IP Library › Granted Patent US 12,354,762
Granted Patent B2
US 12,354,762 · App. 17/954,699 · Granted Jul 8, 2025

Ion movement control system with low pass filter in analog switch

Inventor: Matthias Brandl (Munich, DE)
Assignee: INFINEON TECHNOLOGIES AUSTRIA AG
G21K1/00H03M1/74
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Quick Facts
Patent No.
US 12,354,762
App. No.
17/954,699
Granted
Jul 8, 2025
Kind
B2
Abstract

An ion movement control apparatus with low pass filter switch, including a digital to analog converter (DAC) connected to a first port and enabled to provide a DAC voltage, an electrode element connected to a second port, the electrode element configured to provide an electrical field for controlling a position of an ion, and a filter switch between the first port and the second port and having a filter leg and a bypass leg in parallel, the filter leg having a filter leg switch and a filter portion between the first port and the second port and selectively coupling the first port through the filter leg to the second port to slow a voltage transient of the DAC voltage to the electrode element, and where the bypass leg has a bypass leg switch that selectively couples the first port directly to the second port.

Claims (31)

1. An apparatus, comprising:

a digital to analog converter (DAC) connected to a first port and having circuitry enabled to provide a DAC voltage;

an electrode element connected to a second port, the electrode element configured to provide, according to a supplied DAC voltage, an electrical field for controlling a position of an ion; and

a filter switch connected between the first port and the second port and having a filter leg and a bypass leg, wherein the filter leg is located between the first port and the second port and wherein the bypass leg is between the first port and the second port in parallel with the filter leg, wherein the filter leg has a filter leg switch and a filter portion in series between the first port and the second port and is configured to selectively couple the first port through the filter leg to the second port to slow a voltage transient of the DAC voltage to provide a filtered DAC voltage as the supplied DAC voltage to the electrode element, and wherein the bypass leg has a bypass leg switch between the first port and the second port and is configured to selectively couple the first port directly to the second port provide the DAC voltage as the supplied DAC voltage to the electrode element.

2. The apparatus of claim 1 , wherein the filter portion comprises a first resistor, wherein the electrode element comprises a capacitor and an electrode, and wherein the first resistor and the capacitor form a first order resistor-capacitor (RC) filter.

3. The apparatus of claim 1 , wherein the filter portion comprises a first resistor, a second resistor and a leg capacitor, wherein the electrode element comprises an electrode capacitor and an electrode, and wherein the first resistor, the second resistor, the leg capacitor and the electrode capacitor form a second order resistor-capacitor (RC) filter.

4. The apparatus of claim 1 , further comprising a filter switching controller having circuitry enabled to provide at least one switching control signal, wherein a first switching control signal of the at least one switching control signal causes the filter leg switch to close, and wherein closing of the filter leg switch causes the filter leg switch to connect the first port to the second port though the filter leg and connect the DAC to the electrode element through the filter.

5. The apparatus of claim 4 , wherein a second switching control signal of the at least one switching control signal causes the bypass leg switch to close after the filter leg switch closes.

6. The apparatus of claim 5 , wherein a third switching control signal of the at least one switching control signal causes the bypass leg switch to open after the DAC voltage provides a voltage profile, wherein the bypass leg is closed during provision of the voltage profile.

7. The apparatus of claim 5 , further comprising a multiplexer between the DAC and the filter switch, wherein the multiplexer is configured to selectively connect the DAC to the first port according to a control signal from a multiplexer switching controller.

8. The apparatus of claim 7 , wherein the multiplexer has a plurality of inputs connected to a plurality of DACs, including the DAC, wherein the multiplexer is configured to selectively connect a selected DAC of the plurality of DACs to the first port, wherein the filter leg and the bypass leg are configured to selectively connect the selected DAC to the second port.

9. An apparatus comprising:

a plurality of digital to analog converters (DACs), each DAC of the plurality of DACs having circuitry enabled to provide a respective DAC voltage according to a digital voltage signal from a DAC register;

an electrode element comprising an electrode and a capacitor connected to a port, wherein the capacitor is connected between the port and a reference voltage, and wherein the electrode element configured to provide, according to a supplied DAC voltage, an electrical field for controlling movement of an ion; and

a first filter switch having a first filter leg connected between a first DAC of the plurality of DACs and the electrode, wherein the first filter leg has a first filter leg switch in series with a first filter portion, wherein the first filter portion and the capacitor form a first filter between the first DAC and the electrode, wherein the first filter leg switch is configured to selectively couple the first DAC through the first filter leg to the electrode, wherein the first filter is configured to slow a voltage transient of the DAC voltage to provide a filtered first DAC voltage as the supplied DAC voltage to the electrode.

10. The apparatus of claim 9 , wherein the first filter switch further has a first bypass leg connected between the first DAC and the electrode in parallel with the first filter leg, wherein the first bypass leg has a first bypass leg switch and is configured to selectively couple the first DAC to the electrode to provide the first DAC voltage as the supplied DAC voltage to the electrode.

11. The apparatus of claim 10 , further comprising a multiplexer between the plurality of DACs and the first filter switch, wherein the multiplexer is configured to selectively connect each DAC of the plurality of DACs to the first filter switch, and wherein the multiplexer is further configured to connect a selected DAC of the plurality of DACs to the first filter switch according to a control signal from a multiplexer switching controller.

12. The apparatus of claim 10 , further comprising:

a second filter switch having a second filter leg connected between a second DAC of the plurality of DACs, wherein the second filter leg has a second filter leg switch in series with a second filter portion, wherein the second filter portion and the capacitor form a second filter between the second DAC and the electrode, wherein the second filter leg switch is configured to selectively couple the second DAC through the second filter leg to the electrode, wherein the second filter is configured to filter a second DAC voltage provided by the second DAC and provide a filtered second DAC voltage as the supplied DAC voltage to the electrode;

wherein the second filter switch further has a second bypass leg connected between the second DAC and the electrode in parallel with the second filter leg, wherein the second bypass leg has a second bypass leg switch and is configured to selectively couple the second DAC to the electrode to provide the second DAC voltage as the supplied DAC voltage to the electrode.

13. The apparatus of claim 12 , further comprising a filter switching controller having circuitry enabled to provide switching control signals that control the first filter leg switch, the first bypass leg switch, the second filter leg switch and the second bypass leg switch to selectively connect only one of the first DAC or the second DAC to the electrode during a first time period, and to selectively connect both the first DAC and the second DAC to the electrode during a second time period.

14. The apparatus of claim 12 , further comprising a filter switching controller having circuitry enabled to provide switching control signals that control the first filter leg switch, the first bypass leg switch, the second filter leg switch and the second bypass leg switch to connect both the first DAC and the second DAC to the electrode during a transition phase while switching between connecting the first DAC and the second DAC to the electrode and while the first DAC voltage and the second DAC voltage are substantially the same.

15. A method, comprising:

providing a first digital to analog converter (DAC) voltage through a filter leg for a first time period to an electrode element of an ion position control element;

providing, to the electrode element, for a second time period immediately after the first time period, the first DAC voltage through an unfiltered leg that is in parallel with the filter leg; and

controlling movement of an ion through an electrical field provided at an electrode of the electrode element according to the first DAC voltage provided to the electrode element.

16. The method of claim 15 , wherein the filter leg is located between the first DAC and an electrode of the electrode element, and wherein the unfiltered leg is a first bypass leg disposed between the first DAC and the electrode, wherein the filter leg comprises a filter leg switch and a filter portion having a resistor, wherein at least the resistor and a capacitor of the electrode element form a resistor-capacitor (RC) filter.

17. The method of claim 16 , wherein the providing the first DAC voltage through the filter leg for a first time period comprises causing the filter leg switch to close by providing, by a filter switching controller, a first switching control signal, wherein closing of the filter leg switch causes the filter leg switch to connect the first DAC to the electrode though the filter and to slow a voltage transition of the first DAC voltage.

18. The method of claim 16 , wherein the providing, for the second time period immediately after the first time period, the first DAC voltage through the unfiltered leg comprises causing a bypass leg switch of the first bypass leg to connect the first DAC to the electrode element while a second DAC voltage is provided to the electrode element, by a second DAC through a second bypass leg, wherein the first DAC voltage is substantially the same as the second DAC voltage.

19. The method of claim 16 , further comprising providing, for a third time period after the second time period, by a second DAC, through a second bypass leg, a second DAC voltage to the electrode element.

20. The method of claim 16 , wherein the providing the first DAC voltage through the filter leg for a first time period to the electrode element comprises selectively connecting, by a multiplexer, the first DAC to the electrode element according to a control signal at the multiplexer from a multiplexer switching controller.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 28, 2022
From: BRANDL, MATTHIAS
To: INFINEON TECHNOLOGIES AUSTRIA AG
Reel/Frame 061242/0053 →
Continuity (1)
Related Publication 20240105355A1 · Mar 28, 2024
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