Method for manufacturing semiconductor device
Disclosed is a semiconductor device comprising a thin film transistor and wirings connected to the thin film transistor, in which the thin film transistor has a channel formation region in an oxide semiconductor layer, and a copper metal is used for at least one of a gate electrode, a source electrode, a drain electrode, a gate wiring, a source wiring, and a drain wiring. The extremely low off current of the transistor with the oxide semiconductor layer contributes to reduction in power consumption of the semiconductor device. Additionally, the use of the copper metal allows the combination of the semiconductor device with a display element to provide a display device with high display quality and negligible defects, which results from the low electrical resistance of the wirings and electrodes formed with the copper metal.
1. A method of manufacturing a semiconductor device, comprising:
forming a gate electrode including copper over a substrate;
forming a first insulating layer over the gate electrode;
forming an oxide semiconductor layer over the first insulating layer;
performing a first heat treatment at a temperature equal to or higher than 350° C. and equal to or lower than 700° C.;
forming a source electrode and a drain electrode after the first heat treatment;
forming a second insulating layer over and in contact with the source electrode, the drain electrode and a portion of the oxide semiconductor layer; and
performing a second heat treatment after forming the second insulating layer,
wherein the first insulating layer includes silicon nitride and silicon oxide over the silicon nitride, and
wherein the second insulating layer includes silicon oxide and silicon nitride over the silicon oxide.
2. The method of manufacturing a semiconductor device according to claim 1 , wherein the oxide semiconductor film includes indium, gallium and zinc.
3. The method of manufacturing a semiconductor device according to claim 1 , wherein the semiconductor device is a liquid crystal display device.
4. A method of manufacturing a semiconductor device, comprising:
forming a gate electrode including copper over a substrate;
forming a first insulating layer over the gate electrode;
forming an oxide semiconductor layer over the first insulating layer;
performing a first heat treatment at a temperature equal to or higher than 350° C. and equal to or lower than 700° C.;
forming a source electrode and a drain electrode after the first heat treatment;
forming a second insulating layer over and in contact with the source electrode, the drain electrode and a portion of the oxide semiconductor layer; and
performing a second heat treatment at a temperature equal to or higher than 200° C. and equal to or lower than 400° C. after forming the second insulating layer,
wherein the first insulating layer includes silicon nitride and silicon oxide over the silicon nitride, and
wherein the second insulating layer includes silicon oxide and silicon nitride over the silicon oxide.
5. The method of manufacturing a semiconductor device according to claim 4 , wherein the oxide semiconductor film includes indium, gallium and zinc.
6. The method of manufacturing a semiconductor device according to claim 4 , wherein the semiconductor device is a liquid crystal display device.