Display apparatus and method of manufacturing the same
A display apparatus includes a substrate including a first pixel area and a second pixel area adjacent to each other, a semiconductor layer including a first semiconductor layer in the first pixel area, a second semiconductor layer in the second pixel area, and a bridge connecting the first semiconductor layer to the second semiconductor layer, and a first insulating layer on the semiconductor layer and having a first groove or a first opening corresponding to a boundary between the first pixel area and the second pixel area. The bridge includes a silicide material.
1 . A display apparatus comprising:
a substrate comprising a first pixel area and a second pixel area adjacent to each other;
a semiconductor layer comprising a first semiconductor layer in the first pixel area, a second semiconductor layer in the second pixel area, and a bridge connecting the first semiconductor layer to the second semiconductor layer; and
a first insulating layer on the semiconductor layer and having a first groove or a first opening corresponding to a boundary between the first pixel area and the second pixel area,
wherein the bridge comprises a silicide material.
2 . The display apparatus of claim 1 , wherein the first semiconductor layer, the second semiconductor layer, and the bridge are integrated with one another.
3 . The display apparatus of claim 1 , wherein the bridge passes through the first groove or the first opening.
4 . The display apparatus of claim 1 , wherein the first insulating layer has a first contact hole exposing a partial area of the bridge in a direction toward the first semiconductor layer, and a second contact hole exposing a partial area of the bridge in a direction toward the second semiconductor layer.
5 . The display apparatus of claim 4 , further comprising:
a second insulating layer covering the semiconductor layer; and
a conductive layer on the second insulating layer and comprising a shield layer overlapping the bridge when viewed in a direction perpendicular to the substrate.
6 . The display apparatus of claim 5 , wherein the second insulating layer comprises: a second groove or a second opening overlapping the first groove or the first opening when viewed in the direction perpendicular to the substrate; a third contact hole overlapping the first contact hole; a fourth contact hole overlapping the second contact hole; and comprises an insulation bridge overlapping the shield layer.
7 . The display apparatus of claim 5 , wherein the conductive layer comprises driving gate electrodes in the first pixel area and the second pixel area.
8 . The display apparatus of claim 5 , wherein the conductive layer comprises compensation gate electrodes in the first pixel area and the second pixel area.
9 . The display apparatus of claim 5 , wherein a width of the shield layer in a direction perpendicular to an imaginary line connecting a center of the first pixel area to a center of the second pixel area is greater than a width of the bridge in the direction perpendicular to the imaginary line.
10 . The display apparatus of claim 1 , further comprising a metal pattern in contact with an upper surface of the bridge.
11 . The display apparatus of claim 10 , further comprising a passivation layer on the metal pattern and having a third opening overlapping the first groove or the first opening.
12 . The display apparatus of claim 1 , wherein the silicide material comprises at least one element from among aluminum (Al), titanium (Ti), nickel (Ni), copper (Cu), chromium (Cr), tungsten (W), molybdenum (Mo), or tantalum (Ta).
13 . The display apparatus of claim 1 , wherein the bridge comprises a first bridge and a second bridge, and the first bridge and the second bridge are parallel to each other.
14 . The display apparatus of claim 1 , wherein
the bridge comprises a first bridge and a second bridge, and
the first bridge extends in a direction parallel to an imaginary line connecting a center of the first pixel area to a center of the second pixel area, and the second bridge extends in a direction perpendicular to the imaginary line.
15 . The display apparatus of claim 1 , wherein the bridge comprises a plurality of through holes.
16 . A method of manufacturing a display apparatus, the method comprising:
forming a semiconductor layer on a substrate, the semiconductor layer comprising a first semiconductor layer in a first pixel area, a second semiconductor layer in a second pixel area, and a bridge connecting the first semiconductor layer to the second semiconductor layer;
forming a first insulating layer on the semiconductor layer;
forming a contact hole exposing a partial area of the bridge at the first insulating layer;
forming a metal pattern in correspondence with the contact hole;
siliciding the bridge; and
forming a first groove or a first opening corresponding to a boundary between the first pixel area and the second pixel area, at the first insulating layer.
17 . The method of claim 16 , wherein, in the forming of the contact hole, the contact hole is formed on a center of the bridge.
18 . The method of claim 16 , wherein, in the forming of the contact hole, the contact hole comprises a first contact hole and a second contact hole, wherein the first contact hole is formed to expose a partial area of the bridge in a direction toward the first semiconductor layer, and the second contact hole is formed to expose a partial area of the bridge in a direction toward the second semiconductor layer.
19 . The method of claim 16 , further comprising:
forming a second insulating layer on the semiconductor layer after the forming of the semiconductor layer and before the forming of the first insulating layer; and
forming a conductive layer on the second insulating layer, the conductive layer comprising a shield layer overlapping the bridge when viewed in a direction perpendicular to the substrate.
20 . The method of claim 16 , further comprising forming a passivation layer on the metal pattern, between the forming of the metal pattern and the siliciding of the bridge, wherein, in the forming of the first groove or the first opening, a third opening overlapping the first groove or the first opening is formed at the passivation layer.