Salt, acid generator, resin, resist composition and method for producing resist pattern
A salt represented by formula (I), a resin comprising a structural unit derived from the salt represented by formula (I), a resit composition comprising the salt represented by formula (I) or a resin comprising a structural unit derived from the salt represented by formula (I).
1 . A salt represented by formula (I):
wherein, in formula (I),
R 4 , R 5 , R 6 , R 7 , R 8 and R 9 each independently represent a halogen atom, a hydroxy group, a haloalkyl group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms and selected from an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, a group combining an alkanediyl group and a cycloaliphatic hydrocarbon group, or a group combining an alkanediyl group and an aromatic hydrocarbon group, each of the hydrocarbon group may have a substituent, and a —CH 2 -included in each of the haloalkyl group and the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO 2 —,
A 1 , A 2 and A 3 each independently represent a hydrocarbon group having 1 to 20 carbon atoms, each of the hydrocarbon group may have a substituent, and a —CH 2 — included in each of the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO 2 —,
m1 represents an integer of 0 to 5, and when m1 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
m2 represents an integer of 0 to 4, and when m2 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
m3 represents an integer of 0 to 4, and when m3 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
m4 represents an integer of 0 to 5, and when m4 is 2 or more, a plurality of R 4 may be the same or different from each other,
m5 represents an integer of 0 to 5, and when m5 is 2 or more, a plurality of R 5 may be the same or different from each other,
m6 represents an integer of 0 to 5, and when m6 is 2 or more, a plurality of R 6 may be the same or different from each other,
m7 represents an integer of 0 to 5, and when m7 is 2 or more, a plurality of R 7 may be the same or different from each other,
m8 represents an integer of 0 to 4, and when m8 is 2 or more, a plurality of R 8 may be the same or different from each other,
m9 represents an integer of 0 to 4, and when m9 is 2 or more, a plurality of R 9 may be the same or different from each other,
in which 0≤m1+m7≤5, 0≤m2+m8≤4, 0≤m3+m9≤4,
at least one of m1, m2 and m3 represents an integer of 1 or more, and when m1 is an integer of 1 or more, at least one of m4 is an integer of 1 or more; when m2 is an integer of 1 or more, at least one of m5 is an integer of 1 or more; when m3 is an integer of 1 or more, at least one of m6 is an integer of 1 or more,
X4 represents a single bond, —CH 2 —, —O—, —S—, —CO—, —SO— or —SO 2 —,
Q b1 and Q b2 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms or an alkyl group having 1 to 6 carbon atoms,
L b1 represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, a —CH 2 — included in the divalent saturated hydrocarbon group may be replaced by —O— or —CO—, and a hydrogen atom included in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group,
Y b1 represents a single bond or an alicyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and a —CH 2 — included in the alicyclic hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO 2 —,
R bb1 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom,
X 10 represents a single bond, *—O—**, *—CO—O—**, *—O—CO—O—** or *-Ax-Ph-Ay-**,
Ph represents a phenylene group which may have a substituent,
Ax represents one group selected from the group consisting of a single bond, an ether bond, an ester bond and a carbonic acid ester bond,
Ay represents one bond species selected from the group consisting of a single bond, an ether bond, an ester bond and a carbonic acid ester bond,
* represents a bonding site to carbon atoms to which —R bb1 is bonded, and ** represents a bonding site to L10, and
L 10 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and a —CH 2 — included in the hydrocarbon group may be replaced by —O—, —S—, —SO 2 — or —CO—.
2 . The salt according to claim 1 , wherein A 1 is ***—X 01 -L 01 - or ***-L 01 -X 01 —,
A 2 is ***—X 02 -L 02 - or ***-L 02 -X 02 —,
A 3 is ***—X 03 -L 03 - or ***-L 03 -X 03 —,
X 01 , X 02 and X 03 each independently represent —O—, —CO—, —S— or —SO 2 —,
L 01 , L 02 and L 03 each independently represent a hydrocarbon group having 1 to 18 carbon atoms, and
*** represents a bonding site to the benzene ring to which S + is bonded.
3 . The salt according to claim 2 , wherein X 01 , X 02 and X 03 are oxygen atoms.
4 . The salt according to claim 2 , wherein L 01 , L 02 and L 03 are each independently a single bond or an alkanediyl group having 1 to 6 carbon atoms.
5 . The salt according to claim 1 , wherein Y b1 is a cyclohexanediyl group, an adamantanediyl group, a norbornanediyl group, an adamantanelactonediyl group or a norbornanelactonediyl group.
6 . The salt according to claim 1 , wherein X 10 is a group represented by any one of formula (X 1 -1), formula (X 1 -2′) to formula (X 1 -7′) and formula (X 1 -8):
wherein, in formula (X 1 -1), formula (X 1 -2′) to formula (X 1 -7′) and formula (X 1 -8),
* and ** are bonding sites, and ** represents a bonding site to L 10 ,
Rx represents a halogen atom, a hydroxy group, an alkyl fluoride group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms or an alkoxy group having 1 to 6 carbon atoms, and
mx represents an integer of 0 to 4.
7 . The salt according to claim 6 , wherein X 10 is a group represented by any one of formula (X 1 -1), formula (X 1 -4) and formula (X 1 -5) and
* and ** are bonding sites, and ** represents a bonding site to L 10 in formula (X 1 -1), formula (X 1 -4) and formula (X 1 -5).
8 . The salt according to claim 1 , wherein L 10 is a single bond or an alkanediyl group having 1 to 4 carbon atoms, a —CH 2 — included in the alkanediyl group may be replaced by —O— or —CO—.
9 . A resin comprising a structural unit derived from the salt according to claim 1 .
10 . A resist composition comprising
the salt according to claim 1 or a resin including a structural unit derived from the salt according to claim 1 .
11 . The resist composition according to claim 10 , further comprising
a resin comprising a structural unit having an acid labile group,
wherein the acid-labile group includes at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1) and a structural unit represented by formula (a1-2):
wherein, in formula (a1-0), formula (a1-1) and formula (a1-2),
L a01 , L a1 and L a2 each independently represent —O— or *—O—(CH 2 ) k1 —CO—O—, k1 represents an integer of 1 to 7, and * represents a bonding site to —CO—,
R a01 , R a4 and R a5 each independently represent a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom,
R a02 , R a03 and R a04 each independently represent an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group obtained by combining these groups,
R a6 and R a7 each independently represent an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these groups,
m1 represents an integer of 0 to 14,
n1 represents an integer of 0 to 10, and
n1′ represents an integer of 0 to 3.
12 . The resist composition according to claim 10 , further comprising
a resin comprising a structural unit represented by formula (a2-A):
wherein, in formula (a2-A),
R a50 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom,
R a51 represents a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group,
A a50 represents a single bond or *—X a51 -(A a52 -X a52 ) nb —, and * represents a bond to carbon atoms to which —R a50 is bonded,
A a52 represents an alkanediyl group having 1 to 6 carbon atoms,
X a51 and X a52 each independently represent —O—, —CO—O— or —O—CO—,
nb represents 0 or 1, and
mb represents an integer of 0 to 4, and when mb is an integer of 2 or more, a plurality of R a51 may be the same or different from each other.
13 . The resist composition according to claim 10 , further comprising
a salt generating an acid having an acidity lower than that of the salt represented by formula (I).
14 . A resist composition comprising
the salt according to claim 1 and
a resin including a structural unit having an acid labile group.
15 . A resist composition comprising
a resin including a structural unit derived from the salt according to claim 1 and a structural unit having an acid labile group.
16 . A resist composition comprising
a resin including a structural unit derived from the salt according to claim 1 and a structural unit represented by formula (a2-A):
wherein, in formula (a2-A),
R a50 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom,
R a51 represents a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group,
A a50 represents a single bond or *—X a51 -(A a52 -X a52 ) nb —, and * represents a bond to carbon atoms to which —R a50 is bonded,
A a52 represents an alkanediyl group having 1 to 6 carbon atoms,
X a51 and X a52 each independently represent —O—, —CO—O— or —O—CO—,
nb represents 0 or 1, and
mb represents an integer of 0 to 4, and when mb is an integer of 2 or more, a plurality of R a51 may be the same or different from each other.
17 . A resist composition comprising
the salt according to claim 1 and
a resin including a structural unit derived from the salt according to claim 1 .
18 . A resist composition comprising
the salt according to claim 1 and
a resin including a structural unit derived from the salt according to claim 1 and a structural unit having an acid labile group.
19 . A method for producing a resist pattern, which comprises:
(1) a step of applying the resist composition according to claim 10 on a substrate,
(2) a step of drying the applied composition to form a composition layer,
(3) a step of exposing the composition layer,
(4) a step of heating the exposed composition layer, and
(5) a step of developing the heated composition layer.
20 . A salt represented by formula (I):
wherein, in formula (I),
R 4 , R 5 , R 6 , R 7 , R 8 and R 9 each independently represent a halogen atom, a hydroxy group, a haloalkyl group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms and selected from an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, a group combining an alkanediyl group and a cycloaliphatic hydrocarbon group, or a group combining an alkanediyl group and an aromatic hydrocarbon group, each of the hydrocarbon group may have a substituent, and a —CH 2 — included in each of the haloalkyl group and the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO 2 —,
A 1 , A 2 and A 3 each independently represent a hydrocarbon group having 1 to 20 carbon atoms, each of the hydrocarbon group may have a substituent, and a —CH 2 — included in each of the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO 2 —, at least one —CH 2 — included in the each of the hydrocarbon group is not replaced by —O—, —CO—, —S— or —SO 2 —,
m1 represents an integer of 0 to 5, and when m1 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
m2 represents an integer of 0 to 4, and when m2 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
m3 represents an integer of 0 to 4, and when m3 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
m4 represents an integer of 0 to 5, and when m4 is 2 or more, a plurality of R 4 may be the same or different from each other,
m5 represents an integer of 0 to 5, and when m5 is 2 or more, a plurality of R 5 may be the same or different from each other,
m6 represents an integer of 0 to 5, and when m6 is 2 or more, a plurality of R 6 may be the same or different from each other,
m7 represents an integer of 0 to 5, and when m7 is 2 or more, a plurality of R 7 may be the same or different from each other,
m8 represents an integer of 0 to 4, and when m8 is 2 or more, a plurality of R 8 may be the same or different from each other,
m9 represents an integer of 0 to 4, and when m9 is 2 or more, a plurality of R 9 may be the same or different from each other,
in which 0≤m1+m7≤5, 0≤m2+m8≤4, 0≤m3+m9≤4,
at least one of m1, m2 and m3 represents an integer of 1 or more,
X 4 represents a single bond, —CH 2 —, —O—, —S—, —CO—, —SO— or —SO 2 —,
Q b1 and Q b2 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms or an alkyl group having 1 to 6 carbon atoms,
L b1 represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, a —CH 2 — included in the divalent saturated hydrocarbon group may be replaced by —O— or —CO—, and a hydrogen atom included in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group,
Y b1 represents a single bond or an alicyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and a —CH 2 — included in the alicyclic hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO 2 —,
R bb1 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom,
X 10 represents a single bond, *—O—**, *—CO—O—**, *—O—CO—O—** or *-Ax-Ph-Ay-**,
Ph represents a phenylene group which may have a substituent,
Ax represents one group selected from the group consisting of a single bond, an ether bond, an ester bond and a carbonic acid ester bond,
Ay represents one bond species selected from the group consisting of a single bond, an ether bond, an ester bond and a carbonic acid ester bond,
* represents a bonding site to carbon atoms to which —R bb1 is bonded, and ** represents a bonding site to L 10 , and
L 10 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and a —CH 2 — included in the hydrocarbon group may be replaced by —O—, —S—, —SO 2 — or —CO—.