IP Library › Granted Patent US 12,398,452
Granted Patent B2
US 12,398,452 · App. 17/964,176 · Granted Aug 26, 2025

Metal mask

Inventors: Yun-Heng Chen (Hsinchu County, TW); Wen-Yi Lin (Hsinchu County, TW)
Assignee: DARWIN PRECISIONS CORPORATION
C23C14/042B05C21/005B21B1/227B21H7/00B21H8/005B23P15/00C23C14/24G03F7/0015Y10T29/49826Y10T29/49863
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Quick Facts
Patent No.
US 12,398,452
App. No.
17/964,176
Granted
Aug 26, 2025
Kind
B2
Abstract

A method of manufacturing a metal mask includes calendering a metal material, so as to form a metal mask substrate, where the metal mask substrate includes a surface and a plurality of grooves formed in the surface, and the grooves all extend in a direction. The surface has at least one sampling region, while at least two grooves are distributed in the sampling region, where an average area ratio of the area of the grooves within the sampling region to the area of the sampling region ranges between 45% and 68%.

Claims (8)

1. A metal mask, comprising:

a surface, consisting of a plurality of sampling regions, wherein each of the plurality of sampling regions has a same area;

a pair of long sides, opposite to each other, wherein an extending direction of the long sides is parallel to a first direction;

a pair of short sides, opposite to each other, wherein an extending direction of the short sides is parallel to a second direction, and the first direction is perpendicular to the second direction, wherein an area of the surface is defined by the long sides and the short sides;

a plurality of grooves formed in the surface, and all extending in the first direction, wherein for each of the plurality sampling regions, an average area ratio of an area of the plurality of grooves within the sampling region to an area of the sampling region ranges between 45% and 68%, thereby increasing a suitable roughness of the surface configured to facilitate a subsequent process of the metal mask, wherein a width extending in the second direction of each of the plurality of grooves ranges between 7 μm and 23 μm; and

a plurality of openings, formed in the surface.

2. The metal mask of claim 1 , wherein the plurality of grooves are formed by pressing the metal mask with a calendering roller having a plurality of bumps.

3. The metal mask of claim 1 , wherein the subsequent process is photolithography.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 12, 2022
From: CHEN, YUN-HENG; LIN, WEN-YI
To: DARWIN PRECISIONS CORPORATION
Reel/Frame 061390/0592 →
Priority Claims (1)
TW 110121496 · Jun 11, 2021 · national
Continuity (2)
Division 17577046 · Jan 17, 2022
Related Publication 20230037092A1 · Feb 2, 2023
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