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Patent Application Utility PCT National Stage
App. No. 18/031,471 · Confirmation No. 2198

ETCHING GAS, METHOD FOR PRODUCING SAME, ETCHING METHOD, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

Inventor: Atsushi SUZUKI
Applicant: Resonac Corporation
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2026-06-03 ABN Abandonment 2 View
2025-11-26 CTNF Non-Final Rejection 12 View
2025-11-26 892 List of references cited by examiner 1 View
2025-11-26 SRFW Search information including classification, databases and other search related notes 1 View
2025-11-26 SRNT Examiner's search strategy and results 35 View
2025-11-26 FOR Foreign Reference 39 View
2025-10-30 RCEX Request for Continued Examination (RCE) — View
2025-10-30 XT/ Extension of Time 1 View
2025-10-30 RCEX Request for Continued Examination (RCE) 1 View
2025-10-30 N417.PYMT Electronic Fee Payment 2 View
2025-10-30 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-10-16 CTAV Advisory Action (PTOL-303) 2 View
2025-10-16 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2025-10-07 A.NE Response After Final Action — View
2025-10-07 A.NE Response After Final Action 1 View
2025-10-07 CLM Claims 5 View
2025-10-07 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2025-10-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-10-07 WFEE Fee Worksheet (SB06) 1 View
2025-10-07 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2025-07-09 CTFR Final Rejection 12 View
2025-07-09 SRFW Search information including classification, databases and other search related notes 1 View
2025-07-09 SRNT Examiner's search strategy and results 27 View
2025-04-25 A... Amendment/Request for Reconsideration-After Non-Final Rejection — View
2025-04-25 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2025-04-25 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2025-04-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-03-10 CTNF Non-Final Rejection 9 View
2025-03-10 892 List of references cited by examiner 1 View
2025-03-10 SRFW Search information including classification, databases and other search related notes 1 View
2025-03-10 1449 List of References cited by applicant and considered by examiner 2 View
2025-03-10 SRNT Examiner's search strategy and results 21 View
2025-03-10 1449 List of References cited by applicant and considered by examiner 2 View
2025-01-15 TRAN.LET Transmittal Letter — View
2025-01-15 FOR Foreign Reference 18 View
2025-01-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-01-15 TRAN.LET Transmittal Letter 2 View
2025-01-15 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2024-04-27 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2024-04-27 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2023-11-24 NTC.PUB Notice of Publication 1 View
2023-08-18 APP.FILE.REC Filing Receipt 3 View
2023-08-18 M903 Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed 2 View
2023-08-18 WCLM Claims Worksheet (PTO-2022) 1 View
2023-08-18 WFEE Fee Worksheet (SB06) 1 View
2023-08-18 APP.FILE.REC Filing Receipt 3 View
2023-08-18 M903 Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed 2 View
2023-08-18 WCLM Claims Worksheet (PTO-2022) 1 View
2023-08-18 WFEE Fee Worksheet (SB06) 1 View
2023-08-18 APP.FILE.REC Filing Receipt 3 View
2023-08-18 M903 Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed 2 View
2023-08-18 WCLM Claims Worksheet (PTO-2022) 1 View
2023-08-18 WFEE Fee Worksheet (SB06) 1 View
2023-04-12 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2023-04-12 FOR Foreign Reference 23 View
2023-04-12 FOR Foreign Reference 15 View
2023-04-12 FOR Foreign Reference 33 View
2023-04-12 FOR Foreign Reference 31 View
2023-04-12 FOR Foreign Reference 19 View
2023-04-12 FOR Foreign Reference 27 View
2023-04-12 FOR Foreign Reference 35 View
2023-04-12 FOR Foreign Reference 26 View
2023-04-12 371P Documents submitted with 371 (National Stage) Applications 5 View
2023-04-12 371P Documents submitted with 371 (National Stage) Applications 3 View
2023-04-12 ADS Application Data Sheet 5 View
2023-04-12 WFEE Fee Worksheet (SB06) 2 View
2023-04-12 N417 Electronic Filing System Acknowledgment Receipt 5 View
2023-04-12 TRNA Transmittal of New Application 3 View
2023-04-12 SPEC Specification 49 View
2023-04-12 CLM Claims 3 View
2023-04-12 ABST Abstract 1 View
2023-04-12 DRW Drawings-only black and white line drawings 1 View
2023-04-12 OATH Oath or Declaration filed 3 View
2023-04-12 PA.. Power of Attorney 2 View
2023-04-12 DRW Drawings-only black and white line drawings 1 View
2023-04-12 TRAN.LET Transmittal Letter 2 View
2023-04-12 A.PE Preliminary Amendment 1 View
2023-04-12 SPEC Specification 4 View
2023-04-12 ABST Abstract 1 View
2023-04-12 CLM Claims 5 View
2023-04-12 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2023-04-12 FRPR Certified Copy of Foreign Priority Application 28 View
2023-04-12 P.N.101.CONV PCT/RO/101 - Request form for new International Application - Conventional 4 View
2023-04-12 P.PAMPHLET WIPO Publication - Non-English version 40 View
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Quick Facts
App. No.
18/031,471
Filed
2023-04-12
Pub. No.
US20230374381A1
Art Unit
1713