IP Library Granted Patent US 12,249,521
Granted Patent B2
US 12,249,521 · App. 18/007,387 · Granted Mar 11, 2025

Temperature control unit

Inventors: Shuhei Hatano (Shizuoka, JP); Hideki Moriuchi (Shizuoka, JP)
Assignee: Tomoegawa Corporation
H01L21/67103
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Quick Facts
Patent No.
US 12,249,521
App. No.
18/007,387
Granted
Mar 11, 2025
Kind
B2
Abstract

A temperature control unit includes: a substantially flat-plate-shaped placement section ( 10 ) configured to support a heat transfer target; a heating section ( 20 ) configured to heat a heat transfer target placed on the placement section ( 10 ); and a heat transfer section ( 30 ) disposed in contact with at least one of the placement section ( 10 ) and the heating section ( 20 ), the heat transfer section ( 30 ) being at least partially formed of a metal porous structure.

Claims (47)

1. A temperature control unit comprising:

a substantially flat-plate-shaped placement section configured to support a heat transfer target;

a heating section configured to heat a heat transfer target placed on the placement section; and

a heat transfer section disposed in contact with at least one of the placement section and the heating section, the heat transfer section being at least partially formed of a metal porous structure, wherein

the heat transfer section has a substantially flat-plate-shaped base member disposed in contact with at least one of the placement section and the heating section, and a protruding member protruding from the base member, and

at least the base member or the protruding member is formed of the metal porous structure.

2. The temperature control unit according to claim 1 , wherein the metal porous structure includes a metal fiber structure formed of a metal fiber.

3. The temperature control unit according to claim 2 , wherein the metal fiber includes at least one of a copper fiber, an aluminium fiber, a nickel fiber, and a stainless steel fiber.

4. The temperature control unit according to claim 3 , wherein the metal fiber structure is non-woven fabric.

5. The temperature control unit according to claim 3 , wherein

the heat transfer section has a substantially flat-plate-shaped base member disposed in contact with at least one of the placement section and the heating section, and a protruding member protruding from the base member, and

at least the base member or the protruding member is formed of the metal porous structure.

6. The temperature control unit according to claim 2 , wherein the metal fiber structure is non-woven fabric.

7. The temperature control unit according to claim 6 , wherein

the heat transfer section has a substantially flat-plate-shaped base member disposed in contact with at least one of the placement section and the heating section, and a protruding member protruding from the base member, and

at least the base member or the protruding member is formed of the metal porous structure.

8. The temperature control unit according to claim 2 , further comprising a housing configured to house the heat transfer section between the placement section and the housing, wherein

the housing is formed to have a space configured to allow fluid to flow therein.

9. The temperature control unit according to claim 1 , wherein the base member and the protruding member are formed of the metal porous structure.

10. The temperature control unit according to claim 9 , wherein a plurality of the protruding members are disposed in the heat transfer section, and the protruding members are bar-shaped members, plate-shaped members, or a combination thereof extending in a direction orthogonal to the base member.

11. The temperature control unit according to claim 1 , wherein a plurality of the protruding members are disposed in the heat transfer section, and the protruding members are bar-shaped members, plate-shaped members, or a combination thereof extending in a direction orthogonal to the base member.

12. The temperature control unit according to claim 1 , further comprising a housing configured to house the heat transfer section between the placement section and the housing, wherein

the housing is formed to have a space configured to allow fluid to flow therein.

13. The temperature control unit according to claim 12 , wherein

the space formed in the housing is demarcated into a plurality of regions by a partition member, and

each of the regions is configured to allow fluid to flow therein.

14. The temperature control unit according to claim 13 , wherein the space formed in the housing is demarcated by the partition member such that the plurality of regions form substantially concentric circles.

15. The temperature control unit according to claim 13 , wherein fluid flows in each of the regions such that fluids in adjacent regions among the regions flow in opposite directions.

16. A temperature control unit comprising:

a substantially flat-plate-shaped placement section configured to support a heat transfer target;

a heating section configured to heat a heat transfer target placed on the placement section;

a heat transfer section disposed in contact with at least one of the placement section and the heating section; and

a housing configured to house the heat transfer section between the placement section and the housing, wherein

the housing is formed to have a space configured to allow fluid to flow therein,

the space formed in the housing is demarcated into a plurality of regions by a partition member, and

each of the regions is configured to allow fluid to flow therein.

17. The temperature control unit according to claim 16 , wherein the space formed in the housing is demarcated by the partition member such that the plurality of regions form substantially concentric circles.

18. The temperature control unit according to claim 16 , wherein fluid flows in each of the regions such that fluids in adjacent regions among the regions flow in opposite directions.

19. A temperature control unit comprising:

a substantially flat-plate-shaped placement section configured to support a heat transfer target;

a heating section configured to heat a heat transfer target placed on the placement section; and

a heat transfer section disposed in contact with at least one of the placement section and the heating section, the heat transfer section being at least partially formed of a metal porous structure that includes a metal fiber structure formed of a metal fiber, wherein

the heat transfer section has a substantially flat-plate-shaped base member disposed in contact with at least one of the placement section and the heating section, and a protruding member protruding from the base member, and

at least the base member or the protruding member is formed of the metal porous structure.

20. The temperature control unit according to claim 19 , wherein

the heat transfer section has a substantially flat-plate-shaped base member disposed in contact with at least one of the placement section and the heating section, and a protruding member protruding from the base member, and

at least the base member or the protruding member is formed of the metal porous structure.

Assignments (2)
CHANGE OF NAME Recorded Dec 17, 2024
From: TOMOEGAWA CO., LTD.
To: TOMOEGAWA CORPORATION
Reel/Frame 069719/0827 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 30, 2023
From: HATANO, SHUHEI; MORIUCHI, HIDEKI
To: TOMOEGAWA CO., LTD
Reel/Frame 062533/0388 →
Priority Claims (1)
JP 2020-205832 · Dec 11, 2020 · national
Continuity (1)
Related Publication 20230282495A1 · Sep 7, 2023
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