Inspection system and storage medium
In an inspection system that uses terahertz waves, in order to improve the inspection precision for objects and the like, the inspection system has an illumination unit having a plurality of illumination elements that radiate terahertz waves; a camera unit that captures images of the terahertz waves that have been reflected off of an object that has been irradiated by the plurality of illumination elements; and a control unit that performs control so as to make the light emission timings for the plurality of illumination elements different.
1. An inspection system comprising:
an illumination device that has a plurality of illumination elements that radiate terahertz waves;
a camera configured to capture images of the terahertz waves that have been reflected off of an object that has been irradiated by the plurality of illumination elements;
at least one memory storing instructions; and
at least one processor configured to execute the stored instructions that cause the at least one processor to function as:
a controller configured to perform control so as to make light emission timings for the plurality of illumination elements different,
wherein the illumination elements are disposed in different locations along a first direction that is perpendicular to an optical axis of the camera,
wherein the illumination elements are two-dimensionally arranged along the first direction and a second direction that is orthogonal to the first direction, and
wherein the light emission timings of illumination elements that are disposed in different locations along the first direction are different, and the light emission timings of the illumination elements disposed in corresponding locations along the first direction are the same.
2. The inspection system according to claim 1 , wherein an illumination frequency of the illumination elements that are located relatively toward the inside along the first direction is different from an illumination frequency the illumination elements that are located relatively toward the outside along the first direction.
3. The inspection system according to claim 2 , wherein the illumination frequency for the illumination elements that are located relatively toward the inside along the first direction is higher than the illumination frequency for the illumination elements that are located relatively toward the outside along the first direction.
4. The inspection system according to claim 3 , wherein the light emission time period for the illumination elements located relatively toward the inside along the first direction is longer than the light emission time period for the illumination elements located relatively toward the outside along the first direction.
5. The inspection system according to claim 3 , wherein the non-light emission time period for the illumination elements located relatively toward the inside along the first direction is shorter than the non-light emission time period for the illumination elements located relatively toward the outside along the first direction.
6. The inspection system according to claim 2 , wherein the light emission frequency is higher for the illumination elements that are located relatively toward the outside along the first direction than the light emission frequency for the illumination elements that are located relatively toward the inside along the first direction.
7. The inspection system according to claim 6 , wherein the light emission time period for the illumination elements located relatively toward the outside along the first direction is longer than the light emission time period for the illumination elements located relatively toward the inside along the first direction.
8. The inspection system according to claim 6 , wherein the non-light emission time period is shorter for the illumination elements located relatively toward the inside along the first direction than the non-light emission time period for the illumination elements located relatively toward the outside along the first direction.
9. An inspection system:
an illumination device that has a plurality of illumination elements that radiate terahertz waves;
a camera configured to capture images of the terahertz waves that have been reflected off of an object that has been irradiated by the plurality of illumination elements;
at least one memory storing instructions; and
at least one processor configured to execute the stored instructions that cause the at least one processor to function as:
a controller configured to perform control so as to make the light emission patterns for the plurality of illumination elements different,
wherein the illumination elements are two dimensionally arranged along a first direction that is perpendicular to an optical axis of the camera and a second direction that is orthogonal to the first direction, and the illumination patterns of the illumination elements that are disposed are different locations along the first direction are different,
wherein the light emission patterns of the illumination elements that have been disposed at corresponding locations along the first direction are the same, and
wherein an inspection frequency in the camera is different between the illumination elements located relatively toward the inside along the first direction and the illumination elements located relatively toward the outside along the first direction.
10. The inspection system according to claim 9 , wherein a detection frequency for the illumination elements that are located relatively toward the inside along the first direction is higher than a detection frequency for the illumination elements that are located relatively toward the outside along the first direction.
11. The inspection system according to claim 10 , wherein a detection time period in the camera for the illumination elements located relatively toward the inside along the first direction is longer than a detection time period in the camera for the illumination elements that are located relatively toward the outside along the first direction.
12. The inspection system according to claim 10 , wherein a non-detection time period in the camera for the illumination elements located relatively toward the inside along the first direction is shorter than a non-detection time period in the camera for the illumination elements located relatively toward the outside along the first direction.
13. The inspection system according to claim 10 , wherein an inspection cycle in the camera for the illumination elements located relatively toward the inside along the first direction is shorter than an inspection cycle in the camera for the illumination elements located relatively toward the outside along the first direction.
14. The inspection system according to claim 9 , wherein, a detection frequency for the illumination elements that are located relatively toward the outside along the first direction is higher than a detection frequency for the illumination elements that are located relatively toward the inside along the first direction.
15. The inspection system according to claim 14 , wherein a detection time period in the camera for the illumination elements located relatively toward the outside along the first direction is longer than a detection time period in the camera for the illumination elements that are located relatively toward the inside along the first direction.
16. The inspection system according to claim 14 , wherein a non-detection time period in the camera for the illumination elements located relatively toward the inside along the first direction is shorter than a non-detection time period in the camera for the illumination elements located relatively toward the outside along the first direction.
17. The inspection system according to claim 14 , wherein the inspection cycle in the camera is shorter for the illumination elements located relatively toward the outside along the first direction than for the illumination elements located relatively toward the inside along the first direction.
18. The inspection system according to claim 9 , wherein an angle that is formed by an optical axis of the illumination elements that are located relatively toward the outside along the first direction and the second direction is larger than an angle that is formed by an optical axis of the illumination elements that are located relatively toward the inside along the first direction and the second direction.
19. The inspection system according to claim 1 , wherein an on/off pattern for detecting the terahertz waves in the camera is cyclically switched.
20. The inspection system according to claim 1 , where the inspection system has a plurality of cameras.
21. The inspection system according to claim 20 , wherein the cameras operate using mutually different detection patterns.
22. The inspection system according to claim 1 , wherein images for each illumination element that emitted light during a predetermined timing are compared, and an image is synthesized for the timing during which the luminance value was the lowest.
23. The inspection system according to claim 1 , wherein images for each illumination element that emitted light during a predetermined timing are compared, and a pixel signal in which the difference in luminance values is larger than a predetermined threshold is synthesized.
24. A non-transitory computer-readable storage medium configured to store a computer program to control an inspection system to execute the following steps:
an illumination step having a plurality of illumination elements radiate terahertz waves;
an image capturing step in which images are captured by a camera of the terahertz waves that have been reflected off of an object that has been irradiated by the plurality of illumination elements; and
a control step in which control is performed so as to make the light emission timings for the plurality of illumination elements different,
wherein the illumination elements are disposed in different locations along a first direction that is perpendicular to an optical axis of the camera,
wherein the illumination elements are two-dimensionally arranged along the first direction and a second direction that is orthogonal to the first direction,
wherein the light emission timings between the plurality of illumination elements that have been disposed in different locations along the first direction are different, and the light emission timings between the illumination elements that have been disposed in corresponding locations along the first direction are the same.
25. A non-transitory computer-readable storage medium configured to store a computer program to control an inspection system to execute the following steps:
an illumination step having a plurality of illumination elements that radiate terahertz waves;
an image capturing step in which images are captured of the terahertz waves that have been reflected off of an object that has been irradiated by the plurality of illumination elements; and
a control step in which control is performed so as to make the light emission patterns for the plurality of illumination elements different,
wherein the plurality of illumination elements is disposed in different locations along a first direction that is perpendicular to an optical axis of the camera,
wherein the plurality of illumination elements is two-dimensionally arranged along the first direction and a second direction that is orthogonal to the first direction, and
wherein the light emission timings between the plurality of illumination elements that have been disposed in different locations along the first direction are different, and the light emission timings between the illumination elements that have been disposed in corresponding locations along the first direction are the same.
26. The inspection system according to claim 1 , wherein the plurality of illumination elements includes first illumination elements and second illumination elements,
wherein the first illumination elements are arranged along the first direction, and the second illumination elements are arranged along the second direction, and
wherein a first light emission time period for the first illumination elements and a second light emission time period for the second illumination elements are not overlapped.