Magnetic sensor
A magnetic sensor includes a substrate including a top surface, an insulating layer including an inclined surface, an MR element disposed on the inclined surface, a first insulating portion of an insulating material disposed on a part of the MR element, and a second insulating portion of an insulating material disposed on another part of the MR element at a position forward of the first insulating portion in a direction along the inclined surface, the direction being a direction away from the top surface of the substrate.
1. A magnetic sensor comprising:
a substrate including a reference plane;
a support member disposed on the substrate, the support member including at least one inclined surface inclined with respect to the reference plane;
at least one magnetic detection element disposed on the at least one inclined surface;
a first insulating portion of an insulating material disposed on a part of the at least one magnetic detection element; and
a second insulating portion of an insulating material disposed on another part of the at least one magnetic detection element at a position forward of the first insulating portion in a direction along the at least one inclined surface, the direction being a direction away from the reference plane.
2. The magnetic sensor according to claim 1 , further comprising an upper electrode disposed on the at least one magnetic detection element, the first insulating portion, and the second insulating portion, the upper electrode being electrically connected to the at least one magnetic detection element.
3. The magnetic sensor according to claim 1 , further comprising a lower electrode provided between the at least one magnetic detection element and the at least one inclined surface, the lower electrode being electrically connected to the at least one magnetic detection element.
4. The magnetic sensor according to claim 1 , wherein:
the at least one magnetic detection element includes a bottom surface facing the at least one inclined surface, a top surface on a side opposite to the bottom surface, and first and second side surfaces each connecting the bottom surface and the top surface,
the first insulating portion is disposed on at least the first side surface, and
the second insulating portion is disposed on at least the second side surface.
5. The magnetic sensor according to claim 4 , wherein the first insulating portion is further disposed on a part of the top surface of the at least one magnetic detection element.
6. The magnetic sensor according to claim 4 , wherein the second insulating portion is further disposed on a part of the top surface of the at least one magnetic detection element.
7. The magnetic sensor according to claim 4 , wherein the second insulating portion is not disposed on the top surface of the at least one magnetic detection element.
8. The magnetic sensor according to claim 1 , wherein the at least one inclined surface is a curved surface.
9. The magnetic sensor according to claim 1 , wherein the at least one inclined surface is a flat surface.
10. The magnetic sensor according to claim 1 , wherein:
the at least one inclined surface includes a first inclined surface and a second inclined surface facing different directions;
the at least one magnetic detection element includes a first magnetic detection element disposed on the first inclined surface and a second magnetic detection element disposed on the second inclined surface;
the support member includes a projecting surface projecting in a direction away from the reference plane;
the projecting surface includes the first inclined surface and the second inclined surface; and
the second insulating portion disposed on the first magnetic detection element and the second insulating portion disposed on the second magnetic detection element are a single insulating portion.
11. The magnetic sensor according to claim 1 , wherein:
the at least one inclined surface includes a first inclined surface and a second inclined surface facing different directions;
the at least one magnetic detection element includes a first magnetic detection element disposed on the first inclined surface and a second magnetic detection element disposed on the second inclined surface;
the support member includes a first projecting surface and a second projecting surface each projecting in a direction away from the reference plane;
the first projecting surface includes the first inclined surface;
the second projecting surface includes the second inclined surface; and
the first insulating portion disposed on the first magnetic detection element and the first insulating portion disposed on the second magnetic detection element are a single insulating portion.
12. The magnetic sensor according to claim 1 , wherein each of the first insulating portion and the second insulating portion includes a first insulating layer of an insulating material and a second insulating layer of an insulating material disposed on the first insulating layer.
13. The magnetic sensor according to claim 12 , wherein:
the at least one magnetic detection element includes a bottom surface facing the at least one inclined surface, a top surface on a side opposite to the bottom surface, and first and second side surfaces each connecting the bottom surface and the top surface;
the first insulating layer of the first insulating portion is in contact with the first side surface; and
the first insulating layer of the second insulating portion is in contact with the second side surface.