Magnetic sensor
A magnetic sensor includes an insulating layer, a coil element disposed on the insulating layer, and a first insulating film. The insulating layer includes a first inclined surface and a second inclined surface. The coil element includes a first side surface and a second side surface. The first side surface includes a first portion and a second portion, the second portion being disposed at a position farther from a top surface of a substrate than a position where the first portion is disposed. The first portion is inclined so as to intersect with the first and second inclined surfaces, and is also inclined so as to be closer to the second side surface at positions closer to the top surface of the substrate. The first insulating film covers the first portion.
1. A magnetic sensor comprising:
a substrate including a reference plane;
a magnetic detection element and an insulating layer provided on the substrate; and
at least one metal layer and a plurality of first insulating films disposed on the insulating layer, wherein:
the insulating layer includes at least one inclined surface inclined with respect to the reference plane;
the at least one metal layer has a shape that is long in a predetermined direction, and includes a first side surface and a second side surface located on both sides in a short-side direction of the at least one metal layer;
each of the first side surface and the second side surface includes a first portion and a second portion, the second portion being disposed at a position farther from the reference plane than a position where the first portion is disposed;
the first portion is inclined so as to intersect with the at least one inclined surface;
the first portion of the first side surface is further inclined so as to be closer to the second side surface at positions closer to the reference plane;
the first portion of the second side surface is further inclined so as to be closer to the first side surface at positions closer to the reference plane; and
the plurality of first insulating films include a portion covering the first portion of the first side surface and extending in a direction intersecting with the at least one inclined surface, and a portion covering the first portion of the second side surface and extending in a direction intersecting with the at least one inclined surface.
2. The magnetic sensor according to claim 1 , further comprising a second insulating film covering the at least one metal layer and the plurality of first insulating films.
3. The magnetic sensor according to claim 1 , wherein the plurality of first insulating films further include a portion covering the second portion of the first side surface, and a portion covering the second portion of the second side surface.
4. The magnetic sensor according to claim 1 , wherein:
the at least one metal layer further includes a top surface located at a position located forward in a direction away from the reference plane; and
each of the plurality of first insulating films does not cover the top surface of the at least one metal layer.
5. The magnetic sensor according to claim 4 , wherein the plurality of first insulating films further include a portion present at a position farther from the reference plane than is a corner portion present at a position where the first side surface and the top surface of the at least one metal layer intersect, and a portion present at a position farther from the reference plane than is a corner portion present at a position where the second side surface and the top surface of the at least one metal layer intersect.
6. The magnetic sensor according to claim 1 , wherein:
the at least one inclined surface has a shape that is long in one direction parallel to the reference plane; and
a longitudinal direction of the at least one metal layer and a longitudinal direction of the at least one inclined surface cross each other.
7. The magnetic sensor according to claim 1 , wherein the at least one inclined surface includes a plurality of inclined surfaces.
8. The magnetic sensor according to claim 7 , wherein the at least one metal layer passes through above the plurality of inclined surfaces.
9. The magnetic sensor according to claim 1 , wherein:
the at least one metal layer includes two metal layers adjoining in the short-side direction of the at least one metal layer; and
a gap between the first portion of one of the two metal layers and the first portion of another of the two metal layers becomes larger at positions closer to the reference plane.
10. The magnetic sensor according to claim 1 , wherein:
the at least one metal layer includes two metal layers adjoining in the short-side direction of the at least one metal layer; and
the two metal layers are disposed with a predetermined gap between the two metal layers.
11. The magnetic sensor according to claim 1 , further comprising a nonmagnetic metal film provided between the at least one metal layer and the at least one inclined surface, wherein
a dimension of the nonmagnetic metal film in the short-side direction of the at least one metal layer is larger than a minimum dimension of the at least one metal layer in the short-side direction of the at least one metal layer.
12. The magnetic sensor according to claim 1 , further comprising a plurality of nonmagnetic films attached to respective surfaces of the plurality of first insulating films.
13. The magnetic sensor according to claim 1 , wherein the at least one metal layer is a part of a coil winding.