Semiconductor device and manufacturing method of a semiconductor device
A semiconductor device includes a stack structure, a channel layer passing through the stack structure, a memory layer enclosing the channel layer and including first and second openings which expose the channel layer, a well plate coupled to the channel layer through the first opening, and a source plate coupled to the channel layer through the second opening.
1. A semiconductor device, comprising:
a lower structure including a well region and a source region, wherein the well region and the source region are separated from each other;
a stack structure, over the lower structure, including conductive layers and first insulating layers alternately stacked with each other;
a channel layer passing through the stack structure and coupled to the lower structure, wherein the channel layer is coupled to the well region and the source region; and
a source connection structure physically contacted with the source region.
2. The semiconductor device of claim 1 , further comprising a well connection structure physically contacted with the well region.
3. The semiconductor device of claim 1 , further comprising an insulating pattern insulating the source connection structure from the well region.
4. The semiconductor device of claim 1 , further comprising a slit insulating structure separating the stack structure and a portion of the lower structure into a first region and a second region.
5. The semiconductor device of claim 4 , wherein the well connection structure is included in the first region.
6. The semiconductor device of claim 4 , wherein the source connection structure and the channel layer are included in the second region.
7. The semiconductor device of claim 4 , wherein another portion of the lower structure is coupled between the first region and the second region.