Deformable membrane for speckle mitigation
A system with a deformable membrane for speckle mitigation. In some embodiments, the system includes a laser for producing laser light; a photodetector for detecting the laser light after interaction of the laser light with a sample; and a silicon deformable membrane, for modulating the phase of the laser light.
1. A system, comprising:
a laser for producing laser light;
a photodetector for detecting the laser light after interaction of the laser light with a sample; and
a phase modulator, comprising:
a single monolithic layer comprising:
a silicon deformable membrane, for modulating the phase of the laser light; and
a membrane frame supporting the silicon deformable membrane, and
a piezoelectric actuator monolithically integrated with the single monolithic layer and configured to vibrate the silicon deformable membrane,
wherein the membrane frame has a thickness equal to at least twice a thickness of the silicon deformable membrane.
2. The system of claim 1 , wherein the silicon deformable membrane is configured to modulate the phase of the laser light before the interaction of the laser light with the sample.
3. The system of claim 1 , wherein the silicon deformable membrane is configured to modulate the phase of the laser light after the interaction of the laser light with the sample.
4. The system of claim 1 , wherein the system is configured to cause the laser light to reflect from the silicon deformable membrane.
5. The system of claim 1 , wherein the system is configured to cause the laser light to be transmitted through the silicon deformable membrane.
6. The system of claim 1 , wherein the silicon deformable membrane has a thickness of at least 0.5 microns.
7. The system of claim 1 , wherein the silicon deformable membrane has a thickness of at most 5 microns.
8. The system of claim 1 , wherein the membrane frame has a thickness at most 50 times the thickness of the silicon deformable membrane.
9. The system of claim 1 , wherein the membrane frame surrounds the silicon deformable membrane.
10. The system of claim 9 , further comprising a transition region inside the membrane frame and surrounding the silicon deformable membrane, the transition region having a thickness greater than that of the silicon deformable membrane and less than that of the membrane frame.
11. The system of claim 9 , wherein the perimeter of the silicon deformable membrane has a curvilinear shape.
12. The system of claim 1 , further comprising an actuator frame supporting the membrane frame.
13. The system of claim 12 , wherein the actuator frame has a thickness of at least 50 microns.
14. The system of claim 13 , wherein the piezoelectric actuator is a cantilevered piezoelectric actuator.
15. The system of claim 13 , wherein the single monolithic layer comprises the actuator frame.
16. The system of claim 15 , wherein the piezoelectric actuator is on a shelf at one end of the actuator frame, and the shelf is connected to the membrane frame by a first tab.
17. The system of claim 16 , wherein the silicon deformable membrane is connected to the actuator frame by a second tab, opposite the first tab.
18. The system of claim 15 , wherein the membrane frame has a thickness at most 50 times the thickness of the silicon deformable membrane.