Two-stage actuation in MEMS ohmic relays
A microelectromechanical system (MEMS) switch includes a movable beam suspended over a first set of conductive contacts and a second set of conductive contacts. Actuation of the MEMS switch occurs in two stages. During actuation of the MEMS switch, the movable beam is brought into contact with the first set of conductive contacts in a first stage of actuation. A first conduction path is created when the movable beam contacts the first set of conductive contacts. Continued actuation of the MEMS switch causes the movable beam to contact the second set of conductive contacts in a second stage of actuation. A second conduction path is created when the movable beam contacts the second set of conductive contacts.
1. A microelectromechanical system (MEMS) switch, comprising:
a first conductive contact disposed over a substrate;
a second conductive contact disposed over the substrate, the first conductive contact and the second conductive contact forming a first set of conductive contacts;
a third conductive contact disposed over the substrate;
a fourth conductive contact disposed over the substrate, the third conductive contact and the fourth conductive contact forming a second set of conductive contacts, wherein the first set of conductive contacts are positioned between the third conductive contact and the fourth conductive contact; and
a movable beam suspended over the first set of conductive contacts and the second set of conductive contacts, wherein:
the first set of conductive contacts and the movable beam are operable to create a first conduction path when the movable beam contacts the first set of conductive contacts; and
the second set of conductive contacts and the movable beam are operable to create a second conduction path when the movable beam contacts the second set of conductive contacts.
2. The MEMS switch of claim 1 , further comprising:
a signal source operably connected to the third conductive contact; and
a load operably connected to the fourth conductive contact.
3. The MEMS switch of claim 1 , further comprising:
a first resistor operably connected between the third conductive contact and the first conductive contact; and
a second resistor operably connected between the second conductive contact and the fourth conductive contact.
4. The MEMS switch of claim 3 , further comprising:
a signal source operably connected to the third conductive contact; and
a load operably connected to the fourth conductive contact.
5. The MEMS switch of claim 1 , further comprising:
a first attachment mechanism operable to attach a first end of the movable beam to a first anchor; and
a second attachment mechanism operable to attach a second end of the movable beam to a second anchor.
6. The MEMS switch of claim 5 , wherein the first attachment mechanism and the second attachment mechanism each comprise springs.
7. A method of operating a microelectromechanical system (MEMS) switch, the method comprising:
initiating actuation of the MEMS switch;
establishing a first conduction path between a first set of conductive contacts and a movable beam when the movable beam contacts the first set of conductive contacts during a first stage of actuation of the MEMS switch; and
establishing a second conduction path between a second set of conductive contacts and the movable beam when the movable beam contacts the second set of conductive contacts during a second stage of actuation of the MEMS switch.
8. The method of claim 7 , wherein:
the MEMS switch is in a closed state in the second stage of actuation; and
the method further comprises transitioning the MEMS switch to an open state.