first and second sub-resonators,

wherein interleaved fingers of the IDTs of the first sub-resonators of the at least two series resonators are on a first diaphragm of the plurality of diaphragms, and

wherein interleaved fingers of the IDTs of the second sub-resonators of the at least two series resonators are on a second diaphragm of the plurality of diaphragms.

13. The filter device of claim 12 , wherein interleaved fingers of the IDTs of the at least one shunt resonator are on one or more diaphragms other than the first and second diaphragms.

14. The filter device of claim 12 , wherein the plurality of resonators comprises three or more shunt resonators, wherein interleaved fingers of the IDTs of two resonators of the three or more shunt resonators are on a third diaphragm of the plurality of diaphragms, and interleaved fingers of an IDT of another resonator of the three or more shunt resonators is on a fourth diaphragm of the plurality of diaphragms.

15. The filter device of claim 12 , wherein the plurality of resonators comprises four series resonators and four shunt resonators, interleaved fingers of the IDTs of two resonators of the four shunt resonators are on a third diaphragm of the plurality of diaphragms and interleaved fingers of the IDTs of another two resonators of the four shunt resonators are on a fourth diaphragm of the plurality of diaphragms.

16. The filter device of claim 12 , wherein a primary shear acoustic mode is excited in the piezoelectric plate by respective IDTs of the plurality of IDTs.

17. The filter device of claim 16 , wherein the primary shear acoustic mode is excited in response to a radio frequency signal applied to the respective IDTs.

18. The filter device of claim 12 , wherein the piezoelectric plate is lithium niobate.

19. A method of fabricating a filter device comprising:

forming first and second series resonators and at least one shunt resonator, the at least one shunt resonator electrically coupled to the first series resonator or the second series resonator, wherein:

each of the first and second series resonators comprises a first sub-resonator electrically connected in series to a second sub-resonator,

the respective first sub-resonators of the first and second series resonators are acoustically coupled along a first shared acoustic track, and

the respective second sub-resonators of the first and second series resonators are acoustically coupled along a second shared acoustic track.

20. The method of claim 19 , further comprising:

forming a plurality of cavities in a substrate such that portions of a piezoelectric layer that are attached to the substrate form a plurality of diaphragms that are over the respective plurality of cavities; and

forming a conductor pattern on a surface of the piezoelectric layer opposite the substrate, the conductor pattern comprising a plurality of interdigital transducers (IDTs) of a respective plurality of resonators including the first and second series resonators and the at least one shunt resonator,

wherein interleaved fingers of the IDTs of the first sub-resonators of the first and second series resonators are on a first diaphragm of the plurality of diaphragms, and

interleaved fingers of the IDTs of the second sub-resonators of the first and second series resonators are on a second diaphragm of the plurality of diaphragms.

Assignments (2)

Continuity (3)

References Cited (274)