Acoustic wave device including multiple regions with multiple acoustic velocities
An interdigital transducer electrode that is provided on a piezoelectric film includes a first busbar, a second busbar, multiple first electrode fingers, and multiple second electrode fingers. The first electrode fingers and the second electrode fingers overlap in a region in a direction in which an acoustic wave propagates, and the region includes a central region, a first edge region that is located between the central region and the first busbar, and a second edge region that is located between the central region and the second busbar. An acoustic velocity in the first edge region and the second edge region is lower than an acoustic velocity in the central region. An acoustic velocity in a busbar region is higher than the acoustic velocity in the central region.
1 . An acoustic wave device comprising:
a piezoelectric film;
a high acoustic velocity material layer through which a bulk wave propagates at an acoustic velocity higher than an acoustic velocity at which an acoustic wave propagates through the piezoelectric film;
a low acoustic velocity material layer through which a bulk wave propagates at an acoustic velocity lower than an acoustic velocity at which a bulk wave propagates through the piezoelectric film; and
an interdigital transducer electrode provided on the piezoelectric film; wherein
the low acoustic velocity material layer and the piezoelectric film are stacked in this order on the high acoustic velocity material layer;
the interdigital transducer electrode includes a first busbar and a second busbar that oppose each other, multiple first electrode fingers each of which includes a base end that is connected to the first busbar and a tip end that extends toward the second busbar, and multiple second electrode fingers each of which includes a base end that is connected to the second busbar and a tip end that extends toward the first busbar;
the multiple first electrode fingers and the multiple second electrode fingers overlap in an overlapping region in a direction in which the acoustic wave propagates, and the overlapping region includes a central region, a first edge region that is located between the central region and the first busbar, and a second edge region that is located between the central region and the second busbar;
an acoustic velocity in the first edge region and an acoustic velocity in the second edge region are lower than an acoustic velocity in the central region;
the first busbar and the second busbar are provided in a busbar region, and an acoustic velocity in the busbar region is higher than the acoustic velocity in the central region; and
a first region is between the first edge region and the first busbar, a second region is between the second edge region and the second busbar, and an acoustic velocity in a portion of the second region and the first region is lower than the acoustic velocity in the busbar region.
2 . The acoustic wave device according to claim 1 , wherein a width direction is perpendicular or substantially perpendicular to a direction in which the multiple first electrode fingers and the multiple second electrode fingers extend, and at least one of the multiple first electrode fingers or the multiple second electrode fingers-includes an electrode finger wide portion that is located at least in the first or second edge region and that has a dimension in the width direction larger than that at a center of the at least one of the multiple first electrode fingers or the multiple second electrode fingers in the direction in which the multiple first electrode fingers and the multiple second electrode fingers extend.
3 . The acoustic wave device according to claim 1 , wherein a member is placed at least in the first region or the second region.
4 . The acoustic wave device according to claim 3 , wherein the member extends in a direction in which the multiple first electrode fingers and the multiple second electrode fingers extend.
5 . The acoustic wave device according to claim 3 , wherein the member is a floating electrode that is not connected to either of the first busbar and the second busbar.
6 . The acoustic wave device according to claim 5 , wherein the floating electrode has a size of about 0.75λ or more in a direction in which the multiple first electrode fingers and the multiple second electrode fingers extend, where λ is a wavelength of the acoustic wave device.
7 . The acoustic wave device according to claim 6 , wherein the wavelength of the acoustic wave device corresponds to a repetition period of the multiple first electrode fingers or the multiple second electrode fingers.
8 . The acoustic wave device according to claim 2 , wherein the electrode finger wide portions in the multiple first electrode fingers and in the multiple second electrode fingers have a size of no less than about 0.4λ and no more than about 0.6λ in a direction in which the multiple first and second electrode fingers extend, where λ is a wavelength of the acoustic wave device.
9 . The acoustic wave device according to claim 8 , wherein the wavelength of the acoustic wave device corresponds to a repetition period of the multiple first electrode fingers or the multiple second electrode fingers.
10 . The acoustic wave device according to claim 5 , wherein a width direction is perpendicular to a direction in which the multiple first electrode fingers and the multiple second electrode fingers extend, and the floating electrode includes a first wide portion that has a relatively increased dimension in the width direction.
11 . The acoustic wave device according to claim 3 , wherein the member is a dummy electrode finger a base end of which is connected to the first busbar or the second busbar.
12 . The acoustic wave device according to claim 11 , wherein the dummy electrode finger has a size of about 0.5λ or more in a direction in which the multiple first electrode fingers and the multiple second electrode fingers extend, where A is a wavelength of the acoustic wave device.
13 . The acoustic wave device according to claim 2 , wherein the electrode finger wide portions in the multiple first electrode fingers and in the multiple second electrode fingers have a size of about 0.5λ or more in a direction in which the multiple first and second electrode fingers extend, where λ is a wavelength of the acoustic wave device.
14 . The acoustic wave device according to claim 11 , wherein a width direction is perpendicular or substantially perpendicular to a direction in which the multiple first electrode fingers and the multiple second electrode fingers extend, and the dummy electrode finger includes a second wide portion that has a dimension in the width direction larger than that of the base end that is connected to the first busbar or the second busbar.
15 . The acoustic wave device according to claim 1 , wherein the high acoustic velocity material layer is a high acoustic velocity support substrate.
16 . The acoustic wave device according to claim 1 , further comprising a support substrate that supports the high acoustic velocity material layer.
17 . The acoustic wave device according to claim 1 , wherein a mass addition film is provided on the multiple first electrode fingers and the multiple second electrode fingers at least in the first edge region or the second edge region.
18 . The acoustic wave device according to claim 1 , wherein in the first region or the second region, members that extend in a direction in which the multiple first electrode fingers and the multiple second electrode fingers extend are located on extension lines along which the tip ends of the multiple second electrode fingers and the multiple first electrode fingers extend toward the first busbar or the second busbar.
19 . An acoustic wave device comprising:
a support substrate;
a piezoelectric film made of lithium tantalate or lithium niobate;
a high acoustic velocity material layer made of at least one material selected from a group including aluminum nitride, aluminum oxide, silicon nitride, and DLC film;
a low acoustic velocity material layer made of silicon oxide; and
an interdigital transducer electrode that is provided on the piezoelectric film; wherein
the high acoustic velocity material layer, the low acoustic velocity material layer, and the piezoelectric film are stacked in this order on the support substrate;
the interdigital transducer electrode includes a first busbar and a second busbar that oppose each other, multiple first electrode fingers each of which includes a base end that is connected to the first busbar and a tip end that extends toward the second busbar, and multiple second electrode fingers each of which includes a base end that is connected to the second busbar and a tip end that extends toward the first busbar;
the multiple first electrode fingers and the multiple second electrode fingers overlap in an overlapping region in a direction in which an acoustic wave propagates, and the overlapping region includes a central region, a first edge region that is located between the central region and the first busbar, and a second edge region that is located between the central region and the second busbar;
an acoustic velocity in the first edge region and an acoustic velocity in the second edge region are lower than an acoustic velocity in the central region;
the first busbar and the second busbar are provided in a busbar region, and an acoustic velocity in the busbar region is higher than the acoustic velocity in the central region; and
a first region is between the first edge region and the first busbar, a second region is between the second edge region and the second busbar, and an acoustic velocity in a portion of the second region and the first region is lower than the acoustic velocity in the busbar region.
20 . An acoustic wave device comprising:
a piezoelectric film made of lithium tantalate or lithium niobate;
a high acoustic velocity support substrate made of at least one material selected from a group including sapphire, crystal, silicon carbide, and silicon;
a low acoustic velocity material layer made of silicon oxide; and
an interdigital transducer electrode that is provided on the piezoelectric film; wherein
the low acoustic velocity material layer and the piezoelectric film are stacked in this order on the high acoustic velocity support substrate;
the interdigital transducer electrode includes a first busbar and a second busbar that oppose each other, multiple first electrode fingers each of which includes a base end that is connected to the first busbar and a tip end that extends toward the second busbar, and multiple second electrode fingers each of which includes a base end that is connected to the second busbar and a tip end that extends toward the first busbar;
the multiple first electrode fingers and the multiple second electrode fingers overlap in an overlapping region in a direction in which an acoustic wave propagates, and the overlapping region includes a central region, a first edge region that is located between the central region and the first busbar, and a second edge region that is located between the central region and the second busbar;
an acoustic velocity in the first and second edge regions is lower than an acoustic velocity in the central region;
an acoustic velocity in a busbar region in which the first busbar and the second busbar are provided is higher than the acoustic velocity in the central region; and
a first region is between the first edge region and the first busbar, a second region is between the second edge region and the second busbar, and an acoustic velocity in a portion of the second region and the first region is lower than the acoustic velocity in the busbar region.