Photonic crystal element
Provided is a photonic crystal element, which shows small delay of an electric signal, shows a small propagation loss, and has uniform characteristics over its entirety. The photonic crystal element includes a two-dimensional photonic crystal slab having holes periodically formed in a substrate made of a ceramics material, the photonic crystal element being configured to guide an electromagnetic wave having a frequency of 30 GHz or more and 20 THz or less.
1 . A photonic crystal element, comprising a two-dimensional photonic crystal slab having holes periodically formed in a substrate made of a ceramics material, the photonic crystal element being configured to guide an electromagnetic wave having a frequency of 30 GHz or more and 20 THz or less,
wherein the ceramics material is polycrystalline or amorphous, and
wherein the substrate has pores each having a pore size of 1 μm or more at a ratio of from 0.5 ppm to 3.000 ppm.
2 . The photonic crystal element according to claim 1 , further comprising:
a support substrate arranged below the substrate, the support substrate being configured to support the substrate;
a joining portion configured to integrate the substrate and the support substrate with each other; and
a cavity defined by a lower surface of the substrate, an upper surface of the support substrate, and the joining portion.
3 . The photonic crystal element according to claim 1 , wherein a period of the holes is from 10 μm to 1 mm.
4 . The photonic crystal element according to claim 1 , wherein the substrate has a dielectric constant of from 3.6 to 11.5 at from 100 GHz to 10 THz.
5 . The photonic crystal element according to claim 1 , wherein the substrate has a dielectric loss of 0.01 or less.
6 . The photonic crystal element according to claim 1 , wherein the substrate has a resistivity of 100 kΩ·cm or more.
7 . The photonic crystal element according to claim 1 , wherein the ceramics material is one selected from the group consisting of: quartz; aluminum nitride; aluminum oxide; silicon carbide; magnesium oxide; and spinel.
8 . The photonic crystal element according to claim 1 , further comprising a waveguide defined in a portion in the substrate where the holes are free from being formed, the waveguide being configured to guide the electromagnetic wave having a frequency of 30 GHz or more and 20 THz or less.
9 . The photonic crystal element according to claim 1 , wherein the photonic crystal element is usable as an antenna, a band-pass filter, a coupler, a delay line, or an isolator.
10 . A photonic crystal element comprising:
a two-dimensional photonic crystal slab having holes periodically formed in a substrate made of a ceramics material,
a support substrate arranged below the substrate, the support substrate being configured to support the substrate; and
an active element capable of at least one of transmission, reception, or amplification of the electromagnetic wave, the active element being supported by the support substrate,
the photonic crystal element being configured to guide an electromagnetic wave having a frequency of 30 GHz or more and 20 THz or less,
wherein the substrate has pores each having a pore size of 1 μm or more at a ratio of from 0.5 ppm to 3,000 ppm.
11 . The photonic crystal element according to claim 10 , further comprising:
a line-defect first waveguide defined in a portion in the substrate where the holes are free from being formed; and
a second waveguide positioned between the active element and the first waveguide in a propagation path of the electromagnetic wave, the second waveguide being capable of guiding the electromagnetic wave.
12 . The photonic crystal element according to claim 10 , further comprising:
a line-defect waveguide defined in a portion in the substrate where the holes are free from being formed; and
a resonator defined in the portion in the substrate where the holes are free from being formed, the resonator being positioned between the active element and the waveguide in a propagation path of the electromagnetic wave, and being capable of guiding the electromagnetic wave.
13 . The photonic crystal element according to claim 10 , wherein the substrate and the support substrate are directly joined to each other.
14 . The photonic crystal element according to claim 13 ,
wherein the support substrate has a depressed portion, and
wherein the photonic crystal element comprises a cavity defined by a lower surface of the substrate and the depressed portion of the support substrate.
15 . The photonic crystal element according to claim 13 , further comprising:
an insulating layer positioned between the substrate and the support substrate; and
a cavity defined by a lower surface of the substrate, an upper surface of the support substrate, and the insulating layer.
16 . A photonic crystal element, comprising:
a two-dimensional photonic crystal slab having holes periodically formed in a substrate made of a ceramics material;
a support substrate arranged below the substrate, the support substrate being configured to support the substrate;
a joining portion configured to integrate the substrate and the support substrate with each other;
a cavity defined by a lower surface of the substrate, an upper surface of the support substrate, and the joining portion; and
a waveguide defined in a portion in the substrate where the holes are free from being formed, the waveguide being configured to guide the electromagnetic wave having a frequency of 30 GHz or more and 20 THz or less,
wherein the ceramics material is polycrystalline or amorphous,
wherein the substrate has pores each having a pore size of 1 μm or more at a ratio of from 0.5 ppm to 3,000 ppm,
wherein a period of the holes is from 10 μm to 1 mm,
wherein the substrate has a dielectric constant of from 3.6 to 11.5 at from 100 GHz to 10 THz,
wherein the substrate has a dielectric loss of 0.01 or less,
wherein the substrate has a resistivity of 100 kΩ·cm or more,
wherein the ceramics material is one selected from the group consisting of: quartz; aluminum nitride; aluminum oxide; silicon carbide; magnesium oxide; and spinel,
wherein the photonic crystal element is usable as an antenna, a band-pass filter, a coupler, a delay line, or an isolator.